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Zirconium Nitride (ZrN) Sputtering Targets


Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Material TypeZirconium Nitride
Color/AppearanceYellow, Crystalline solid
Melting Point (°C)2,980
Theoretical Density (g/cc)7.09
Z Ratio**1.00
SputterRF, RF-R
Type of BondIndium, Elastomer
Export Control (ECCN) 1C234
CommentsReactively evaporate in 10-3 Torr N2.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.


Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Material Notes


  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

Export Controlled


  • This is an Export Controlled Material. Restrictions may apply.

Click here for the Zirconium Nitride SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Material Size Purity Compatible Guns Part # Price Add To
Zirconium Nitride 1.00" Dia. x 0.125" Thick 99.5% All Standard Guns EJTZRNX251A2 P.O.R.
Zirconium Nitride 1.00" Dia. x 0.250" Thick 99.5% All Standard Guns EJTZRNX251A4 P.O.R.
Zirconium Nitride 2.00" Dia. x 0.125" Thick 99.5% All Standard Guns EJTZRNX252A2 P.O.R.
Zirconium Nitride 2.00" Dia. x 0.250" Thick 99.5% All Standard Guns EJTZRNX252A4 P.O.R.
Zirconium Nitride 3.00" Dia. x 0.125" Thick 99.5% All Standard Guns EJTZRNX253A2 P.O.R.
Zirconium Nitride 3.00" Dia. x 0.250" Thick 99.5% All Standard Guns EJTZRNX253A4 P.O.R.