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Question: Why are turbomolecular pumps prefered for reactive deposition processes over cryosoption or diffusion?
Cryosorption:: Cryosorption pumps are capture pumps. This can be problematic when the pump is being regenerated if the reactive gas is Oxygen.Diffusion: If the reactive gas is Oxygen, it can reduce the life of the diffusion pump oil by reacting with it.
Related Topics: Process, Pumping, Conductance, Safety
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