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TORUS^® Circular HV (High Vacuum) Magnetron Sputtering Sources

KJLC offers a comprehensive line of circular TORUS^® magnetron sputter sources suited for most R&D applications. Traditional indirect-cooled, clamped style target design with integral anode shield assembly. Optimal for low to mid power, R&D and small scale production applications. These sputter cathodes range in size from one to four inches in diameter, are functional with virtually any material, have exceptional target utilization, and can be driven by RF, DC, or Pulsed-DC power supplies.

Engineered for Optimum Performance:

Wide pressure range operation to 10^-9 Torr
Low outgassing
Excellent thin film uniformity and deposition rates
Efficient sputter target utilization
Superior target hold down mechanism eliminates the need for thermal pastes, keepers, etc.
Compact, modular magnet array
Magnets NOT exposed to vacuum
Magnets NOT exposed to cooling water
Cooling water is not exposed to vacuum chamber during target change
Unbalanced operation and compatibility with magnetic materials is available (please contact us by clicking here for more information)
Full line of accessories available (gas injection, chimneys, shutters, cluster arrays, etc.)
Custom sputter source configurations available

TORUS^® Dimensions & Available Options All TORUS^® R&D circular sputter sources feature Type-N (male) power connectors, indirect water cooling, and balanced magnetic operation as standard. Unbalanced operation is available, please contact us by clicking here for more information.

Dimensional Drawings

Specifications Table

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Model	Figure	Head Mount Style	Target Diam.	Target Thickness	Dim. A	Dim. B	Dim. C	Dim. D	Dim. E	Deposition Chimney	Gas Injection Ring	Magnetic Materials
TM1	Fig 1	Axial	1.0" (25.4mm)	0.063" - 0.125" (1.6mm - 3.2mm)	4.05" (103mm)	4.28" (109mm)	N/A	9.56" (243mm)	18.48" (469mm)	No	No	No
TM1	Fig 2	Right Angle	1.0" (25.4mm)	0.063" - 0.125" (1.6mm - 3.2mm)	4.05" (103mm)	4.28" (109mm)	N/A	9.56" (243mm)	20.76" (527mm)	No	No	No
TM1	Fig 3	Flex	1.0" (25.4mm)	0.063" - 0.125" (1.6mm - 3.2mm)	5.55" (141mm)	5.78" (147mm)	N/A	9.56" (243mm)	N/A	No	No	No
TM2	Fig 1	Axial	2.0" (50.8mm)	0.080" - 0.25" (2mm - 6.3mm)	4.08" (104mm)	4.38" (111mm)	0.11" (2.8mm)	9.56" (243mm)	18.58" (472mm)	Yes	Yes	Yes
TM2	Fig 2	Right Angle	2.0" (50.8mm)	0.080" - 0.25" (2mm - 6.3mm)	4.08" (104mm)	4.38" (111mm)	0.11" (2.8mm)	9.56" (243mm)	20.88" (530mm)	Yes	Yes	Yes
TM2	Fig 3	Flex	2.0" (50.8mm)	0.080" - 0.25" (2mm - 6.3mm)	5.58" (142mm)	5.88" (149mm)	0.11" (2.8mm)	9.56" (243mm)	N/A	Yes	Yes	Yes
TM3	Fig 1	Axial	3.0" (76mm)	0.080" - 0.25" (2mm - 6.3mm)	3.41" (87mm)	3.79" (96mm)	0.11" (2.8mm)	9.56" (243mm)	18.11" (460mm)	Yes	Yes	Yes
TM3	Fig 2	Right Angle	3.0" (76mm)	0.080" - 0.25" (2mm - 6.3mm)	3.41" (87mm)	3.79" (96mm)	0.11" (2.8mm)	9.56" (243mm)	20.41" (518mm)	Yes	Yes	Yes
TM3	Fig 3	Flex	3.0" (76mm)	0.080" - 0.25" (2mm - 6.3mm)	4.91" (125mm)	5.40" (137mm)	0.11" (2.8mm)	9.56" (243mm)	N/A	Yes	Yes	Yes
TM4	Fig 1	Axial	4.0" (102mm)	0.080" - 0.25" (2mm - 6.3mm)	3.66" (93mm)	4.05" (103mm)	0.11" (2.8mm)	9.56" (243mm)	18.37" (466mm)	Yes	Yes	Yes
TM4	Fig 2	Right Angle	4.0" (102mm)	0.080" - 0.25" (2mm - 6.3mm)	3.66" (93mm)	4.05" (103mm)	0.11" (2.8mm)	9.56" (243mm)	20.67" (525mm)	Yes	Yes	Yes
TM4	Fig 3	Flex	4.0" (102mm)	0.080" - 0.25" (2mm - 6.3mm)	5.16" (131mm)	5.55" (141mm)	0.11" (2.8mm)	9.56" (243mm)	N/A	Yes	Yes	Yes

