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Tungsten (W) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Tungsten (W) General Information

Tungsten, also known as Wolfram, is one of the densest elements in the world. It has a density of 19.3 g/cc, a melting point of 3,410°C, and a vapor pressure of 10-4 Torr at 2,757°C. It is lustrous and grayish-white in appearance. It is known to have the highest melting point of all metals and its characteristic hardness can make it very difficult to machine and forge in pure form. Tungsten is commonly used to make electric filaments. Tungsten carbide is found in drills, saws, and jewelry. Tungsten is evaporated under vacuum for the production of semiconductors, fuel cells, and sensors.

Tungsten (W) Specifications

Material TypeTungsten
SymbolW
Atomic Weight183.84
Atomic Number74
Color/AppearanceGrayish White, Lustrous, Metallic
Thermal Conductivity174 W/m.K
Melting Point (°C)3,410
Coefficient of Thermal Expansion4.5 x 10-6/K
Theoretical Density (g/cc)19.25
Z Ratio0.163
SputterDC
Max Power Density
(Watts/Square Inch)
100*
Type of BondIndium, Elastomer
CommentsForms volatile oxides. Films hard and adherent.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

SDS
Click here for the Tungsten SDS.
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Deposition Materials FAQ
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Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Tungsten TUNGSTEN TARGET, W , 99.95% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTWXXX351A2 $84.00 In Stock
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTWXXX351A4 $123.00 Contact KJLC for Availability
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 2.00"DIAMETER X 0.125"THICK, +/-0.010" ALL 2.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTWXXX352A2 $209.00 Contact KJLC for Availability
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 2.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTWXXX352A4 $289.00 In Stock
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTWXXX353A2 $245.00 In Stock
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTWXXX353A4 $333.00 In Stock
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTWXXX354A2 P.O.R. Contact KJLC for Availability
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 4.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTWXXX354A4 $575.00 In Stock
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, FOR KJL 108, 57MM DIA X 0.2MM THK, +/-0.25MM DIA, +0.125MM/-0 THK 57mm Dia. x 0.2mm Thick 99.95% KJL81025 P.O.R. Contact KJLC for Availability
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 6.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTWXXX356A4 P.O.R. Contact KJLC for Availability
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 8.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 8.00" Dia. x 0.125" Thick 99.95% Most Standard Guns 1 EJTWXXX358A2 P.O.R. Contact KJLC for Availability
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 8.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 8.00" Dia. x 0.250" Thick 99.95% Most Standard Guns 1 EJTWXXX358A4 P.O.R. Contact KJLC for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Bonded Assemblies Ordering Table

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Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 2.00"DIAMETER X 0.125"THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia x 0.125" Thick 99.95% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUWXXX352A4 P.O.R. Contact KJLC for Availability
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR TORUS MAG KEEPER 2, PER DRAWING 2.00" Dia x 0.125" Thick 99.95% Elastomer 2.00" Dia x 0.125" Thick TORUS Mag Keeper 2 2 EJUWXXX352TK4 P.O.R. Contact KJLC for Availability
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.95% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUWXXX353A4 P.O.R. Contact KJLC for Availability
Tungsten TUNGSTEN TARGET, W, 99.95% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR 3" TORUS MAG KEEPER 3.00" Dia x 0.125" Thick 99.95% Elastomer 3.00" Dia x 0.125" Thick TORUS Mag Keeper 3 2 EJUWXXX353TK4 P.O.R. Contact KJLC for Availability

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Contact Us - Tungsten W Sputtering Targets