Close

Please select your country or region to be
directed to the appropriate Lesker site.

Rhodium (Rh) Sputtering Targets

Rhodium (Rh) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Rhodium (Rh) Specifications

Material TypeRhodium
SymbolRh
Atomic Weight102.9055
Atomic Number45
Color/AppearanceSilvery White Metallic
Thermal Conductivity150 W/m.K
Melting Point (°C)1,966
Coefficient of Thermal Expansion8.2 x 10-6/K
Theoretical Density (g/cc)12.41
Z Ratio0.21
SputterDC
Max Power Density
(Watts/Square Inch)
20*
Type of BondIndium, Elastomer
CommentsE-beam gun preferred.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

SDS
Click here for the Rhodium SDS.
Precious Metals
Reclaim Service
We offer a precious metal reclaim program, designed to reduce replacement costs.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

X CLOSE
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Rhodium RHODIUM TARGET, Rh, 99.8% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.8% Most Standard Guns 1 EJTRHXX281A2 P.O.R. Call for Availability
Rhodium RHODIUM TARGET, Rh, 99.8% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.00" Dia. x 0.250" Thick 99.8% Most Standard Guns 1 EJTRHXX281A4 P.O.R. Call for Availability
Rhodium RHODIUM TARGET, Rh, 99.8% PURE, 2.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL 2.00" Dia. x 0.125" Thick 99.8% Most Standard Guns 1 EJTRHXX282A2 P.O.R. Call for Availability
Rhodium RHODIUM TARGET, Rh, 99.8% PURE, 2.00" DIAMETER X 0.250" THICK, +0/-0.010" ALL, HOT-PRESSED 2.00" Dia. x 0.250" Thick 99.8% Most Standard Guns 1 EJTRHXX282A4 P.O.R. Call for Availability
Rhodium RHODIUM TARGET, Rh, 99.8% PURE 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, HOT-PRESSED, >90% DENSE 3.00" Dia. x 0.125" Thick 99.8% Most Standard Guns 1 EJTRHXX283A2 P.O.R. Call for Availability
Rhodium RHODIUM TARGET, Rh, 99.8% PURE, 3.00" DIAMETER X 0.250" THICK, +0/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.8% Most Standard Guns 1 EJTRHXX283A4 P.O.R. Call for Availability
Rhodium RHODIUM TARGET, Rh, 99.8% PURE, 4.00" DIAMETER X 0.125" THICK, +0/-0.010" ALL, HOT PRESSED 4.00" Dia. x 0.125" Thick 99.8% Most Standard Guns 1 EJTRHXX284A2 P.O.R. Call for Availability
Rhodium Rhodium Circular Sputter Target (4.0" Diameter x 0.250" Thickness, 99.8% pure) 4.00" Dia. x 0.250" Thick 99.8% Most Standard Guns 1 EJTRHXX284A4 P.O.R. Call for Availability
X CLOSE

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Contact Us - Rhodium Rh Sputtering Targets