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Iron Oxide (Fe2O3) Sputtering Targets

Iron Oxide (Fe2O3) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Iron Oxide (Fe2O3) Specifications

Material TypeIron (III) Oxide
SymbolFe2O3
Color/AppearanceRed-Brown, Crystalline Solid
Melting Point (°C)1,565
Theoretical Density (g/cc)5.24
Z Ratio**1.00
SputterRF, RF-R
Max Power Density
(Watts/Square Inch)
20*
Type of BondIndium, Elastomer
CommentsDisproportionate to Fe3O4 at 1,530°C.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.

Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


Notes:
  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

SDS
Click here for the Iron Oxide SDS.
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Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
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Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Cart
Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Cart
Iron Oxide 1.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTFEOX301A2 P.O.R. Call for Availability
Iron Oxide 1.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTFEOX301A4 P.O.R. Call for Availability
Iron Oxide 2.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTFEOX302A2 $505.00 Call for Availability
Iron Oxide 2.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTFEOX302A4 $658.00 Call for Availability
Iron Oxide 3.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTFEOX303A2 $663.00 Call for Availability
Iron Oxide 3.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTFEOX303A4 P.O.R. Call for Availability
Iron Oxide 4.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTFEOX304A2 P.O.R. Call for Availability
Iron Oxide 4.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTFEOX304A4 P.O.R. Call for Availability
Iron Oxide 5.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTFEOX305A2 P.O.R. Call for Availability
Iron Oxide 5.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTFEOX305A4 P.O.R. Call for Availability
Iron Oxide 6.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTFEOX306A2 P.O.R. Call for Availability
Iron Oxide 6.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTFEOX306A4 P.O.R. Call for Availability
Iron Oxide 7.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTFEOX307A2 P.O.R. Call for Availability
Iron Oxide 7.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTFEOX307A4 P.O.R. Call for Availability
Iron Oxide 8.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTFEOX308A2 P.O.R. Call for Availability
Iron Oxide 8.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTFEOX308A4 P.O.R. Call for Availability

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Bonded Assemblies Ordering Table

Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns Notes PartNo Price In Stock Add To
Cart
Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns Notes PartNo Price In Stock Add To
Cart
Iron Oxide 1.00" Dia x 0.125" Thick 99.9% Indium 1.00" Dia x 0.125" Thick Most Standard Guns 1 EJUFEOX301A4 P.O.R. Call for Availability
Iron Oxide 2.00" Dia x 0.125" Thick 99.9% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUFEOX302A4 P.O.R. Call for Availability
Iron Oxide 2.00" Dia x 0.125" Thick 99.9% Elastomer 2.00" Dia x 0.125" Thick TORUS Mag Keeper 2 2 EJUFEOX302TK4 P.O.R. Call for Availability
Iron Oxide 3.00" Dia x 0.125" Thick 99.9% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUFEOX303A4 P.O.R. Call for Availability

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Contact Us - Iron Oxide Fe2O3 Sputtering Targets