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Erbium (Er) Sputtering Targets

Erbium (Er) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Erbium (Er) Specifications

Material TypeErbium
SymbolEr
Atomic Weight167.259
Atomic Number68
Color/AppearanceSilvery White, Metallic
Thermal Conductivity15 W/m.K
Melting Point (°C)1,529
Coefficient of Thermal Expansion12.2 x 10-6/K
Theoretical Density (g/cc)9.07
Z Ratio0.74
SputterDC
Max Power Density
(Watts/Square Inch)
20*

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Notes:
  • Bonding service not available on this material.
  • Due to the highly reactive nature of these materials, packaging in oil is required to reduce the opportunity for oxidation or other reaction. Please click here for the recommended cleaning procedure.
  • This material is a Hazardous shipping item. This product must drop ship from US headquarters on customer provided Fed Ex Account.

SDS
Click here for the Erbium SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Erbium ERBIUM TARGET, Er, 99.9% PURE TREM, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, PACKAGED IN MINERAL OIL, CANNOT OFFER BONDING 1.00" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTERXX301A2 P.O.R. Contact KJLC for Availability
Erbium ERBIUM TARGET, Er, 99.9% PURE TREM, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL. PACKAGED IN MINERAL OIL, CANNOT OFFER BONDING 1.00" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTERXX301A4 P.O.R. Contact KJLC for Availability
Erbium ERBIUM TARGET, Er, 99.9% PURE TREM, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, PACKAGED IN MINERAL OIL, CANNOT OFFER BONDING 2.00" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTERXX302A2 P.O.R. Contact KJLC for Availability
Erbium ERBIUM TARGET, Er, 99.9% PURE TREM, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, PACKAGED IN MINERAL OIL, CANNOT OFFER BONDING 2.00" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTERXX302A4 P.O.R. Contact KJLC for Availability
Erbium ERBIUM TARGET, Er, 99.9% PURE TREM, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, PACKAGED IN MINERAL OIL, CANNOT OFFER BONDING 3.00" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTERXX303A2 P.O.R. Contact KJLC for Availability
Erbium ERBIUM TARGET, Er, 99.9% PURE TREM, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, PACKAGED IN MINERAL OIL, CANNOT OFFER BONDING 3.00" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTERXX303A4 P.O.R. Contact KJLC for Availability
Erbium ERBIUM TARGET, Er, 99.9% PURE TREM, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, PACKAGED IN MINERAL OIL, CANNOT OFFER BONDING 4.00" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTERXX304A2 P.O.R. Contact KJLC for Availability
Erbium ERBIUM TARGET, Er, 99.9% PURE TREM, 4.00" DIAMETER X 0.25" THICK, +/-0.010" ALL, PACKAGED IN MINERAL OIL, CANNOT OFFER BONDING 4.00" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTERXX304A4 P.O.R. Contact KJLC for Availability
Erbium ERBIUM TARGET, Er, 99.9% PURE TREM, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, PACKAGED IN MINERAL OIL, CANNOT OFFER BONDING 6.00" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTERXX306A4 P.O.R. Contact KJLC for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

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