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KJLC® ACG & HCG Series Capacitance Manometers

The KJLC® Capacitance Manometer line of gas type independent gauges are your best choice for high accuracy pressure measurement and control. Available for full scale ranges with all common flange types. The KJLC manometers use an ultra-pure alumina ceramic diaphragm, which is corrosion proof and allows for better signal stability, faster recovery from atmosphere, short warm up time, and an extraordinary lifetime.

Applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes requiring gauge protection
  • Data storage and display manufacturing equipment
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements
  • Industrial vacuum equipment

Specifications Table

Model KJLC ACG KJLC HCG 100ºC KJLC HCG 45ºC
Technology Capacitance Manometer
Capacitance Manometer
Capacitance Manometer
Temperature Bakeout
≤ 110 ºC
≤ 230 ºF

Operating
50.0 ºC
122 ºF

Storage
65.0 ºC
150 ºF

Bakeout
≤ 110 ºC
≤ 230 ºF

Operating
50.0 ºC
122 ºF

Storage
65.0 ºC
150 ºF

Bakeout
≤ 110 ºC
≤ 230 ºF

Operating
40.0 ºC
105 ºF

Storage
65.0 ºC
150 ºF

Temperature Compensation, ºC
Ambient
100
45
Materials Exposed to Vacuum Aluminum oxide ceramic Stainless steel (AISI 316L)
Aluminum oxide ceramic
Aluminum oxide ceramic Stainless steel (AISI 316L)
Stainless steel (AISI 316L)
Aluminum oxide ceramic
Aluminum oxide ceramic Stainless steel (AISI 316L)
Stainless steel (AISI 316L)
Connectors 15 Pin Sub D Male
15 Pin Sub D Male
15 Pin Sub D Male
Typical Accuracy
±0.2% of reading (≥1 Torr)
±0.25% of reading (0.5 and 0.25 options)
±0.25% of reading
±0.2% of reading (≥1 Torr)
±0.4% of reading (<1 Torr)
±0.5% of reading (<1 Torr)
±0.25% of reading (≥1 Torr)
Full Scale Range
0.10  Torr
0.25  Torr
0.50  Torr
1.00  Torr
2.00  Torr
5.00  Torr
10.0  Torr
20.0  Torr
50.0  Torr
100  Torr
200  Torr
500  Torr
1000  Torr
1100  mbar
0.10  Torr
0.25  Torr
0.50  Torr
1.00  Torr
2.00  Torr
5.00  Torr
10.0  Torr
20.0  Torr
50.0  Torr
100  Torr
200  Torr
500  Torr
1000  Torr
1100  mbar
0.05  Torr
0.10  Torr
0.25  Torr
0.50  Torr
1.00  Torr
2.00  Torr
5.00  Torr
10.0  Torr
20.0  Torr
50.0  Torr
100  Torr
200  Torr
500  Torr
1000  Torr
1100  mbar
Set-Point Relays
2 2 2
Relay Response
≤ 30 VDC
≤ 30 VDC
≤ 30 VDC
Analog Output
0 to 10 VDC
0 to 10 VDC
0 to 10 VDC
Recommended
Mounting Orientation
Any except for upside down
Any except for upside down
Any except for upside down
Input Power
14 to 30 VDC
≤ 1 W
14 to 30 VDC or ±15 V (±5%)
14 to 30 VDC or ±15 V (±5%)
Communications
(standard)
Analog
RS232
Analog
RS232
Analog
RS232
Compliance
and Standards
CE
RoHS
UL
CSA
EN
SEMI
CE
RoHS
UL
CSA
EN
SEMI
CE
RoHS
UL
CSA
EN
SEMI
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Product Downloads
Gauges FAQ
Click here for answers to some of the most common questions we are asked.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.

Start Your Configuration

Choose the series, measurement range, unit, flange, and pressure control option. Next, compose the order code as shown, below.

1. Series:
2. Measurement Range:
3. Unit:
4. Flange:
5. Pressure Control Option
(Optimized Signal Filter Setting):
 
Notes:
  • Due to export compliance rules, product may not be available for sale to all regions.
  • Please reference the ordering table below for units that we generally have in stock in one of our global warehouses.

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Ordering Table

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Description Technology Set-Point Relays Connector Type Flange Communications (standard) Full Scale Range Temperature Compensation, ºC
VacuCADSM
Part Number Price In Stock Add To Cart Accessories
Description Technology Set-Point Relays Connector Type Flange Communications (standard) Full Scale Range Temperature Compensation, ºC
VacuCADSM
Part Number Price In Stock Add To Cart Accessories
EUDF CAPACITANCE MANOMETER, AMBIENT, 1 TORR F.S., QF16 (DN16KF) FLANGE, PRESSURE CONTROL Capacitance Manometer 2 15 Pin Sub D Male DN 16 ISO-KF Analog,RS232 1 Torr Ambient
N/A
ACG-KT-1-2
P.O.R. In Stock
EUDF CAPACITANCE MANOMETER, AMBIENT, .1 TORR F.S., QF16 (DN16KF) FLANGE, PRESSURE CONTROL Capacitance Manometer 2 15 Pin Sub D Male DN 16 ISO-KF Analog,RS232 0.1 Torr Ambient
N/A
ACG-NT-1-2
P.O.R. In Stock
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