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OFHC Copper Backing Plates

Features

Machined from oxygen-free, high-conductivity copper.

  • For regular, circular disc-type sputtering sources
  • TORUS® 2, 3, and 4 accepts a 0.092" thick backing plate, found in the ordering table below
  • Most sputter sources accept a 0.125" (1/8") thick target bonded to a 0.125" thick backing plate
  • For targets of other thicknesses, choose the backing plate thickness to adjust the total thickness to 0.250" (1/4") to suit most applications

NOTE:

  • Those identified in the chart by diameter and thickness only are plain discs without through or tapped holes.
  • They are suitable for most circular target sources from other manufacturers, although they may need minor machining for screw, clamps, etc.
  • Copper Cup Backing Plates available upon request.

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Ordering Table

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Target Size Description Part Number Price In Stock Add To Cart Cart
Target Size Description Part Number Price In Stock Add To Cart Cart
1.3" x 0.125"
(With Magnetic Keeper)
COPPER BACKING PLATE, OFHC 101, Cu, 1.30" DIAMETER X 0.125" THICK, W/KEEPER, +/-0.010" ALL, 2-56 SCREW EJBPCU01.3K+ $77.00 In Stock
1.0" x 0.0625"
COPPER BACKING PLATE, OFHC 101, Cu, 1.00" DIAMETER X 0.0625" THICK, +/-0.010" ALL EJBPCU01A1 $77.00 Call for Availability
1.0" x 0.125"
COPPER BACKING PLATE, OFHC 101, Cu, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL EJBPCU01A2 $41.00 In Stock
2.0" x 0.0625"
COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.0625" THICK, +/-0.010" ALL EJBPCU02A1 $72.00 In Stock
2.0" x 0.125"
COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL EJBPCU02A2 $51.00 In Stock
2.0" x 0.125"
(With Magnetic Keeper)
COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER, 2-56 SCREW EJBPCU02K2 $77.00 In Stock
2.00" x 0.092" (For Torus 2)
COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 2 EJBPCU02T2 P.O.R. In Stock
3.0" x 0.0625"
COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.0625" THICK, +/-0.010" ALL EJBPCU03A1 $82.00 In Stock
3.0" x 0.125"
COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL EJBPCU03A2 $62.00 In Stock
3.0" x 0.125"
(With Magnetic Keeper)
COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER, 6-32 SCREW EJBPCU03K2 $97.00 In Stock
3.00" x 0.092" (For Torus 3)
COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 3 EJBPCU03T2 P.O.R. In Stock
4.0" x 0.0625"
COPPER BACKING PLATE, OFHC 101, Cu, 4.00" DIAMETER X 0.0625" THICK, +/-0.010" ALL EJBPCU04A1 $87.00 Call for Availability
4.0" x 0.125"
COPPER BACKING PLATE, OFHC 101, Cu, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL EJBPCU04A2 $72.00 In Stock
4.00" x 0.092" (For Torus 4)
COPPER BACKING PLATE, OFHC 101, Cu, 4.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 4 EJBPCU04T2 P.O.R. In Stock
5.0" x 0.0625"
COPPER BACKING PLATE, OFHC, Cu, 5.00" DIAMETER X 0.0625" THICK, +/-0.005" ALL EJBPCU05A1 P.O.R. Call for Availability
5.0" x 0.125"
COPPER BACKING PLATE, OFHC 101, Cu, 5.00" DIAMETER X 0.125" THICK, +/-0.010" ALL EJBPCU05A2 $113.00 Call for Availability
6.0" x 0.0625"
COPPER BACKING PLATE, OFHC 101, Cu, 6.00" DIAMETER X 0.0625" THICK, +/- 0.010" ALL EJBPCU06A1 P.O.R. Call for Availability
6.0" x 0.125"
COPPER BACKING PLATE, OFHC 101, Cu, 6.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL EJBPCU06A2 $133.00 In Stock
6.0" x 0.250"
COPPER BACKING PLATE, OFHC 101, Cu, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL EJBPCU06A4 $199.00 Call for Availability
6.0" x 0.125"
(With Magnetic Keeper)
COPPER BACKING PLATE, OFHC 101, 6.00" DIAMETER X 0.100" THICK, W/KEEPER, 8-32 SCREW EJBPCU06K2 P.O.R. Call for Availability
7.0" x 0.125"
COPPER BACKING PLATE, OFHC 101, Cu, 7.00" DIAMETER X 0.125" THICK, +/-0.010" ALL EJBPCU07A2 $143.00 In Stock
7.0" x 0.250"
COPPER BACKING PLATE, OFHC 101, Cu, 7.00" DIAMETER X 0.250" THICK, +/-0.010" ALL EJBPCU07A4 P.O.R. Call for Availability
8.0" x 0.125"
COPPER BACKING PLATE, OFHC 101, Cu, 8.00" DIAMETER X 0.125" THICK, +/-0.010" ALL EJBPCU08A2 $165.00 Call for Availability
8.0" x 0.250"
COPPER BACKING PLATE, OFHC 101, Cu, 8.00" DIAMETER X 0.250" THICK, +/-0.010" ALL EJBPCU08A4 P.O.R. Call for Availability
TORUS 10 Full
(6.375" x 0.50")
COPPER BACKING PLATE, OFHC 101, Cu, TORUS 10 FOR 1/16" THICK BONDED TARGETS EJBPT10FULL P.O.R. In Stock
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