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Titanium (Ti) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here.

Titanium (Ti) General Information

Titanium is a common material found in a myriad of products including watches, drill bits, laptops, and bicycles, just to name a few. In pure form, it is lustrous and silvery-white in appearance. It has a melting point of 1,660°C, a density of 4.5 g/cc, and a vapor pressure of 10-4 Torr at 1,453°C. It is a sturdy material which is easily fabricated when heat is applied. Its strong, lightweight characteristics and excellent corrosion resistance make it ideal for ocean liner hulls, aircraft engines, and designer jewelry. Titanium is biocompatible so it can be found in surgical tools and implants. Titanium is generally evaporated in vacuum for the purposes of wear and decorative, semiconductor, and optical coatings.

Titanium (Ti) Specifications

Material TypeTitanium
SymbolTi
Atomic Weight47.867
Atomic Number22
Color/AppearanceSilvery Metallic
Thermal Conductivity21.9 W/m.K
Melting Point (°C)1,660
Coefficient of Thermal Expansion8.6 x 10-6/K
Theoretical Density (g/cc)4.5
Z Ratio0.628
SputterDC
Max Power Density
(Watts/Square Inch)
50*
Type of BondIndium, Elastomer
CommentsAlloys with W/Ta/Mo; evolves gas on first heating.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.

* Suggested maximum power densities are based on using a sputter up orientation with optimal thermal transfer from target to the sputter cathode cooling well. Using other sputtering orientations or if there is a poor thermal interface between target to sputter cathode cooling well may require a reduction in suggested maximum power density and/or application of a thermal transfer paste. Please contact techinfo@lesker.com for specific power recommendations.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

