TORUS® Mag Keeper™ UHV Compatible Circular Magnetron Sputtering Sources
Applications:
- R&D
- Optics
- Decorative
- Medical
- Sensors
KJLC's Mag Keeper is designed to enable higher operating powers due to a mechanically enhanced cooling well. It is ideal for use in high throughput requirements and also enables quick target change with its magnetic keeper design, which secures the target to the source. The design has NO o-rings and utilizes ceramic insulators, making it both UHV and high temp compatible.
Overview
The Mag Keeper™ design is the latest addition to our TORUS® family of sputtering magnetron solutions. It is offered for target sizes of 2", 3", and 4". The magnetron design utilizes both monolithic and bonded target configurations up to 0.375" thick.
All targets (except for magnetic materials) utilize a bolt-on magnetic "keeper" assembly to fasten the target to the magnetron, which eliminates the need for a target clamp assembly. All bonded targets require an "elastomer" bond.
The magnetron does not utilize an independent "anode shield assembly" that needs to be removed. Instead, there is only an anode wall that sits below the target surface eliminating material build-up and flaking onto the target surface.
Our patented cooling well is the heart of the design, which enables operation at power densities ≥200 watts/.in2.
The assembly has NO o-rings and utilizes a single metal seal making it not only UHV compatible, but also capable of handling higher heat loads than our standard TORUS® design. Its smaller overall footprint also enables us to fit more sources into our standard chamber models.
The assembly is offered with both Standard and High Strength magnet options, which all fit the same cathode design. This allows for easy magnetic optimization of the sources in the field and also provides the ability to integrate an unbalanced field if required.
Features
- Compact Design
- HV and UHV Compatible
- Quick Target Change (No clamp or shield)
- Can sputter targets up to 0.375" thick
- High Mag design can sputter up to 0.125" thick Fe
- Low Operating Pressure - Can run ≤ 1mTorr
- No O-ring seals
- High Power/ High Rate capability
Specifications
Magnet Assembly | High strength, rare earth NdFeB (Neodymium Iron Boride) |
Power Rating | Capable of operating at power densities ≥200 watts/in2 (Max powers will vary based on target material properties) Upper level power densities may require the use of a thermal medium. |
Operating Pressure | 0.5-50 mTorr |
Target Sizes | 2", 3", and 4" OD |
Target Thickness | Accomodates up to 0.375" |
Target Change | No target clamp or top anode shield |
Magnet Modification | Quick change magnet assembly |
Seals | No o-rings - magnets NOT exposed to cooling water |
Target Utilization | Typical utilization in the 30% range (with Non-Magnetic materials in a non-reactive mode) |
Vacuum | HV and UHV |
Worldwide Technical Support | Headquarters in USA, Canada, Europe and China |
Warranty | All products covered by a 1-year warranty |
Mounting Options
- Axial
- Right Angle
- Flex
Shutter Option
-
Compact Dome
- Low profile design, ideal for
configurations with limited space - Pneumatically actuated
- Low profile design, ideal for
Targets
Kurt J. Lesker Company provides a full line of high purity materials.
-
Metals: Typically drilled and tapped with keeper attached directly to the target.
- Tungsten and Tantalum targets require elastomer bonding to backing plates as they cannot be reliably drilled and tapped due to their hard, yet brittle nature.
- Magnetic materials: Directly install with no keeper.
-
Ceramics, alloys (depending on the alloy), fragile materials, etc: Require bonding to backing plates with keepers.
- This is material specific and KJLC an advise if it's unclear
- Review the power requirements on our web pages pertaining to max power allowed for various materials. Anything bonded will be 20 watts per square inch or less depending on the material.
- Bonded assemblies will need to be elastomer bonded as it is rated to 250°C whereas indium is only rated to 150°C.
Please contact our materials department by clicking here for a quotation on the targets you need for you application.
Start Your Configuration
Choose the series, size, magnet configuration, mounting, tube length, gas/chimney, shutter, and flange designtor. Next, compose the order code as shown, below.
Contact us by clicking here or +1 412 387 9200 to discuss your specific vacuum application and process equipment needs.
Accessories Table
Accessory Type | Description | Reference | Notes | Part Number | Price | In Stock | Add Item | |
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Accessory Type | Description | Reference | Notes | Part Number | Price | In Stock | Add Item | |
1 | EJCBL3HN | P.O.R. |
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1 | EJCBL3NN | P.O.R. |
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1 | EJCBL3NP | P.O.R. |
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1 | EJCBL3NU | P.O.R. |
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- | PD500X1 | P.O.R. |
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- | PD500X2 | P.O.R. |
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- | PD500X3 | P.O.R. |
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- | RF03A22XX300 | $9,895.00 |
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- | RF06A22XX300 | $14,150.00 |
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- | TMK00CC-MAGRT | P.O.R. |
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- | TMK2CC-HS3RT | P.O.R. |
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- | TMK3CC-HS3RT | P.O.R. |
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- | TMK4CC-HS3RT | P.O.R. |
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