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Question: What is backstreaming?
Backstreaming refers to mechanical pump oil or diffusion pump oil migrating into the process chamber. This will occur in the molecular flow regime. Typically a trap is placed between the mechanical pump and the process chamber (foreline trap) or between the diffusion pump and the process chamber (liquid Nitrogen trap, water cooled trap or ambient baffle).
Related Topics: Backstreaming, Cleanliness, Maintenance
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