ITO can be thermally evaporated with an alumina crucible such as our EVC9AO. It can be paired with a tungsten basket heater such as our EVB8B3030W.
Another option would be to use a shielded, tantalum crucible heater with an alumina crucible such as our EVCH10 with EVC9AO if using a KJLC® system. Great care must be taken when installing the heater to prevent the outer shields from becoming warped which can cause a short in the heater, causing the welded joints to fail. The heater should be centered between the contacts and the outer shielding must be clear of the leads.
Correct - crucible heater centered, Incorrect - crucible heater off-center,
outer shielding clear of leads shielding in contact with leads/inner shielding
Category: Evaporation Sources
Sub-Category: Crucibles and Crucible Heaters