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Question: When sputtering iron with a KJLC Torus gun why is a thin (1/16th of an inch) sputtering targets recommended?
The powerful magnets in a KJLC Torus gun are what create the "halo" of plasma just above the target. This plasma is what aids in the higher sputtering rates that can be achieved with a magnetron (with magnets) sputtering gun. The thicker the Iron taerget is the more it will partially or completely block this magnetic field, causing either a reduced sputtering rate or disable the gun from creating a plasma (lighting).
Category: Deposition Equipment
TORUS Magnetron Sputtering Cathodes
Related Topics: Magnetic Materials, Sputtering, Process
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