a. Compact Design
b. HV and UHV Compatible
c. Quick Target Change (No clamp or shield)
d. Can sputter targets up to 0.375” thick
e. High Mag design can sputter up to 0.120” thick Fe
f. Low Operating Pressure- Can run ≤ 1mTorr
g. No O-ring seals (1- single metal seal)
h. Optimal cooling ring- single thermal interface between cooling channel and the target
Category: Torus/OLED
Sub-Category: None
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