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TORUS® Circular HV (High Vacuum) Magnetron Sputtering Sources

Click to view Photo-TR-TM03FS14XXF_OPEN.jpg
Photo-TR-TM03FS14XXF_OPEN.jpg

KJLC offers a comprehensive line of circular TORUS® magnetron sputter sources suited for most R & D applications. Traditional indirect-cooled, clamped style target design with integral anode shield assembly. Optimal for low to mid power, R&D and small scale production applications. These sputter cathodes range in size from one to four inches in diameter, are functional with virtually any material, have exceptional target utilization, and can be driven by RF, DC, or Pulsed-DC power supplies.

Engineered for Optimum Performance:

  • Wide pressure range operation to 10-9 Torr
  • Low outgassing
  • Excellent thin film uniformity and deposition rates
  • Efficient sputter target utilization
  • Superior target hold down mechanism eliminates the need for thermal pastes, keepers, etc.
  • Compact, modular magnet array
  • Magnets NOT exposed to vacuum
  • Magnets NOT exposed to cooling water
  • Cooling water is not exposed to vacuum chamber during target change
  • Unbalanced operation and compatibility with magnetic materials is available (please contact us at sales@lesker.com for more information)
  • Full line of accessories available (gas injection, chimneys, shutters, cluster arrays, etc.)
  • Custom sputter source configurations available

Dimensional Drawings

TM03AS10
TM03AS10

Drawing: TM03AS10

TM03AS10
TM03RS10
TM03FS10

TORUS® Dimensions & Available Options

All TORUS® R&D circular sputter sources feature Type-N (male) power connectors, indirect water cooling, and balanced magnetic operation as standard. Unbalanced operation is available, please contact us for more information.

Magnetron Performance Optimization Guide
To learn more about sputtering rates and uniformity, click here.
Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.

Specifications Table

Model Figure Head
Mount
Style		 Target
Diam.		 Target
Thickness		 Dim. A Dim. B Dim. C Dim. D Dim. E Deposition
Chimney		 Gas
Injection
Ring		 Magnetic
Materials
TM1 Fig 1 Axial 1.0"
(25.4mm)		 0.063" - 0.125"
(1.6mm - 3.2mm)		 4.05"
(103mm)		 4.28"
(109mm)		 N/A 9.56"
(243mm)		 18.48"
(469mm)		 No No No
TM1 Fig 2 Right
Angle		 1.0"
(25.4mm)		 0.063" - 0.125"
(1.6mm - 3.2mm)		 4.05"
(103mm)		 4.28"
(109mm)		 N/A 9.56"
(243mm)		 20.76"
(527mm)		 No No No
TM1 Fig 3 Flex 1.0"
(25.4mm)		 0.063" - 0.125"
(1.6mm - 3.2mm)		 5.55"
(141mm)		 5.78"
(147mm)		 N/A 9.56"
(243mm)		 N/A No No No
TM2 Fig 1 Axial 2.0"
(50.8mm)		 0.080" - 0.25"
(2mm - 6.3mm)		 4.08"
(104mm)		 4.38"
(111mm)		 0.11"
(2.8mm)		 9.56"
(243mm)		 18.58"
(472mm)		 Yes Yes Yes
TM2 Fig 2 Right
Angle		 2.0"
(50.8mm)		 0.080" - 0.25"
(2mm - 6.3mm)		 4.08"
(104mm)		 4.38"
(111mm)		 0.11"
(2.8mm)		 9.56"
(243mm)		 20.88"
(530mm)		 Yes Yes Yes
TM2 Fig 3 Flex 2.0"
(50.8mm)		 0.080" - 0.25"
(2mm - 6.3mm)		 5.58"
(142mm)		 5.88"
(149mm)		 0.11"
(2.8mm)		 9.56"
(243mm)		 N/A Yes Yes Yes
TM3 Fig 1 Axial 3.0"
(76mm)		 0.080" - 0.25"
(2mm - 6.3mm)		 3.41"
(87mm)		 3.79"
(96mm)		 0.11"
(2.8mm)		 9.56"
(243mm)		 18.11"
(460mm)		 Yes Yes Yes
TM3 Fig 2 Right
Angle		 3.0"
(76mm)		 0.080" - 0.25"
(2mm - 6.3mm)		 3.41"
(87mm)		 3.79"
(96mm)		 0.11"
(2.8mm)		 9.56"
(243mm)		 20.41"
(518mm)		 Yes Yes Yes
TM3 Fig 3 Flex 3.0"
(76mm)		 0.080" - 0.25"
(2mm - 6.3mm)		 4.91"
(125mm)		 5.40"
(137mm)		 0.11"
(2.8mm)		 9.56"
(243mm)		 N/A Yes Yes Yes
TM4 Fig 1 Axial 4.0"
(102mm)		 0.080" - 0.25"
(2mm - 6.3mm)		 3.66"
(93mm)		 4.05"
(103mm)		 0.11"
(2.8mm)		 9.56"
(243mm)		 18.37"
(466mm)		 Yes Yes Yes
TM4 Fig 2 Right
Angle		 4.0"
(102mm)		 0.080" - 0.25"
(2mm - 6.3mm)		 3.66"
(93mm)		 4.05"
(103mm)		 0.11"
(2.8mm)		 9.56"
(243mm)		 20.67"
(525mm)		 Yes Yes Yes
TM4 Fig 3 Flex 4.0"
(102mm)		 0.080" - 0.25"
(2mm - 6.3mm)		 5.16"
(131mm)		 5.55"
(141mm)		 0.11"
(2.8mm)		 9.56"
(243mm)		 N/A Yes Yes Yes

