TORUS® Circular HV (High Vacuum) Magnetron Sputtering Sources
KJLC offers a comprehensive line of circular TORUS® magnetron sputter sources suited for most R&D applications. Traditional indirect-cooled, clamped style target design with integral anode shield assembly. Optimal for low to mid power, R&D and small scale production applications. These sputter cathodes range in size from one to four inches in diameter, are functional with virtually any material, have exceptional target utilization, and can be driven by RF, DC, or Pulsed-DC power supplies.
Engineered for Optimum Performance:
- Wide pressure range operation to 10-9 Torr
- Low outgassing
- Excellent thin film uniformity and deposition rates
- Efficient sputter target utilization
- Superior target hold down mechanism eliminates the need for thermal pastes, keepers, etc.
- Compact, modular magnet array
- Magnets NOT exposed to vacuum
- Magnets NOT exposed to cooling water
- Cooling water is not exposed to vacuum chamber during target change
- Unbalanced operation and compatibility with magnetic materials is available (please contact us by clicking here for more information)
- Full line of accessories available (gas injection, chimneys, shutters, cluster arrays, etc.)
- Custom sputter source configurations available
Dimensional Drawings
Specifications Table
| Model | Figure | Head Mount Style | Target Diam. | Target Thickness | Dim. A | Dim. B | Dim. C | Dim. D | Dim. E | Deposition Chimney | Gas Injection Ring | Magnetic Materials |
| TM1 | Fig 1 | Axial | 1.0" (25.4mm) | 0.063" - 0.125" (1.6mm - 3.2mm) | 4.05" (103mm) | 4.28" (109mm) | N/A | 9.56" (243mm) | 18.48" (469mm) | No | No | No |
| TM1 | Fig 2 | Right Angle | 1.0" (25.4mm) | 0.063" - 0.125" (1.6mm - 3.2mm) | 4.05" (103mm) | 4.28" (109mm) | N/A | 9.56" (243mm) | 20.76" (527mm) | No | No | No |
| TM1 | Fig 3 | Flex | 1.0" (25.4mm) | 0.063" - 0.125" (1.6mm - 3.2mm) | 5.55" (141mm) | 5.78" (147mm) | N/A | 9.56" (243mm) | N/A | No | No | No |
| TM2 | Fig 1 | Axial | 2.0" (50.8mm) | 0.080" - 0.25" (2mm - 6.3mm) | 4.08" (104mm) | 4.38" (111mm) | 0.11" (2.8mm) | 9.56" (243mm) | 18.58" (472mm) | Yes | Yes | Yes |
| TM2 | Fig 2 | Right Angle | 2.0" (50.8mm) | 0.080" - 0.25" (2mm - 6.3mm) | 4.08" (104mm) | 4.38" (111mm) | 0.11" (2.8mm) | 9.56" (243mm) | 20.88" (530mm) | Yes | Yes | Yes |
| TM2 | Fig 3 | Flex | 2.0" (50.8mm) | 0.080" - 0.25" (2mm - 6.3mm) | 5.58" (142mm) | 5.88" (149mm) | 0.11" (2.8mm) | 9.56" (243mm) | N/A | Yes | Yes | Yes |
| TM3 | Fig 1 | Axial | 3.0" (76mm) | 0.080" - 0.25" (2mm - 6.3mm) | 3.41" (87mm) | 3.79" (96mm) | 0.11" (2.8mm) | 9.56" (243mm) | 18.11" (460mm) | Yes | Yes | Yes |
| TM3 | Fig 2 | Right Angle | 3.0" (76mm) | 0.080" - 0.25" (2mm - 6.3mm) | 3.41" (87mm) | 3.79" (96mm) | 0.11" (2.8mm) | 9.56" (243mm) | 20.41" (518mm) | Yes | Yes | Yes |
| TM3 | Fig 3 | Flex | 3.0" (76mm) | 0.080" - 0.25" (2mm - 6.3mm) | 4.91" (125mm) | 5.40" (137mm) | 0.11" (2.8mm) | 9.56" (243mm) | N/A | Yes | Yes | Yes |
| TM4 | Fig 1 | Axial | 4.0" (102mm) | 0.080" - 0.25" (2mm - 6.3mm) | 3.66" (93mm) | 4.05" (103mm) | 0.11" (2.8mm) | 9.56" (243mm) | 18.37" (466mm) | Yes | Yes | Yes |
| TM4 | Fig 2 | Right Angle | 4.0" (102mm) | 0.080" - 0.25" (2mm - 6.3mm) | 3.66" (93mm) | 4.05" (103mm) | 0.11" (2.8mm) | 9.56" (243mm) | 20.67" (525mm) | Yes | Yes | Yes |
| TM4 | Fig 3 | Flex | 4.0" (102mm) | 0.080" - 0.25" (2mm - 6.3mm) | 5.16" (131mm) | 5.55" (141mm) | 0.11" (2.8mm) | 9.56" (243mm) | N/A | Yes | Yes | Yes |
* NOTE: Dimensions involving flange-to-target thickness assume a standard target thickness of 1/8 inch. Add or subtract accordingly based on your particular sputter target size.
Start Your Configuration
Select from the configuration options below to create a part number and price for the particular TORUS® sputter source required. Be sure to reference the table above for valid options for a given source size.
Example Configuration: TM2RS10EGP is a 2in. OD right angle mount head on a 10in. long tube with a standard magnet array mounted to an 8in. CF flange with gas injection and pneumatic shaft-style shutter.
Contact us by clicking here or +1 412 387 9200 to discuss your specific vacuum application and process equipment needs.
Accessories Table
| Accessory Type | Description | Notes | PartNo | Price | In Stock | Add Item |
|---|---|---|---|---|---|---|
| Accessory Type | Description | Notes | PartNo | Price | In Stock | Add Item |
| 1 | EJCBL3HN | P.O.R. |
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| 1 | EJCBL3NN | P.O.R. |
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| 1 | EJCBL3NP | P.O.R. |
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| 1 | EJCBL3NU | P.O.R. |
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| - | PD500X1 | P.O.R. |
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| - | PD500X2 | P.O.R. |
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| - | PD500X3 | P.O.R. |
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| - | RF03A22XX300 | $9,895.00 |
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| - | RF06A22XX300 | $14,150.00 |
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| - | TM01CC-RBKIT | P.O.R. |
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| - | TM03CC-RBKIT | P.O.R. |
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| - | TM04CC-RBKIT | P.O.R. |
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| - | TRS2CC-RBKIT | P.O.R. |
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