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Frequently Asked Questions

Backsteaming can be minimized by using a foreline trap or a high vacuum trap. It can be elininated in the foreline by using a dry pump instead of a wet pump. It can be eliminated in the process chamber by using a cryopump or an ion pump. For more information go to:"

Category: Pumps

Sub-Category: None

Related Topics: Assembly, Process, Backstreaming, Cleanliness

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