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Frequently Asked Questions


Question: When can I turn on my Turbo pump?

Answer:

If the turbomolecular pump is valved off from the chamber an at atmosphere, the turbo pump can be turned on right after the mechanical pump is started and the foreline valve is open. If the turbomolecular pump is open to the chamber and both are at atmosphere, the turbo pump can be turned on after the chamber pressure is less than 1 torr.


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