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TORUS® Linear Sputtering Magnetrons

Applications:

  • Architectural Glass
  • Photovoltaics
  • Superconductors
  • Tool Coating
  • Wear Coating
  • Flat Panel Displays
  • Lighting
  • OLED/PLED's
  • Medical
  • Web Coating
  • Aerospace
  • Wear Coatings
  • Decorative
  • Photovoltaics
  • Nanotechnology
  • Optical

Request A Quote
To request a quotation on one of our TORUS® Linear Sputtering Magnetrons, please click here.
Product Downloads
For a downloadable datasheet on this product, please click here.
Magnetron Sputtering
Cathode Services
To learn more about how we service you and your TORUS® sputter sources, click here.
Magnetron Performance
Optimization Guide
To learn more about sputtering rates and uniformity, click here.
Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.

Specifications

Model 2" Wide 3.5" Wide 5" Wide 6" Wide
Target Size 2.35" wide x 0.25" Standard Thickness

Total target thickness 0.25" (1)
3.5" wide x 0.375" Standard Thickness

0.50" Maximum Recommended Total target thickness (1)
5.0" wide x 0.50" Standard Thickness

0.750" Maximum Recommended Total target thickness (1)
6.0" wide x 0.625" Standard Thickness

0.750" Maximum Recommended Total target thickness (1)
Assembly Size 3.930" wide x Target Length + (1.93") (w\0.250" Ground Shields) 5.30" wide x Target Length + (1.80") (w\0.375" Ground Shields) 6.80" wide x Target Length + (1.80") (w\0.375" Ground Shields) 7.80" wide x Target Length + (1.80") (w\0.375" Ground Shields)
Membrane (Optional) 3.930" Wide x 0.020" Standard Thickness 4.30" Wide x 0.020" Standard Thickness 5.80" Wide x 0.020" Standard Thickness 6.80" Wide x 0.020" Standard Thickness
Backing Plate (Optional) 3.230" Wide x 0.125" Thick 4.30" Wide x 0.125" Thick 5.8" Wide x 0.250" Thick 6.8" Wide x 0.250" Thick
Utilization ~20% (2) 40% to 48% (2) 40% to 43% (2)(3) 40% to 47% (2)(3)
Operating Pressure 0.5 - 50 mT (3) 0.5 - 50 mT (3) 0.5 - 50 mT (3)(4) 0.5 - 50 mT (3)(4)
Power RF, AC, DC, Pulsed DC RF, AC, DC, Pulsed DC RF, AC, DC, Pulsed DC RF, AC, DC, Pulsed DC
Maximum Power 150 watts per square inch (5) 200 watts per square inch (5) 250 watts per square inch (5) 250 watts per square inch (5)
Water Requirements 1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6)

1 megohm of resistance between the cathode and earth ground
1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6)

1 megohm of resistance between the cathode and earth ground
20°C inlet temperature, 1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6)

1 megohm of resistance between the cathode and earth ground
20°C inlet temperature, 1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6)

1 megohm of resistance between the cathode and earth ground

  1. Total Thickness includes Target + Backing Plate if Applicable
  2. Utilization based on target weight change using aluminum and copper targets @ 3 mT Argon, 50 watts per square inch, and approximately 75% to 100% of target thickness utilized
  3. Lower target utilization occurs as pressures increase
  4. Pressures above 100 mT possible with custom designs
  5. Higher powers are possible, contact engineering for support
  6. Higher pressures are possible, the target material properties and thickness determine the ultimate maximum water pressure
Some specifications vary depending on the process, target materials, etc.

Accessories Table

  Accessory Type Description PartNo Price Add
Item
  Accessory Type Description PartNo Price Add
Item
Interconnect Cable
Type HN Plug to Type N Plug, RG213, 3 ft Long
EJCBL3HN P.O.R.
Interconnect Cable
Type N Plug to Type N Plug, RG213, 3 ft Long
EJCBL3NN P.O.R.
Interconnect Cable
Type N Plug to Pigtail (1/4” Ring Lug Center Connector and Flying Ground Wire), RG213, 3 ft  Long
EJCBL3NP P.O.R.
Interconnect Cable
Type  N Plug to UHF Plug, RG213, 3 ft Long
EJCBL3NU P.O.R.
Power Supply
TRUPLASMA DC 3005 G1 5kW DC Power Supply 400V 3PH
1534405 P.O.R.
Power Supply
TRUPLASMA DC 3010 G1 10kW DC Power Supply 400V 3PH
1534597 P.O.R.
Power Supply
TRUPLASMA DC 3005 G1 5kW DC Power Supply 208V 3PH
1558202 P.O.R.
Power Supply
TRUPLASMA DC 3005 G1 10kW DC Power Supply 208V 3PH
1601465 P.O.R.

 Notes:  Other cable lengths available by replacing the '3' with the desired length in feet.