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Permalloy (Ni/Fe/Mo/Mn) Sputtering Targets

Permalloy (Ni/Fe/Mo/Mn) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Permalloy (Ni/Fe/Mo/Mn) Specifications

Material TypePermalloy®
SymbolNi/Fe/Mo/Mn
Melting Point (°C)1,395
Theoretical Density (g/cc)8.7
FerromagneticMagnetic Material
Z Ratio**1.00
SputterDC
CommentsFilm low in Ni.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.

Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Note:
  • Ferromagnetic materials require additional consideration when selecting configuration/ thickness. High strength magnets or thinner targets may be required. Bonding these materials creates additional concerns due to the increase in distance from the magnets. Contact your magnetron sputter cathode supplier or reference your equipment manual for additional information. For more information on TORUS sputter source and target sizes, click here.

SDS
Click here for the Permalloy SDS.

WARNING

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Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Permalloy PERMALLOY/HYMU 80 TARGET, (Ni/Fe/Mo/Mn) COMMERCIAL PURITY ~99%, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia. x 0.125" Thick Most Standard Guns 1 EJTPERM252A2 $204.00 Call for Availability
Permalloy PERMALLOY/HYMU 80 TARGET, (Ni/Fe/Mo/Mn) COMMERCIAL PURITY ~99%, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 2.00" Dia. x 0.250" Thick Most Standard Guns 1 EJTPERM252A4 P.O.R. Call for Availability
Permalloy PERMALLOY/HYMU 80 TARGET, (Ni/Fe/Mo/Mn) COMMERCIAL PURITY ~99%, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia. x 0.125" Thick Most Standard Guns 1 EJTPERM253A2 $342.00 Call for Availability
Permalloy PERMALLOY/HYMU 80 TARGET, (Ni/Fe/Mo/Mn) COMMERCIAL PURITY~99%, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.00" Dia. x 0.250" Thick Most Standard Guns 1 EJTPERM253A4 $352.00 Call for Availability
Permalloy PERMALLOY/HYMU 80 TARGET, (Ni/Fe/Mo/Mn) COMMERCIAL PURITY ~99%, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia. x 0.125" Thick Most Standard Guns 1 EJTPERM254A2 P.O.R. Call for Availability
Permalloy Permalloy Circular Sputter Target (4.0" Diameter x 0.250" Thickness, 99.5% pure) 4.00" Dia. x 0.250" Thick Most Standard Guns 1 EJTPERM254A4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Contact Us - Permalloy Ni/Fe/Mo/Mn Sputtering Targets