As of right now, we have not yet qualified a crucible liner material for e-beam evaporating hafnium oxide and generally recommend running it directly from the hearth of the e-gun.
Because not using a crucible liner is not always an option (especially in shared systems), some customers will use a copper crucible liner and place the material in the copper crucible liner as opposed to placing directly in the hearth. Crucible liners should be stored in a cool, dry place and always handled with gloves or forceps.
Category: Evaporation Sources
Sub-Category: Crucible Liners for E-Beam Sources