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Copper (Cu) Sputtering Targets

Copper (Cu) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.

Copper (Cu) General Information

Copper is one of the most highly utilized elements in the world with evidence of its usage found during ancient times. It is reddish-orange in color with a melting point of 1,083°C, a density of 8.92 g/cc, and a vapor pressure of 10-4 Torr at 1,017°C. Two of the most popular alloys in the world, brass and bronze, contain copper. It is known to be an excellent conductor of heat and electricity and can be found in wire, coins, and electromagnets. The vacuum industry relies heavily on copper material for backing plates which are bonded to sputtering targets. Copper, along with its alloys and compounds, are evaporated under vacuum to form layers in the manufacture of semiconductors, sensors, and circuit devices.

Copper (Cu) Specifications

Material TypeCopper
SymbolCu
Atomic Weight63.546
Atomic Number29
Color/AppearanceCopper, Metallic
Thermal Conductivity400 W/m.K
Melting Point (°C)1,083
Coefficient of Thermal Expansion16.5 x 10-6/K
Theoretical Density (g/cc)8.92
Z Ratio0.437
SputterDC
Max Power Density
(Watts/Square Inch)
200*
Type of BondIndium, Elastomer
CommentsAdhesion poor. Use interlayer (Cr). Evaporates using any source material.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

SDS
Click here for the Copper SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.
Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Cart
Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Cart
Copper 1.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCUXX401A2 $67.00 In Stock
Copper 1.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTCUXX501A2 $87.00 In Stock
Copper 1.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCUXX401A4 $92.00 Call for Availability
Copper 1.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTCUXX501A4 P.O.R. Call for Availability
Copper 2.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCUXX402A2 $87.00 In Stock
Copper 2.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTCUXX502A2 $128.00 In Stock
Copper 2.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCUXX402A4 $97.00 In Stock
Copper 2.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTCUXX502A4 $208.00 In Stock
Copper 2.00" Dia. x 0.250" Thick 99.99% U.S. Gun - EJTCUXX402K4 P.O.R. Call for Availability
Copper 2.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 2 2 EJTCUXX402TK4 P.O.R. In Stock
Copper 2.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 2 2 EJTCUXX502TK4 P.O.R. In Stock
Copper 3.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCUXX403A2 $97.00 In Stock
Copper 3.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTCUXX503A2 P.O.R. Call for Availability
Copper 3.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCUXX403A4 $118.00 In Stock
Copper 3.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTCUXX503A4 $235.00 In Stock
Copper 3.00" Dia. x 0.250" Thick 99.99% U.S. Gun - EJTCUXX403K4 P.O.R. Call for Availability
Copper 3.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 3 2 EJTCUXX403TK4 P.O.R. In Stock
Copper 3.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 3 2 EJTCUXX503TK4 P.O.R. In Stock
Copper 4.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCUXX404A2 $128.00 Call for Availability
Copper 4.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTCUXX504A2 P.O.R. Call for Availability
Copper 4.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCUXX404A4 $133.00 In Stock
Copper 4.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTCUXX504A4 P.O.R. Call for Availability
Copper 4.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 4 2 EJTCUXX404TK4 P.O.R. In Stock
Copper 4.00" Dia. x 0.250" Thick 99.999% U.S. Gun - EJTCUXX504K4 P.O.R. Call for Availability
Copper 4.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 4 2 EJTCUXX504TK4 P.O.R. Call for Availability
Copper 5.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCUXX405A4 P.O.R. Call for Availability
Copper 57mm Dia. x 0.1mm Thick 99.999% - - KJL81017 P.O.R. Call for Availability
Copper 57mm Dia. x 0.2mm Thick 99.999% - - KJL81018 P.O.R. Call for Availability
Copper 57mm Dia. x 0.2mm Thick 99.99% - - KJL81071 P.O.R. Call for Availability
Copper 57mm Dia. x 0.3mm Thick 99.99% - - KJL81040 P.O.R. Call for Availability
Copper 57mm Dia. x 0.3mm Thick 99.999% - - KJL81054 P.O.R. Call for Availability
Copper 57mm Dia. x 0.5mm Thick 99.999% - - KJL81053 P.O.R. Call for Availability
Copper 57mm Dia. x 0.5mm Thick 99.99% - - KJL81060 P.O.R. Call for Availability
Copper 57mm Dia. x 1mm Thick 99.99% - - KJL81059 P.O.R. Call for Availability
Copper 57mm Dia. x 2mm Thick 99.99% - - KJL81076 P.O.R. Call for Availability
Copper 57mm Dia. x 3mm Thick 99.99% - - EJTCUXXSPL27 P.O.R. Call for Availability
Copper 6.0" Dia. x 0.0625" Thick 99.995% Most Standard Guns 1 Limited availability and specially priced. EJTCUXX456A1 P.O.R. Call for Availability
Copper 6.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCUXX406A2 P.O.R. Call for Availability
Copper 6.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTCUXX506A2 P.O.R. Call for Availability
Copper 6.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCUXX406A4 $304.00 Call for Availability
Copper 6.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTCUXX506A4 P.O.R. Call for Availability
Copper 8.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTCUXX508A2 P.O.R. Call for Availability
Copper 8.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCUXX408A4 $322.00 Call for Availability
Copper 8.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTCUXX508A4 P.O.R. Call for Availability

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Limited availability and specially priced.