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Silicon Dioxide (Fused Quartz) (SiO2) Sputtering Targets

Silicon Dioxide (Fused Quartz) (SiO2) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.

Silicon Dioxide (Fused Quartz) (SiO2) General Information

Silicon dioxide, also known as silica, has a chemical formula of SiO2. It has a melting point of 1,610°C, a density of 2.648 g/cc, and a vapor pressure of 10-4 Torr at 1,025°C. Silicon dioxide is commonly found in nature as sand or quartz. It is primarily used in the production of glass for windows and beverage bottles. It is evaporated under vacuum for the fabrication of optoelectronic and circuit devices.

Silicon Dioxide (Fused Quartz) (SiO2) Specifications

Material TypeSilicon (IV) Oxide
SymbolSiO2
Color/AppearanceWhite, Crystalline Solid
Melting Point (°C)1,610
Theoretical Density (g/cc)~2.65
Z Ratio**1.00
SputterRF
Max Power Density
(Watts/Square Inch)
30*
Type of BondIndium, Elastomer
CommentsQuartz excellent in E-beam.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.

Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Material Notes

NOTE:

  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

SDS
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Ordering Table

Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Cart
Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Cart
Silicon Dioxide (Fused Quartz) 1.00" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTSIO2451A2 $51.00 Call for Availability
Silicon Dioxide (Fused Quartz) 1.00" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTSIO2451A4 $67.00 In Stock
Silicon Dioxide (Fused Quartz) 10.00" Dia. x 0.250" Thick 99.995% Consult Sputter Gun Manual 1 Limited availability and specially priced. EJTSIO245104 P.O.R. In Stock
Silicon Dioxide (Fused Quartz) 2.00" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTSIO2452A2 $97.00 In Stock
Silicon Dioxide (Fused Quartz) 2.00" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTSIO2452A4 $128.00 In Stock
Silicon Dioxide (Fused Quartz) 3.00" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTSIO2453A2 $153.00 In Stock
Silicon Dioxide (Fused Quartz) 3.00" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTSIO2453A4 $179.00 In Stock
Silicon Dioxide (Fused Quartz) 4.00" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTSIO2454A2 $225.00 In Stock
Silicon Dioxide (Fused Quartz) 4.00" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTSIO2454A4 $250.00 In Stock
Silicon Dioxide (Fused Quartz) 5.00" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTSIO2455A4 $255.00 Call for Availability
Silicon Dioxide (Fused Quartz) 57mm Dia. x 0.0625" Thick 99.995% - - KJL81077 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 6.00" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTSIO2456A2 $281.00 Call for Availability
Silicon Dioxide (Fused Quartz) 6.00" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTSIO2456A4 $301.00 Call for Availability
Silicon Dioxide (Fused Quartz) 8.00" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTSIO2458A4 P.O.R. Call for Availability

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
Limited availability and specially priced.

Bonded Assemblies Ordering Table

Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns Notes PartNo Price In Stock Add To
Cart
Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns Notes PartNo Price In Stock Add To
Cart
Silicon Dioxide (Fused Quartz) 1.00" Dia x 0.125" Thick 99.995% Indium 1.00" Dia x 0.125" Thick Most Standard Guns 1 EJUSIO2451A4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 2.00" Dia x 0.125" Thick 99.995% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUSIO2452A4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 2.00" Dia x 0.125" Thick 99.995% Elastomer 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUSIO2452E4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 2.00" Dia x 0.125" Thick 99.995% Indium 2.00" Dia x 0.092" Thick Standard TORUS 2 - EJUSIO2452T4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 2.00" Dia x 0.125" Thick 99.995% Elastomer 2.00" Dia x 0.125" Thick TORUS Mag Keeper 2 2 EJUSIO2452TK4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 3.00" Dia x 0.125" Thick 99.995% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUSIO2453A4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 3.00" Dia x 0.125" Thick 99.995% Elastomer 3.00" Dia x 0.125" Thick U.S. Gun - EJUSIO2453K4 P.O.R. In Stock
Silicon Dioxide (Fused Quartz) 3.00" Dia x 0.125" Thick 99.995% Indium 3.00" Dia x 0.092" Thick Standard TORUS 3 - EJUSIO2453T4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 3.00" Dia x 0.125" Thick 99.995% Elastomer 3.00" Dia x 0.125" Thick TORUS Mag Keeper 3 2 EJUSIO2453TK4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 4.00" Dia x 0.125" Thick 99.995% Indium 4.00" Dia x 0.125" Thick Most Standard Guns 1 EJUSIO2454A4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 4.00" Dia x 0.125" Thick 99.995% Elastomer 4.00" Dia x 0.125" Thick TORUS Mag Keeper 4 2 EJUSIO2454TK4 P.O.R. Call for Availability
Silicon Dioxide (Fused Quartz) 4.00" Dia x 0.125" Thick 99.995% Indium 4.00" Dia x 0.092" Thick Standard TORUS 4 - EJUSIO2SPL01 P.O.R. Call for Availability

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.