NOTE: * Dimensions involving flange-to-target thickness assume a standard target thickness of 1/8 inch. Add or subtract accordingly based on your particular sputter target size.

Start Your Configuration

Select from the configuration options below to create a part number and price for the particular TORUS® sputter source required. Be sure to reference the table above for valid options for a given source size.
Example Configuration: TM2RS10EGP is a 2" OD right angle mount head on a 10" long tube with a standard magnet array mounted to an 8" CF flange with gas injection and pneumatic shaft-style shutter.

1. Target Diameter (Target Thickness):
2. Mounting Style:
3. Magnet Array:
4. Tube length:
5. Flange Size:
6. Gas Injection / Deposition Chimney:
7. Shutter:
Part Number:   

Contact sales@lesker.com to discuss your specific vacuum application and process equipment needs.


Note:

Accessories Table

Accessory Type Description Notes PartNo Price Add
Item
Accessory Type Description Notes PartNo Price Add
Item
Interconnect Cable
Type HN Plug To Type N Plug, RG213, 3ft LG
 1 EJCBL3HN P.O.R.
Interconnect Cable
Type N Plug To Type N Plug, RG213, 3ft LG
 1 EJCBL3NN P.O.R.
Interconnect Cable
Type N Plug To Pigtail (1/4"Ring Lug Center Connector And Flying Ground Wire), RG213, 3ft LG
 1 EJCBL3NP P.O.R.
Interconnect Cable
Type N Plug To UHF Plug, RG213, 3ft LG
 1 EJCBL3NU P.O.R.
Power Supply
1kW DC, Typically Recommended For 1", 2", And 3" Cathodes
 - DC01BP-2U $5,950.00
Power Supply
2kW DC , Typically Recommended For 3" And 4" Cathodes
 - DC02BP-2U $6,600.00
Power Supply
500 Watt DC, 85-275V Input
 - PD500X1 P.O.R.
Power Supply
1000 Watt DC, 85-275V Input
 - PD500X2 P.O.R.
Power Supply
1500 Watt DC, 85-275V Input
 - PD500X3 P.O.R.
Power Supply
300W RF, Typically Recommended For 2" And 3" Cathodes
 - RF03A22XX300 $9,335.00
Power Supply
600W RF, Typically Recommended For 4" Cathodes
 - RF06A22XX300 $12,985.00
Rebuild Kit
Torus 1 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)
 - TM01CC-RBKIT P.O.R.
Rebuild Kit
Torus 3 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)
 - TM03CC-RBKIT P.O.R.
Rebuild Kit
Torus 4 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)
 - TM04CC-RBKIT P.O.R.
Rebuild Kit
Torus 2 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)
 - TRS2CC-RBKIT P.O.R.

 Notes: 
1.
Other cable lengths available by replacing the '3' with the desired length in feet.