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Palladium (Pd) Sputtering Targets

Palladium (Pd) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Palladium (Pd) General Information

Palladium is a silvery-white precious metal that bears a sharp resemblance to platinum. It has a melting point of 1,554°C, a density of 12.038 g/cc, and a vapor pressure of 10-4 Torr at 1,192°C. It belongs to the platinum group of metals on the periodic table. It has the lowest melting point of the elements of this group and is the least dense. Palladium is remarkably malleable, ductile, and corrosion resistant. Like platinum, its most prominent use in industry is as a catalytic converter. It can also found in jewelry and surgical instruments. Palladium is evaporated under vacuum for the manufacture of semiconductors, sensors, and data storage.

Palladium (Pd) Specifications

Material TypePalladium
SymbolPd
Atomic Weight106.42
Atomic Number46
Color/AppearanceSilvery White Metallic
Thermal Conductivity72 W/m.K
Melting Point (°C)1,554
Coefficient of Thermal Expansion11.8 x 10-6/K
Theoretical Density (g/cc)12.02
Z Ratio0.357
SputterDC
Max Power Density
(Watts/Square Inch)
100*
Type of BondIndium, Elastomer
CommentsAlloys with refractory metals.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Notes:
  • Volume Pricing Available: Volume pricing is available upon request. Please contact us with your required quantity.
  • Precious Metals Recycling Program: We offer a precious metals recycling program designed to reduce your material costs. Click here for details.

SDS
Click here for the Palladium SDS.
Precious Metals
Reclaim Service
We offer a precious metal reclaim program, designed to reduce replacement costs.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 1.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTPDXX351A2 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTPDXX351A4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 2.00" DIAMETER X 0.0625" THICK, +0/-0.010" ALL 2.00" Dia. x 0.0625" Thick 99.95% Most Standard Guns 1 EJTPDXX352A1 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 2.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL 2.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTPDXX352A2 $7,555.00 In Stock
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 2.00" DIAMETER X 0.250" THICK, +0/-0.010" ALL 2.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTPDXX352A4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 3.00" DIAMETER X 0.0625" THICK, +0/-0.010" ALL 3.00" Dia. x 0.0625" Thick 99.95% Most Standard Guns 1 EJTPDXX353A1 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL 3.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTPDXX353A2 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 3.00" DIAMETER X 0.250" THICK, +0/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTPDXX353A4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 4.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL 4.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTPDXX354A2 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 4.00" DIAMETER X 0.250" THICK, +0/-0.010" ALL 4.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTPDXX354A4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET FOR KJL108 SYSTEM, Pd, 99.95% PURE, 57MM DIAMETER x 0.1MM, +0/-0.25MM DIA, +0.125MM/-0 THK 57mm Dia. x 0.1mm Thick 99.95% KJL81004 P.O.R. Call for Availability
Palladium PALLADIUM TARGET FOR KJL108, Pd, 99.95% PURE, 57MM DIAMETER x 0.2MM THICK, +/-0.125MM ALL 57mm Dia. x 0.2mm Thick 99.95% KJL81008 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 57MM DIAMETER X 1MM THICK, +0/-0.25MM DIA, +0/-0.125MM THK 57mm Dia. x 1mm Thick 99.95% KJL81031 P.O.R. Call for Availability
Palladium Palladium Circular Sputter Target (6.0" Diameter x 0.125" Thickness, 99.95% pure) 6.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTPDXX356A2 P.O.R. Call for Availability
Palladium Palladium Circular Sputter Target (6.0" Diameter x 0.250" Thickness, 99.95% pure) 6.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTPDXX356A4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 8.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL 8.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTPDXX358A2 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 8.00" DIAMETER X 0.250" THICK, +0/-0.010" ALL 8.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTPDXX358A4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Bonded Assemblies Ordering Table

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Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 1.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia x 0.125" Thick 99.95% Indium 1.00" Dia x 0.125" Thick Most Standard Guns 1 EJUPDXX351A4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 2.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia x 0.125" Thick 99.95% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUPDXX352A4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 2.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR MAG KEEPER 2 PER DRAWING 2.00" Dia x 0.125" Thick 99.95% Elastomer 2.00" Dia x 0.125" Thick TORUS Mag Keeper 2 2 EJUPDXX352TK4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.95% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUPDXX353A4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR 3" TORUS MAG KEEPER 3.00" Dia x 0.125" Thick 99.95% Elastomer 3.00" Dia x 0.125" Thick TORUS Mag Keeper 3 2 EJUPDXX353TK4 P.O.R. Call for Availability
Palladium PALLADIUM TARGET, Pd, 99.95% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia x 0.125" Thick 99.95% Indium 4.00" Dia x 0.125" Thick Most Standard Guns 1 EJUPDXX354A4 P.O.R. Call for Availability
X CLOSE

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Contact Us - Palladium Pd Sputtering Targets