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Isoflux Inverted Magnetron Sputtering Sources


Isoflux
Isoflux inverted magnetrons – also known as hollow cathode magnetrons – use cylindrical targets to surround the substrate with coating material.

KJLC is proud to offer Isoflux hollow cathode magnetron technology – a proven and proprietary line of standard and customized cylindrical magnetrons. Ideally suited to coat complex, 3 dimensional shapes, wires, fibers, and many other substrates, the inverted magnetron design is considerably more efficient than planar magnetrons. Hollow Cathode magnetrons offer extremely high deposition rates along with excellent target utilization.

The cylindrical design allows entire 3-dimensional items to be coated in one run without the need for rotation. The result is an efficient, simplified coating process. Unlike planar magnetrons, the magnetic field in the cylindrical magnetron produces symmetrical plasma about the cathode axis which leads to very uniform target erosion. Inverted magnetrons use approximately 75% of the target material because most of the deposition material that does not condense on the substrate is re-deposited onto the target, and is subsequently re-sputtered.

Due to the higher efficiency of inverted magnetrons, more target material is deposited on the substrate rather than the vacuum envelope. The target change procedure is straightforward and uncomplicated (they simply slide in and snap into place) as well. When power is applied to the cathode, thermal expansion results in a perfect, firm radial fit of the target to the mounting surface. Thus, system cleaning/maintenance cycles and down time are both reduced while keeping target material costs to a minimum.

Improved Overall System Efficiency

Target utilization is a common metric used in sputtering, but only tells half of the story. System efficiency measures how much of the sputtered material actually lands on the substrate. The combination is what we refer to as Overall System Efficiency (OSE), which measures how much of the original target material is deposited onto the substrate.

(Target Utilization) x (Efficiency) = Overall System Efficiency (OSE)

Cylindrical magnetron designs improve both utilization and efficiency, resulting in up to FOUR TIMES the Overall System Efficiency compared to conventional planar magnetrons.

Source TypeTarget UtilizationEfficiencyOverall System Efficiency (OSE)
Conventional Planar Magnetron40%30%12%
Isoflux Cylindrical Magnetron75%60%45%*

*Target utilization and efficiency for the Isoflux cylindrical cathodes are based on a silver deposition application, coating a 4" wide tape in a 25cm long x 25cm diameter cathode. Efficiency is dependent upon geometry and part loading for all magnetrons; however, cylindrical cathodes will always tend to perform better with complex geometries or three dimensional surfaces.

Inverted magnetron technology is used by many Fortune 500 corporations, major universities, and government entities.

Features

  • Cylindrical targets surround the substrate with coating material
  • High deposition rates
  • Excellent target utilization – up to 75%
  • Exceptional uniformity
  • Patented cathode designs
  • Versatile DC, Pulsed DC, or AC operation
  • Greater efficiency than planar magnetrons
  • Customer-specific designs available
  • Reduced downtime and relatively inexpensive targets
  • Simple target change and cathode maintenance
  • Cathode retrofit and rebuild services available

Applications

  • Conformal 3D Coatings
  • Solar Tubes
  • Wire & Fiber Optic Coating
  • Superconducting Ribbons
  • Thin Film Batteries
  • Fuel Cells
  • EMI Shielding
  • Thermal Barrier & Insulation Layers
  • Diamond-Like Carbon
  • Optical Coatings
  • Stents
  • Biocompatible Coatings
  • Medical Implants
  • Catheters
  • Antimicrobial/Antibacterial Coatings
  • Off-Axis Sputtering

Dimensional Drawings

Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.

