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Yttrium Titanate (YTiO3) Sputtering Targets

Yttrium Titanate (YTiO3) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

SDS
Click here for the Yttrium Titanate SDS.
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Deposition Materials FAQ
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To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.
Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Cart
Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Cart
Yttrium Titanate 1.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTYTIO31A2 P.O.R. Call for Availability
Yttrium Titanate 1.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTYTIO31A4 P.O.R. Call for Availability
Yttrium Titanate 2.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTYTIO32A2 P.O.R. Call for Availability
Yttrium Titanate 2.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTYTIO32A4 P.O.R. Call for Availability
Yttrium Titanate 3.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTYTIO33A2 P.O.R. Call for Availability
Yttrium Titanate 3.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTYTIO33A4 P.O.R. Call for Availability

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.