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* NOTE: Dimensions involving flange-to-target thickness assume a standard target thickness of 1/8 inch. Add or subtract accordingly based on your particular sputter target size.

Start Your Configuration

Select from the configuration options below to create a part number and price for the particular TORUS^Â® sputter source required. Be sure to reference the table above for valid options for a given source size.
Example Configuration: TM2RS10EGP is a 2in. OD right angle mount head on a 10in. long tube with a standard magnet array mounted to an 8in. CF flange with gas injection and pneumatic shaft-style shutter.

1. Target Diameter:
2. Mounting Style:
3. Magnet Array:
4. Tube Length:
5. Flange Size:
6. Gas Injection/Deposition Chimney:
7. Shutter:

Contact us by clicking here or +1 412 387 9200 to discuss your specific vacuum application and process equipment needs.

Note:

If you require a flange or quick connect for mounting your magnetron to the chamber, we have several standard options. Please click links to see available options.
CF to Quick-Connect Couplings
KF (QF) to Quick-Connect Couplings
Feedthrough Baseplate Coupling Connectors

Accessories Table

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Accessory Type	Description	Reference	Notes	Part Number	Price	In Stock	Add Item
Accessory Type	Description	Reference	Notes	Part Number	Price	In Stock	Add Item
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"HN" TO MALE "N"	Type HN Plug To Type N Plug, RG213, 3ft LG	1	EJCBL3HN	P.O.R.
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "N"	Type N Plug To Type N Plug, RG213, 3ft LG	1	EJCBL3NN	P.O.R.
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO PIGTAIL	Type N Plug To Pigtail (1/4"Ring Lug Center Connector And Flying Ground Wire), RG213, 3ft LG	1	EJCBL3NP	P.O.R.
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "UHF"	Type N Plug To UHF Plug, RG213, 3ft LG	1	EJCBL3NU	P.O.R.
Power Supply	500WATT DC POWER SUPPLY,0-500V,0-2A,HN OUT,85-275V INPUT,CE	500 Watt DC, 85-275V Input	-	PD500X1	P.O.R.
Power Supply	1 KW DC POWER SUPPLY,0-1000V,0-3A,HN OUT,85-275V INPUT,CE	1000 Watt DC, 85-275V Input	-	PD500X2	P.O.R.
Power Supply	1.5KW DC POWER SUPPLY,0-1000V,0-4A,HN OUT,100-240V INPUT,CE,ETL	1500 Watt DC, 85-275V Input	-	PD500X3	P.O.R.
Power Supply	KJLC 300W,220V RF PWR PKG,SUP,A-MATCH,CONT,RK MT,CBLS,CE	300W RF, Typically Recommended For 2" And 3" Cathodes	-	RF03A22XX300	$9,895.00
Power Supply	KJLC 600W,220V RF PWR PKG,SUP,A-MATCH,CONT,RK MT,CBLS,CE	600W RF, Typically Recommended For 4" Cathodes	-	RF06A22XX300	$14,150.00
Rebuild Kit	REBUILD KIT,TM01	Torus 1 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)	-	TM01CC-RBKIT	P.O.R.
Rebuild Kit	REBUILD KIT FOR TORUS 3	Torus 3 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)	-	TM03CC-RBKIT	P.O.R.
Rebuild Kit	REBUILD KIT,TM04	Torus 4 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)	-	TM04CC-RBKIT	P.O.R.
Rebuild Kit	REBUILD KIT,TRS2	Torus 2 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)	-	TRS2CC-RBKIT	P.O.R.