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TORUS® Linear Sputtering Magnetrons TORUS® Linear Sputtering Magnetrons 1 TORUS® Linear Sputtering Magnetrons 2 TORUS® Linear Sputtering Magnetrons 3 TORUS® Linear Sputtering Magnetrons 4 TORUS® Linear Sputtering Magnetrons 5 TORUS® Linear Sputtering Magnetrons 6 TORUS® Linear Sputtering Magnetrons 7 TORUS® Linear Sputtering Magnetrons 8 TORUS® Linear Sputtering Magnetrons 9 TORUS® Linear Sputtering Magnetrons 10 TORUS® Linear Sputtering Magnetrons 11 TORUS® Linear Sputtering Magnetrons 12

TORUS® Linear Sputtering Magnetrons

Applications:

  • Architectural Glass
  • Photovoltaics
  • Superconductors
  • Tool Coating
  • Wear Coating
  • Flat Panel Displays
  • Lighting
  • OLED/PLED's
  • Medical
  • Web Coating
  • Aerospace
  • Wear Coatings
  • Decorative
  • Photovoltaics
  • Nanotechnology
  • Optical

Request A Quote
To request a quotation on one of our TORUS® Linear Sputtering Magnetrons, please click here.
Product Downloads
For a downloadable datasheet on this product, please click here.
Magnetron Sputtering
Cathode Services
To learn more about how we service you and your TORUS® sputter sources, click here.
Magnetron Performance
Optimization Guide
To learn more about sputtering rates and uniformity, click here.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.

Specifications

Model 2" Wide 3.5" Wide 5" Wide 6" Wide
Target Size 2.35" wide x 0.25" Standard Thickness

Total target thickness 0.25" (1)
3.5" wide x 0.375" Standard Thickness

0.50" Maximum Recommended Total target thickness (1)
5.0" wide x 0.50" Standard Thickness

0.750" Maximum Recommended Total target thickness (1)
6.0" wide x 0.625" Standard Thickness

0.750" Maximum Recommended Total target thickness (1)
Assembly Size 3.930" wide x Target Length + (1.93") (w\0.250" Ground Shields) 5.30" wide x Target Length + (1.80") (w\0.375" Ground Shields) 6.80" wide x Target Length + (1.80") (w\0.375" Ground Shields) 7.80" wide x Target Length + (1.80") (w\0.375" Ground Shields)
Membrane (Optional) 3.930" Wide x 0.020" Standard Thickness 4.30" Wide x 0.020" Standard Thickness 5.80" Wide x 0.020" Standard Thickness 6.80" Wide x 0.020" Standard Thickness
Backing Plate (Optional) 3.230" Wide x 0.125" Thick 4.30" Wide x 0.125" Thick 5.8" Wide x 0.250" Thick 6.8" Wide x 0.250" Thick
Utilization ~20% (2) 40% to 48% (2) 40% to 43% (2)(3) 40% to 47% (2)(3)
Operating Pressure 0.5 - 50 mT (3) 0.5 - 50 mT (3) 0.5 - 50 mT (3)(4) 0.5 - 50 mT (3)(4)
Power RF, AC, DC, Pulsed DC RF, AC, DC, Pulsed DC RF, AC, DC, Pulsed DC RF, AC, DC, Pulsed DC
Maximum Power 150 watts per square inch (5) 200 watts per square inch (5) 250 watts per square inch (5) 250 watts per square inch (5)
Water Requirements 1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6)

1 megohm of resistance between the cathode and earth ground
1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6)

1 megohm of resistance between the cathode and earth ground
20°C inlet temperature, 1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6)

1 megohm of resistance between the cathode and earth ground
20°C inlet temperature, 1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6)

1 megohm of resistance between the cathode and earth ground
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  1. Total Thickness includes Target + Backing Plate if Applicable
  2. Utilization based on target weight change using aluminum and copper targets @ 3 mT Argon, 50 watts per square inch, and approximately 75% to 100% of target thickness utilized
  3. Lower target utilization occurs as pressures increase
  4. Pressures above 100 mT possible with custom designs
  5. Higher powers are possible, contact engineering for support
  6. Higher pressures are possible, the target material properties and thickness determine the ultimate maximum water pressure
Some specifications vary depending on the process, target materials, etc.

Note:

Accessories Table

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Accessory Type Description Reference Notes Part Number Price In Stock Add Item
Accessory Type Description Reference Notes Part Number Price In Stock Add Item
Interconnect Cable
CABLE,COAXIAL,RG213,3 FT OAL,MALE"HN" TO MALE "N"
Type HN Plug to Type N Plug, RG213, 3 ft Long
1 EJCBL3HN P.O.R. Contact KJLC for Availability
Interconnect Cable
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "N"
Type N Plug to Type N Plug, RG213, 3 ft Long
1 EJCBL3NN P.O.R. Contact KJLC for Availability
Interconnect Cable
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO PIGTAIL
Type N Plug to Pigtail (1/4” Ring Lug Center Connector and Flying Ground Wire), RG213, 3 ft  Long
1 EJCBL3NP P.O.R. Contact KJLC for Availability
Interconnect Cable
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "UHF"
Type  N Plug to UHF Plug, RG213, 3 ft Long
1 EJCBL3NU P.O.R. Contact KJLC for Availability
Power Supply
TRUPLASMA DC 3005 G1 5kW DC POWER SUPPLY 400V 3PH
TRUPLASMA DC 3005 G1 5kW DC Power Supply 400V 3PH
- 1534405 P.O.R. Contact KJLC for Availability
Power Supply
TRUPLASMA DC 3010 G1 10kW DC POWER SUPPLY 400V 3PH
TRUPLASMA DC 3010 G1 10kW DC Power Supply 400V 3PH
- 1534597 P.O.R. Contact KJLC for Availability
Power Supply
TRUPLASMA DC 3005 G1 5kW DC POWER SUPPLY 208V 3PH
TRUPLASMA DC 3005 G1 5kW DC Power Supply 208V 3PH
- 1558202 P.O.R. Contact KJLC for Availability
Power Supply
TRUPLASMA DC 3005 G1 10kW DC POWER SUPPLY 208V 3PH
TRUPLASMA DC 3005 G1 10kW DC Power Supply 208V 3PH
- 1601465 P.O.R. Contact KJLC for Availability
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 Notes: 
1.
Other cable lengths available by replacing the '3' with the desired length in feet.
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