Ceramic or inorganic compund targets because of fragility and poor heat transfer. Also, precious metal targets so a thinner target can be purchased.
Category: Deposition Materials
Sub-Category: None
Related Topics:
Ceramic or inorganic compund targets because of fragility and poor heat transfer. Also, precious metal targets so a thinner target can be purchased.
Category: Deposition Materials
Sub-Category: None
Related Topics: