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Zirconium Oxide (ZrO2, Fully stabilized 8mol% Y2O3) Sputtering Targets

Zirconium Oxide (ZrO2, Fully stabilized 8mol% Y2O3) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Zirconium Oxide (ZrO2, Fully stabilized 8mol% Y2O3) General Information

Zirconium oxide is a chemical compound with a chemical formula of ZrO2. It is often referred to as zirconia. It is white in appearance with a melting point of ~2,700°C, a density of 5.89 g/cc, and a vapor pressure of 10-4 Torr at ~2,200°C. Due to its resistance to cracks, zirconium oxide is heavily utilized for ceramic production. Cubic zirconia, which is zirconium oxide in cubic crystalline form, is sold by jewelers as a low-cost alternative to diamonds. Zirconium oxide is evaporated under vacuum for optical coatings, semiconductors, and fuel cells.

Zirconium Oxide (ZrO2, Fully stabilized 8mol% Y2O3) Specifications

Material TypeZirconium Oxide
SymbolZrO2
Color/AppearanceWhite, Solid
Melting Point (°C)~2,700
Theoretical Density (g/cc)5.89
Z Ratio**1.00
SputterRF, RF-R
Max Power Density
(Watts/Square Inch)
20*
Type of BondIndium, Elastomer
Export Control (ECCN) 1C234
CommentsFilms oxygen deficient, clear and hard.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.

Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Notes:
  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.
  • Partially Stabilized ZrO2 available upon request.

Hazard Notes:
  • Export Controlled: This is an Export Controlled Material. Restrictions may apply.
SDS
Click here for the Zirconium Oxide SDS.
Product Datasheet
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Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
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Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED 1.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTZROX301A2 $556.00 Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, FULLY STABILIZED 1.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTZROX301A4 $623.00 Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED 2.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTZROX302A2 $750.00 In Stock
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, FULLY STABILIZED 2.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTZROX302A4 $862.00 Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED 3.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTZROX303A2 $893.00 In Stock
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, FULLY STABILIZED 3.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTZROX303A4 $1,051.00 Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED 4.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTZROX304A2 $1,235.00 Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, FULLY STABILIZED 4.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTZROX304A4 $1,546.00 Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 5.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED 5.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTZROX305A2 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 6.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED 6.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTZROX306A2 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3, 92/8 MOL%, 99.9% PURE (EX Hf), 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, FULLY STABILIZED 6.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTZROX306A4 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE (Ex Hf), 8.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED 8.0" Dia. x 0.125" Thick 99.9% Most Standard Guns 1 EJTZROX308A2 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3, (92/8 MOL%), 99.9% PURE (Ex Hf), 8.00" DIAMETER X 0.250" THICK,+/-0.010" ALL, FULLY STABILIZED 8.0" Dia. x 0.250" Thick 99.9% Most Standard Guns 1 EJTZROX308A4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Bonded Assemblies Ordering Table

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Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia x 0.125" Thick 99.9% Indium 1.00" Dia x 0.125" Thick Most Standard Guns 1 EJUZROX301A4 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia x 0.125" Thick 99.9% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUZROX302A4 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE TARGET, ZrO2, 99.9% EX Hf, 2.00" DIA X .125", 8% MOL% Y2O3, FULLY STABILIZED, +/-.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, Cu 101, 2.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 2 2.00" Dia x 0.125" Thick 99.9% Indium 2.00" Dia x 0.092" Thick Standard TORUS 2 EJUZROX302T4 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER, FOR 2.00" Dia x 0.125" Thick 99.9% Elastomer 2.00" Dia x 0.125" Thick TORUS Mag Keeper 2 2 EJUZROX302TK4 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.9% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUZROX303A4 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER, 6-3 3.00" Dia x 0.125" Thick 99.9% Elastomer 3.00" Dia x 0.125" Thick U.S. Gun EJUZROX303K4 P.O.R. Call for Availability
Zirconium Oxide EUDF ZIRCONIUM OXIDE/YTTRIA TARGET, ZrO2/Y2O3 92/8 MOL%, 99.9% PURE EX Hf, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, FULLY STABILIZED, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND 3.00" Dia x 0.125" Thick 99.9% Elastomer 3.00" Dia x 0.125" Thick TORUS Mag Keeper 3 2 EJUZROX303TK4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Contact Us - Zirconium Oxide ZrO2, Fully stabilized 8mol% Y2O3 Sputtering Targets