To achieve UHV pressure in a chamber, it must be bakable while it is being pumped. For a chamber to be bakeable, all components of the chamber, including seals, must be made of glass, metal or ceramic. The chamber must be heated uniformly, to a temperature of at least 200C, for at least 8 hours while being pumped, and then allowed to cool to ambient temperature while being pumped.
Category: Chambers
Sub-Category: Chambers
Related Topics: UHV, Vacuum chambers
