We recommend using a tall, intermetallic crucible for thermal evaporation. Thin films of titanium can be evaporated from intermetallic crucibles. However, film thickness may be limited to 500 angstroms, and the crucible may need to be replaced for each subsequent run. Intermetallic crucibles are composed of titanium boride (TiB2) and boron nitride (BN). This material combination works well because the material is both lubricious and electrically conductive. The crucible is both strong and conductive, yet its lubricious properties help prevent material spill-over and crucible cracking. A tall crucible such as our EVC9INTSPL01 can help prevent material overflow to some degree.
Category: Evaporation Sources
Related Topics:
