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Magnesium (Mg) Sputtering Targets

Magnesium (Mg) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Magnesium (Mg) General Information

Magnesium is a grey-white, alkaline earth metal with a melting point of 649°C, a density of 1.74 g/cc, and a vapor pressure of 10-4 Torr at 327°C. It is extremely flammable, especially in powder form, and fires are difficult to extinguish. Magnesium is also an essential element to life. Magnesium is responsible for regulating nerve function, blood pressure, and the levels of nutrients in the human body. It is extensively used in the production of aircraft, engine casings, laptops, cell phones, and cameras. Magnesium and its alloys are evaporated under vacuum for the development of magnetic storage media, optical storage media, and semiconductors.

Magnesium (Mg) Specifications

Material TypeMagnesium
SymbolMg
Atomic Weight24.305
Atomic Number12
Color/AppearanceSilvery White, Metallic
Thermal Conductivity160 W/m.K
Melting Point (°C)649
Coefficient of Thermal Expansion8.2 x 10-6/K
Theoretical Density (g/cc)1.74
Z Ratio1.61
SputterDC
Max Power Density
(Watts/Square Inch)
35*
Type of BondIndium, Elastomer
Export Control (ECCN) 1C228
CommentsExtremely high rates possible.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Note:
  • This material has a relatively high vapor pressure at low temperatures which can cause ppm level contamination in the chamber and subsequent films. Careful consideration should be taken before this material is used in any deposition system. For this reason, some users prefer to use only dedicated vacuum chambers for deposition.

Hazard Notes:
  • Export Controlled: This is an Export Controlled Material. Restrictions may apply.
SDS
Click here for the Magnesium SDS.
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Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
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Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTMGXX351A2 $116.00 Call for Availability
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.98% Most Standard Guns 1 EJTMGXX381A2 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTMGXX351A4 $121.00 Call for Availability
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.00" Dia. x 0.250" Thick 99.98% Most Standard Guns 1 EJTMGXX381A4 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTMGXX352A2 $189.00 Call for Availability
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia. x 0.125" Thick 99.98% Most Standard Guns 1 EJTMGXX382A2 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 2.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTMGXX352A4 $210.00 In Stock
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 2.00" DIAMETER X 0.250" THICK, WITH 2-56 CENTER HOLE, 0.188" DEEP, WITH SCREW AND KEEPER 2.00" Dia. x 0.250" Thick 99.95% U.S. Gun EJTMGXX352K4 P.O.R. Call for Availability
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 2.00" Dia. x 0.250" Thick 99.98% Most Standard Guns 1 EJTMGXX382A4 P.O.R. In Stock
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ KEEPER, FOR 2" TORUS MAG KEEPER 2.00" Dia. x 0.250" Thick 99.98% TORUS Mag Keeper 2 2 EJTMGXX382TK4 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTMGXX353A2 $215.00 In Stock
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia. x 0.125" Thick 99.98% Most Standard Guns 1 EJTMGXX383A2 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTMGXX353A4 $220.00 Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, D & T FOR 6-32 CENTER HOLE, 0.133" DEEP, W/ KEEPER 3.00" Dia. x 0.250" Thick 99.95% U.S. Gun EJTMGXX353K4 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ KEEPER, FOR 3" TORUS MAG KEEPER 3.00" Dia. x 0.250" Thick 99.95% TORUS Mag Keeper 3 2 EJTMGXX353TK4 P.O.R. Call for Availability
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.98% Most Standard Guns 1 EJTMGXX383A4 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTMGXX354A2 $235.00 Call for Availability
Magnesium Magnesium Circular Sputter Target (4.0" Diameter x 0.125" Thickness, 99.98% pure) 4.00" Dia. x 0.125" Thick 99.98% Most Standard Guns 1 EJTMGXX384A2 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 4.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTMGXX354A4 $260.00 Call for Availability
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 4.00" Dia. x 0.250" Thick 99.98% Most Standard Guns 1 Limited availability and specially priced. EJTMGXX384A4 P.O.R. In Stock
Magnesium Magnesium Circular Sputter Target (5.0" Diameter x 0.125" Thickness, 99.98% pure) 5.00" Dia. x 0.125" Thick 99.98% Most Standard Guns 1 EJTMGXX385A2 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 6.00" DIAMETER X 0.25" THICK, +/-0.010" ALL 6.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTMGXX356A4 $466.00 Call for Availability
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 6.00" Dia. x 0.250" Thick 99.98% Most Standard Guns 1 EJTMGXX386A4 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 8.00" DIAMETER X 0.25" THICK, +/-0.010" ALL 8.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTMGXX358A4 P.O.R. Call for Availability
Magnesium Magnesium Circular Sputter Target (8.0" Diameter x 0.250" Thickness, 99.98% pure) 8.00" Dia. x 0.250" Thick 99.98% Most Standard Guns 1 EJTMGXX388A4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Limited availability and specially priced.

Bonded Assemblies Ordering Table

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Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia x 0.125" Thick 99.95% Indium 1.00" Dia x 0.125" Thick Most Standard Guns 1 EJUMGXX351A4 P.O.R. Call for Availability
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia x 0.125" Thick 99.95% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUMGXX352A4 P.O.R. In Stock
Magnesium MAGNESIUM TARGET, Mg, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.95% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUMGXX353A4 P.O.R. Call for Availability
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia x 0.125" Thick 99.98% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUMGXX382A4 P.O.R. Call for Availability
Magnesium EUDF MAGNESIUM TARGET, Mg, 99.98% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.98% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUMGXX383A4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
Contact Us - Magnesium Mg Sputtering Targets