Permalloy (Ni/Fe/Mo/Mn) Sputtering Targets
Permalloy (Ni/Fe/Mo/Mn) Sputtering Targets Overview
Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here.
Permalloy (Ni/Fe/Mo/Mn) Specifications
| Material Type | Permalloy® † |
| Symbol | Ni/Fe/Mo/Mn |
| Melting Point (°C) | 1,395 |
| Theoretical Density (g/cc) | 8.7 |
| Ferromagnetic | Magnetic Material |
| Z Ratio | **1.00 |
| Sputter | DC |
| Comments | Film low in Ni. |
** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.
Z-Factors
Empirical Determination of Z-Factor
Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:
- Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
- Place a new substrate adjacent to the used quartz sensor.
- Set QCM Density to the calibrated value; Tooling to 100%
- Zero thickness
- Deposit approximately 1000 to 5000 A of material on the substrate.
- Use a profilometer or interferometer to measure the actual substrate film thickness.
- Adjust the Z Factor of the instrument until the correct thickness reading is shown.
Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.
Ordering Table
| Material | Description | Size | Compatible Guns | Part Number | Price | In Stock | Add To Cart | |
|---|---|---|---|---|---|---|---|---|
| Material | Description | Size | Compatible Guns | Part Number | Price | In Stock | Add To Cart | |
| Permalloy |
PERMALLOY/HYMU 80 TARGET, |
2.00" Dia. x 0.125" Thick | Consult Sputter Gun Manual | EJTPERM252A2 | $215.00 |
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| Permalloy |
PERMALLOY/HYMU 80 TARGET, |
2.00" Dia. x 0.250" Thick | Consult Sputter Gun Manual | EJTPERM252A4 | P.O.R. |
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| Permalloy |
PERMALLOY/HYMU 80 TARGET, |
3.00" Dia. x 0.125" Thick | Consult Sputter Gun Manual | EJTPERM253A2 | $360.00 |
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| Permalloy |
PERMALLOY/HYMU 80 TARGET, |
3.00" Dia. x 0.250" Thick | Consult Sputter Gun Manual | EJTPERM253A4 | $370.00 |
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| Permalloy |
PERMALLOY/HYMU 80 TARGET, |
4.00" Dia. x 0.125" Thick | Consult Sputter Gun Manual | EJTPERM254A2 | P.O.R. |
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| Permalloy |
Permalloy Circular Sputter Target (4.0" Diameter x 0.250" Thickness, |
4.00" Dia. x 0.250" Thick | Consult Sputter Gun Manual | EJTPERM254A4 | P.O.R. |
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Target & Backing Plate Service Form
KJLC offers bonding services for both KJLC and customer supplied targets and backing plates. Please fill out our Target & Backing Plate Service Form to acquire a return authorization number.
Target & Backing Plate Service Form