The measurement range for most capacitance manometers is 4 decades from the Full Scale (FS) range. For example, if you have a 1000 Torr FS unit, it will measure from 1000 Torr to 0.1 Torr. Please note a few things: 1) While a capacitance manometer will measure 4 decades, the last 1/2 decade could be noisy depending on what you are connected to and 2) if you are using a capacitance manometer for pressure control, the control pressure should be in the middle of the measurement range of the capacitance manometer.
Category: Instrumentation Gauging
Sub-Category: Capacitance Manometers