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Chromium (Cr) Sputtering Targets

Chromium (Cr) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Chromium (Cr) General Information

Chromium is one of the most popular metals in the world. Chromium is a silvery, lustrous, hard, and brittle metal known for its high mirror polish and corrosion resistance. It has a melting point of 1,857°C, a density of 7.2 g/cc, and a vapor pressure of 10-4 Torr at 1,157°C. Its name comes from the Greek word "chroma", which means color, due to its very colorful compounds. It is widely used in the automobile industry to form a shiny coating found on wheels and bumpers. Chromium is used in many vacuum applications such as automotive glass coatings, photovoltaic cell fabrication, battery fabrication, and decorative and corrosion resistant coatings.

Chromium (Cr) Specifications

Material TypeChromium
SymbolCr
Atomic Weight51.9961
Atomic Number24
Color/AppearanceSilvery, Metallic
Thermal Conductivity94 W/m.K
Melting Point (°C)1,857
Coefficient of Thermal Expansion4.9 x 10-6/K
Theoretical Density (g/cc)7.2
Z Ratio0.305
SputterDC
Max Power Density
(Watts/Square Inch)
80*
Type of BondIndium, Elastomer
CommentsFilms very adherent. High rates possible.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

SDS
Click here for the Chromium SDS.
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Deposition Materials FAQ
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Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTCRXX351A2 $85.00 In Stock
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTCRXX351A4 $92.00 Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTCRXX352A2 $138.00 In Stock
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 2.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTCRXX352A4 $189.00 In Stock
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 2.00" DIAMETER X 0.250" THICK, D & T 2-56 CENTER HOLE, 0.133" DEEP, +/-0.010" ALL, W/ KEEPER 2.00" Dia. x 0.250" Thick 99.95% U.S. Gun EJTCRXX352K4 P.O.R. Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ KEEPER, FOR 2" TORUS MAG KEEPER 2.00" Dia. x 0.250" Thick 99.95% TORUS Mag Keeper 2 2 EJTCRXX352TK4 P.O.R. In Stock
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTCRXX353A2 $199.00 In Stock
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTCRXX353A4 $250.00 In Stock
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ 6-32 CENTER HOLE, 0.133" DEEP, W/ KEEPER AND SCREW 3.00" Dia. x 0.250" Thick 99.95% U.S. Gun EJTCRXX353K4 P.O.R. Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, , W/ KEEPER, FOR 3" TORUS MAG KEEPER 3.00" Dia. x 0.250" Thick 99.95% TORUS Mag Keeper 3 2 EJTCRXX353TK4 P.O.R. In Stock
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTCRXX354A2 $368.00 Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 4.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTCRXX354A4 $424.00 In Stock
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ KEEPER, FOR 4" TORUS MAG KEEPER 4.00" Dia. x 0.250" Thick 99.95% TORUS Mag Keeper 4 2 EJTCRXX354TK4 P.O.R. Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 57MM DIAMETER X 1MM THICK, +/-0.25MM DIA, +0.5MM/-0 THICKNESS 57mm Dia. x 1mm Thick 99.95% EJTCRXXSPL24 P.O.R. Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 57MM DIAMETER X 2MM THICK, +/-0.25MM ALL 57mm Dia. x 2mm Thick 99.95% KJL81063 P.O.R. Call for Availability
Chromium CHROMIUM TARGET, 99.95% PURE, 57MM DIA X 3.175MM THICK, +/-.010" ALL 57mm Dia. x 3.175mm Thick 99.95% KJL81030 P.O.R. Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE 57MM DIA X 3.17MM THICK, +/-0.25MM ALL 57mm Dia. x 3.17mm Thick 99.95% KJL81022 P.O.R. Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 57MM DIAMETER X 3.18MM THICK, +/-0.25MM ALL 57mm Dia. x 3.18mm Thick 99.95% EJTCRXX57MM+ P.O.R. Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 6.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 6.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTCRXX356A2 P.O.R. Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 6.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTCRXX356A4 $572.00 Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 8.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 8.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTCRXX358A2 P.O.R. Call for Availability
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 8.00" DIAMETER X 0.250" THICK, +/- .010" ALL 8.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTCRXX358A4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.

Bonded Assemblies Ordering Table

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Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Chromium CHROMIUM TARGET, Cr, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.95% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUCRXX353A4 P.O.R. Call for Availability

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
Contact Us - Chromium Cr Sputtering Targets