Most ceramic targets benefit from being bonded to a backing plate to increase target cooling. In addition, the target must be conditioned prior to depositing films from it. The recommended break in procedure can be found on our website at the following link: http://www.lesker.com/newweb/deposition_materials/RampProcedure_CeramicTarget_Materials.cfm?pgid=0
Category: Deposition Materials
Sub-Category: Sputtering Targets
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