SDS
Click here for the Titanium SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
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Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Titanium TITANIUM TARGET, Ti GRADE 2, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.0" Dia. x 0.125" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX271A2 $75.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.0" Dia. x 0.125" Thick 99.97% Most Standard Guns 1 EJTTIXX371A2 $95.00 Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 1.00" DIAMETER X 0.125"THICK, +/- 0.010" ALL 1.0" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTTIXX451A2 $93.00 In Stock
Titanium TITANIUM TARGET, Ti, GRADE 2, 1.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 1.0" Dia. x 0.250" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX271A4 $60.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 1.00"DIAMETER X 0.250"THICK, +/- 0.010" ALL 1.0" Dia. x 0.250" Thick 99.97% Most Standard Guns 1 EJTTIXX371A4 $104.00 Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 1.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 1.0" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTTIXX451A4 $100.00 In Stock
Titanium TITANIUM TARGET, Ti, GRADE 2, 2.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 2.0" Dia. x 0.125" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX272A2 $85.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 2.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 2.0" Dia. x 0.125" Thick 99.97% Most Standard Guns 1 EJTTIXX372A2 $105.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 2.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 2.0" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTTIXX452A2 $113.00 In Stock
Titanium TITANIUM TARGET, Ti, GRADE 2, 2.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 2.0" Dia. x 0.250" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX272A4 $90.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 2.00" DIAMETER X 0.250"THICK, +/- 0.010" ALL 2.0" Dia. x 0.250" Thick 99.97% Most Standard Guns 1 EJTTIXX372A4 $133.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 2.0" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTTIXX452A4 $133.00 In Stock
Titanium TITANIUM TARGET, Ti, GRADE 2, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, D & T FOR 2-56 HOLE WITH KEEPER AND SCREW, 0.133" DEEP 2.00" Dia. x 0.250" Thick 99.2%-99.7% U.S. Gun EJTTIXX272K4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, D & T FOR 2-56 SCREW W/ KEEPER, 0.133" DEEP 2.00" Dia. x 0.250" Thick 99.97% U.S. Gun EJTTIXX372K4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 2.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL, D&T FOR 2-56 HOLE, 0.133" DEEP, WITH KEEPER 2.00" Dia. x 0.250" Thick 99.995% U.S. Gun EJTTIXX452K4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 2.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL, W/ KEEPER, FOR 2" TORUS MAG KEEPER 2.00" Dia. x 0.250" Thick 99.995% TORUS Mag Keeper 2 2 EJTTIXX452TK4 P.O.R. In Stock
Titanium TITANIUM TARGET, Ti, GRADE 2, 3.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 3.0" Dia. x 0.125" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX273A2 $89.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.0" Dia. x 0.125" Thick 99.97% Most Standard Guns 1 EJTTIXX373A2 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 3.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 3.0" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTTIXX453A2 $159.00 In Stock
Titanium TITANIUM TARGET, Ti, GRADE 2, 3.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 3.0" Dia. x 0.250" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX273A4 $95.00 Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.0" Dia. x 0.250" Thick 99.97% Most Standard Guns 1 EJTTIXX373A4 $168.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.0" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTTIXX453A4 $180.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ 6-32 CENTER HOLE, 0.133" DEEP, W/ KEEPER AND SCREW 3.00" Dia. x 0.250" Thick 99.995% U.S. Gun EJTTIXX453K4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ KEEPER, FOR 3" TORUS MAG KEEPER 3.00" Dia. x 0.250" Thick 99.995% TORUS Mag Keeper 3 2 EJTTIXX453TK4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, GRADE 2, 4.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 4.0" Dia. x 0.125" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX274A2 $131.00 Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 4.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 4.0" Dia. x 0.125" Thick 99.97% Most Standard Guns 1 EJTTIXX374A2 $158.00 Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.0" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTTIXX454A2 $274.00 In Stock
Titanium TITANIUM TARGET, Ti, GRADE 2, 4.00" DIAMETER X 0.250" THICK,+/-0.010" ALL 4.0" Dia. x 0.250" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX274A4 $220.00 Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 4.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 4.0" Dia. x 0.250" Thick 99.97% Most Standard Guns 1 EJTTIXX374A4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 4.0" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTTIXX454A4 $291.00 In Stock
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ KEEPER, FOR 4" TORUS MAG KEEPER 4.0" Dia. x 0.250" Thick 99.995% TORUS Mag Keeper 4 2 EJTTIXX454TK4 P.O.R. In Stock
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 4.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL, W/ KEEPER, FOR 4" TORUS MAG KEEPER 4.00" Dia. x 0.250" Thick 99.97% TORUS Mag Keeper 4 2 EJTTIXX374TK4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.99% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ KEEPER, FOR 4" TORUS MAG KEEPER 4.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 4 2 EJTTIXX404TK4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 5.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 5.0" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTTIXX455A4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 57MM DIAMETER X 0.125" THICK, +/- 0.25MM ALL 57mm Dia. X 0.125" Thick 99.97% EJTTIXXSPL76 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.99% PURE, 57MM DIAMETER X 0.1MM THICK, +/-0.25MM DIA, +/-0.02MM THK 57mm Dia. x 0.1mm Thick 99.99% KJL81050 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, FOR KJL 108, 57MM DIA X 0.2MM THK, +/-0.25MM DIA, +/-0.025MM THK 57mm Dia. x 0.2mm Thick 99.995% KJL81024 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, 99.995% PURE, 57MM DIAMETER X 0.3MM THICK, +/- 0.25MM DIA, +/-0.025MM THICKNESS 57mm Dia. x 0.3mm Thick 99.995% KJL81044 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 57MM DIAMETER X 0.3MM THICK, +/- 0.25MM ALL 57mm Dia. x 0.3mm Thick 99.97% KJL81072 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 57MM DIAMETER X 0.5MM THICK, +/- 0.25MM DIA, +/-0.05MM THICK 57mm Dia. x 0.5mm Thick 99.995% KJL81066 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.9% PURE 57MM DIAMETER X 2MM THICK, +/-0.25MM ALL 57mm Dia. x 2mm Thick 99.9% KJL81021 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 57MM DIAMETER X 3MM THICK, +/- 0.25MM ALL 57mm Dia. x 3mm Thick 99.97% EJTTIXXSPL21 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 6.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 6.0" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTTIXX456A2 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, GRADE 2, 6.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 6.0" Dia. x 0.250" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX276A4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 6.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL, FLAT W/IN 0.010" 6.0" Dia. x 0.250" Thick 99.97% Most Standard Guns 1 EJTTIXX376A4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 6.00" DIAMETER X 0.25" THICK, +/- 0.010" ALL 6.0" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTTIXX456A4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 8.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 8.0" Dia. x 0.125" Thick 99.995% Most Standard Guns 1 EJTTIXX458A2 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, CP GRADE 2, 8.00" DIAMETER X 0.25" THICK, +/- 0.010" ALL 8.0" Dia. x 0.250" Thick 99.2%-99.7% Most Standard Guns 1 EJTTIXX278A4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.97% PURE, 8.00" DIAMETER. X 0.25" THICK, +/- 0.010" ALL 8.0" Dia. x 0.250" Thick 99.97% Most Standard Guns 1 EJTTIXX378A4 P.O.R. Contact KJLC for Availability
Titanium TITANIUM TARGET, Ti, 99.995% PURE, 8.00" DIAMETER X 0.25" THICK, +/- 0.010" ALL 8.0" Dia. x 0.250" Thick 99.995% Most Standard Guns 1 EJTTIXX458A4 P.O.R. Contact KJLC for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.

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