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Frequently Asked Questions

The structure of the film that is deposited depends on the process parameters and substrate temperature. Much work has been done to deposit amorphous silicon films using the various PVD techniques and a literature search on the subject will return numerous usseful papers for review.

Category: Deposition Materials

Sub-Category: Evaporation Pellets, Pieces and Wire

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Contact Us - Frequently Asked Questions - What kind of silicon (Si) film will be deposited with e-beam evaporation? Is it poly-Si or amorphous Si?