Standard Models

Model Number Old Model Number Mounting Configuration End Flanges Service Connections Diameter
(A)
Length
(B)
Substrate
Opening (C)
Target Configuration Master Ring Part Number/Config Power AC/DC/Both Max Power Cathode ID Target Diameter Tolerance Target Length Target Length Tolerance Total Target Length
Model Number Old Model Number Mounting Configuration End Flanges Service Connections Diameter
(A)
Length
(B)
Substrate
Opening (C)
Target Configuration Master Ring Part Number/Config Power AC/DC/Both Max Power Cathode ID Target Diameter Tolerance Target Length Target Length Tolerance Total Target Length
CIS-02065 Model 516 Internal Mount 2.75"CF, Tapped 2x 1/4" OD Tubing, 1/4"-20 tapped hole on post 5.5" 8.1" 0.75" Single Target N/A DC 1 kW 2 -.005/-.002 6.5 -.010/+.000 6.5
CES-02065 Model 516F External Mount 2x NW100 Claw Clamp 2x 1/4" OD Tubing, +J4:K51/4" -20 tapped hole on post 5.5" 9.8" 0.75" Single Target N/A DC 1 kW 2 -.005/-.002 6.5 -.010/+.000 6.5
CID-02060 Model 516IMD Internal Mount 2.75"CF, Tapped 2x 1/4" OD tubing, 2x #8-32 tapped holes in cores 5.5" 8.1" 0.75" Dual Targets 1.995-1.998" OD, 3.090-3.095" length Both 1 kW 2 -.005/-.002 3 +.090/+.095 6
CED-02080 Model 520AC External Mount 2x NW100 Claw Clamp 2x 1/4" OD Tubing, 2x #10-32 posts 5.5" 11.9" 0.75" Dual Targets N/A Both 1 kW 2 -.005/-.002 4 -.015/-.010 8
CES-02085 Model 522 External Mount 2x 4.5"CF, Tapped 2x 1/4" OD tubing, power TBD 6.5" 18.4" 0.75" Single Target N/A DC 2 kW 2.0" -.005/-.002 8.5 -.010/+.000 8.5
CES-04065 Model 1016F External Mount 2x NW160 Claw Clamp 2x 3/8" OD tubing, #10 clearance hole 8.0" 10.1" 2.75" Single Target 3.999-3.997" OD, 6.495-6.500" length DC 2 kW 4 -.003/-.001 6.5 -.005/+.000 6.5
CES-06080 Model 1520 External Mount 2x NW200 Band Clamp 2x 3/8" OD tubing, 1/4"-20 tapped hole on post 10.6" 11.2" 4.0" Single Target N/A DC 4 kW 6 -.001/+.003 8 +.090/+.011 8
CED-07080 Model 1925 External Mount 2x NW250 Claw Clamp 2x 1/4" Female NPT, 1/4"-20 threaded post 13.3" 12.5" 5.75" Dual Targets 7.490-7.495" OD, 4.120-4.130" length Both 5 kW 7 -.010/-.005 4 -.055/-.050 8
CIS-07580 Model 1921 Internal Mount 2.75"CF, Tapped 2x 1/4" OD Tubing, #10-32 tapped hole on post 12.75" 8.9" 5.75" Single Target 7.485-7.490" OD, 8.105-8.115" length DC 4 kW 7.5 -.012/-.002 8 +.105/+.115 8
CID-07580 Model 1921 Dual Internal Mount 2x 2.75"CF, Tapped 2x 1/4" OD Tubing, 2x #10-32 posts 12.75" 8.9" 5.75" Dual Targets 7.485-7.490" OD, 3.900-3.910" length Both 4 kW 7.5 -.012/-.002 4 -.100/-.090 8
CED-100100 Model 2525 External Mount 2x NW320 Claw Clamp 2x 3/8" OD tubing, 1/4"-20 tapped hole on post 15.0" 16.2" 7.0" Dual Targets N/A DC 5 kW 10.0" -.005/-.010 5.0" -.150/-.145 10
CES-13580 ICM-10M (2011, BSC) External Mount 2x flat plates, 16.5" ID, 17.0" OD o-ring on both ends, M12 x 1.75 on 18.900 BC 2x 1/4" Female NPT, 1/4"-20 threaded post 20.1" 11.8" 11.75" Single/Dual 13.485-13.490" OD, 3.875-3.880" length Both 8 kW 13.5 See Master Ring 8 See Master Ring 8

Contact sales@lesker.com to discuss your specific vacuum application and process equipment needs.