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Tellurium (Te) Sputtering Targets

Tellurium (Te) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here.

Tellurium (Te) Specifications

Material TypeTellurium
SymbolTe
Atomic Weight127.6
Atomic Number52
Color/AppearanceSilvery Lustrous Gray, Semi-Metallic
Thermal Conductivity3 W/m.K
Melting Point (°C)449
Theoretical Density (g/cc)6.25
Z Ratio0.9
SputterRF
Type of BondIndium, Elastomer
UN Number 3284
CommentsWets without alloying.  Not recommended for sputtering.

Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Notes:
  • special case note
    Some materials and manufacturing methods may yield product with surface imperfections. In many cases, these imperfections are merely visual defects. Performance may be affected according to process requirements.
  • special case note
    Some materials and manufacturing methods may yield product with higher than average porosity. Performance may be affected according to process requirements.
  • special case note
    Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • special case note
    This material has a relatively high vapor pressure at low temperatures which can cause ppm level contamination in the chamber and subsequent films. Careful consideration should be taken before this material is used in any deposition system. For this reason, some users prefer to use only dedicated vacuum chambers for deposition.

Hazard Notes:
  • Hazardous Materials: Hazardous shipping charges may apply.
SDS
SDS
Click here for the Tellurium SDS.
Request A Quote
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
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Contact Us
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Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Tellurium TELLURIUM TARGET, Te. 99.999% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 1.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTTEXX501A2 P.O.R. Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010"ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 1.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTTEXX501A4 $472.00 Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 2.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTTEXX502A2 $504.00 Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 2.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTTEXX502A4 P.O.R. Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 3.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTTEXX503A2 $666.00 Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 3.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTTEXX503A4 P.O.R. Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 4.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTTEXX504A2 P.O.R. Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 4.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTTEXX504A4 P.O.R. Contact KJLC for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Bonded Assemblies Ordering Table

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Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Tellurium TELLURIUM TARGET, 99.999% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, , INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 1.00" Dia x 0.125" Thick 99.999% Indium 1.00" Dia x 0.125" Thick Most Standard Guns 1 EJUTEXX501A4 P.O.R. Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING 2.00" Dia x 0.125" Thick 99.999% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUTEXX502A4 $908.00 Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER, 2-56 SCREW 2.00" Dia x 0.125" Thick 99.999% Elastomer 2.00" Dia x 0.125" Thick U.S. Gun — EJUTEXX502K4 $935.00 Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 99.999% PURE, 3.00"DIAMETER X 0.125"THICK, +/-0.010" ALL, BEST EFFORTS ON APPEARANCE, HAZARDOUS SHIPPING, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR 3.00" Dia x 0.125" Thick 99.999% Elastomer 3.00" Dia x 0.125" Thick TORUS Mag Keeper 3 2 EJUTEXX503TK4 $1,253.00 Contact KJLC for Availability
Tellurium TELLURIUM TARGET, Te, 3.00" DIAMETER X 0.125" THICK, 99.999% PURE, +/-0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER, 6-32 SCREW, HAZARDOUS SHIPPING 3.00" Dia x 0.125" Thick 99.999% Elastomer 3.00" Dia x 0.125" Thick U.S. Gun — EJUTEXXSPL02 $1,253.00 Contact KJLC for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.

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Target & Backing Plate Service Form

Target & Backing Plate Service Form

KJLC offers bonding services for both KJLC and customer supplied targets and backing plates. Please fill out our Target & Backing Plate Service Form to acquire a return authorization number.

Target & Backing Plate Service Form
Contact Us - Tellurium Te Sputtering Targets