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Antimony (Sb) Sputtering Targets

Antimony (Sb) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Antimony (Sb) Specifications

Material TypeAntimony
SymbolSb
Atomic Weight121.76
Atomic Number51
Color/AppearanceSilvery, Lustrous Gray, Semi-metallic
Thermal Conductivity24 W/m.K
Melting Point (°C)630
Coefficient of Thermal Expansion11 x 10-6/K
Theoretical Density (g/cc)6.68
Z Ratio0.768
SputterRF, DC
Max Power Density
(Watts/Square Inch)
20*
Type of BondIndium, Elastomer
CommentsEvaporates well.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Notes:
  • Some materials and manufacturing methods may yield product with surface imperfections. In many cases, these imperfections are merely visual defects. Performance may be affected according to process requirements.
  • Some materials and manufacturing methods may yield product with higher than average porosity. Performance may be affected according to process requirements.
  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.

SDS
Click here for the Antimony SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
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Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 1.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTSBXX501A2 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 1.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTSBXX501A4 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 2.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTSBXX502A2 P.O.R. In Stock
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 2.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTSBXX502A4 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 3.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTSBXX503A2 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 3.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTSBXX503A4 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 4.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTSBXX504A2 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 4.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTSBXX504A4 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 6.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 6.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTSBXX506A2 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS 6.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTSBXX506A4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Bonded Assemblies Ordering Table

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Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia x 0.125" Thick 99.999% Indium 1.00" Dia x 0.125" Thick Most Standard Guns 1 EJUSBXX501A4 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia x 0.125" Thick 99.999% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUSBXX502A4 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR TORUS MAG KEEPE 2.00" Dia x 0.125" Thick 99.999% Elastomer 2.00" Dia x 0.125" Thick TORUS Mag Keeper 2 2 EJUSBXX502TK4 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.999% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUSBXX503A4 P.O.R. Call for Availability
Antimony ANTIMONY TARGET, Sb, 99.999% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, MAY HAVE SURFACE IMPERFECTIONS, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR 3" TORUS MAG KE 3.00" Dia x 0.125" Thick 99.999% Elastomer 3.00" Dia x 0.125" Thick TORUS Mag Keeper 3 2 EJUSBXX503TK4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Contact Us - Antimony Sb Sputtering Targets