Deposition materials that react with air or water vapor are protected during storage and shipment by immersion in a low viscosity (hydrocarbon) mineral oil. Before the material can be installed in a vacuum system, this oil must be completely removed using solvents that do not act as additional contamination sources for the vacuum system or the subsequent thin film process. The procedure to clean hydrocarbon oil off deposition materials can be found here.
Category: Deposition Materials
Sub-Category: Evaporation Materials
Related Topics: Cleaning, hydrocarbon oil
