Welcome to the Kurt J. Lesker Company.  

Sign In | Register

Current Region: International (Change) | Contact Us |   RSS   Twitter   LinkedIn   YouTube


Please select your country or region to be
directed to the appropriate Lesker site.

Permalloy (Ni/Fe/Mo/Mn) Sputtering Targets


Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Material TypePermalloy®
Melting Point (°C)1,395
Theoretical Density (g/cc)8.7
FerromagneticMagnetic Material
Z Ratio**1.00
CommentsFilm low in Ni.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.


Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Material Notes

NOTE: Ferromagnetic materials require additional consideration when selecting configuration/ thickness. High strength magnets or thinner targets may be required. Bonding these materials creates additional concerns due to the increase in distance from the magnets. Contact your magnetron sputter cathode supplier or reference your equipment manual for additional information.

Click here for the Permalloy SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Compatible Guns Part # Price Add To
Material Size Compatible Guns Part # Price Add To
Permalloy 2.00" Dia. x 0.125" Thick All Standard Guns EJTPERM252A2 $200.00
Permalloy 2.00" Dia. x 0.250" Thick All Standard Guns EJTPERM252A4 P.O.R.
Permalloy 3.00" Dia. x 0.125" Thick All Standard Guns EJTPERM253A2 $335.00
Permalloy 3.00" Dia. x 0.250" Thick All Standard Guns EJTPERM253A4 $345.00
Permalloy 4.00" Dia. x 0.125" Thick All Standard Guns EJTPERM254A2 P.O.R.
Permalloy 4.00" Dia. x 0.250" Thick All Standard Guns EJTPERM254A4 P.O.R.