Backsteaming can be minimized by using a foreline trap or a high vacuum trap. It can be elininated in the foreline by using a dry pump instead of a wet pump. It can be eliminated in the process chamber by using a cryopump or an ion pump. For more information go to: http://www.lesker.com/newweb/Vacuum_Pumps/vacuumpumps_technicalnotes_1.cfm#WetDry"
Category: Pumps
Sub-Category: None
Related Topics: Assembly, Process, Backstreaming, Cleanliness
