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KJLC® ACG & HCG Series Capacitance Manometers

The KJLC® Capacitance Manometer line of gas type independent gauges are your best choice for high accuracy pressure measurement and control. Available for full scale ranges with all common flange types. The KJLC manometers use an ultra-pure alumina ceramic diaphragm, which is corrosion proof and allows for better signal stability, faster recovery from atmosphere, short warm up time, and an extraordinary lifetime.

Applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes requiring gauge protection
  • Data storage and display manufacturing equipment
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements
  • Industrial vacuum equipment
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Specifications Table

ModelKJLC ACG 25°C AmbientKJLC HCG 45°C HeatedKJLC HCG 100°C Heated
Measurement Range0.01% of Full Scale (F.S.)0.01% of Full Scale (F.S.)0.01% of Full Scale (F.S.)
Accuracy (% of measurement)1000 Torr/1100 mbar to 1 torr F.S.: 0.2%
0.25 Torr F.S.: 0.25%
0.1 Torr/mbar F.S.: 0.5%
0.15%1000 Torr/1100 mbar to 1 torr F.S.: 0.2%
0.5 to 0.1 Torr/mbar F.S.: 0.4%
Temperature (operating)+10 to +122°F
(+5 to + 50°C)
+50 to 105°F
(+10 to + 40°C)
+50 to +122°F
(+10 to +50°C)
Temperature (storage)-40 to 150°F
(-40 to + 65°C)
-4 to 150°F
(-20 to + 65°C)
-40 to 150°F
(-40 to + 65°C)
Temperature (bakeout)≤230°F
(≤110°C)
≤230°F
(≤110°C)
≤230°F
(≤110°C)
Materials Exposed to VacuumAluminum oxide ceramic (Al2O3)
Stainless steel (AISI 316L)
Aluminum oxide ceramic (Al2O3)
Stainless steel (AISI 316L)
Aluminum oxide ceramic (Al2O3)
Stainless steel (AISI 316L)
Set-Point Relays2 (SP1, SP2)2 (SP1, SP2)2 (SP1, SP2)
Relay Response30 V (DC)≤ 30 V (DC)≤ 30 V (DC)
Internal Volume3.6 cm3 (0.22 in3)4.2 cm3 (0.26 in3)4.2 cm3 (0.26 in3)
Input Power+14 to +30 V (DC), ≤ 1 W+14 to +30 VDC or ±15 V (±5%),
≤ 12 W during heat up,
≤ 8 W at operating temperature
+14 to +30 VDC or ±15 V (±5%),
≤ 15 W during heat up,
≤ 10 W at operating temperature
ConnectionsD-Sub, 15-pin, MaleD-Sub, 15-pin, MaleD-Sub, 15-pin, Male
Compliance & StandardsCE, EN, UL, SEMI, RoHSCE, EN, UL, SEMI, RoHSCE, EN, UL, SEMI, RoHS
Weight½" Tube: 0.68 lbs. (0.31 kg.)
DN16 ISO-KF: 0.73 lbs. (0.33 kg.)
DN16 CF-R: 0.77 lbs. (0.35 kg.)
8 VCR®: 0.82 lbs. (0.37 kg.)
½" Tube: 1.85 lbs. (0.84 kg.)
DN16 ISO-KF: 1.88 lbs. (0.85 kg.)
DN16 CF-R: 1.93 lbs. (0.88 kg.)
8 VCR®: 1.98 lbs. (0.90 kg.)
½" Tube: 1.85 lbs. (0.84 kg.)
DN16 ISO-KF: 1.88 lbs. (0.85 kg.)
DN16 CF-R: 1.93 lbs. (0.88 kg.)
8 VCR®: 1.98 lbs. (0.90 kg.)

Start Your Configuration

Choose the series, measurement range, unit, flange, and pressure control option. Next, compose the order code as shown, below.

Note Due to export compliance rules, product may not be available for sale to all regions.

Please reference the ordering table below for the Heated Capacitance Manometer that we generally have in stock.

1. Series:
2. Measurement Range:
3. Unit:
4. Flange:
5. Pressure Control Option
(Optimized Signal Filter Setting):
 

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Ordering Table

Temperature Full Scale Range Suggested Control Range Measurement Range Units Fittings
VacuCADSM
Part Number Price In Stock Add
Item
Temperature Full Scale Range Suggested Control Range Measurement Range Units Fittings
VacuCADSM
Part Number Price In Stock Add
Item
Ambient 1 5e-3 to 0.5 Torr 1e-4 to 1 Torr Torr KF16
N/A
ACG-KT-1-2
P.O.R.
In Stock
Ambient 0.1 5e-4 to 5e-2 Torr 1e-5 to 0.1 Torr Torr KF16
N/A
ACG-NT-1-2
P.O.R.
In Stock


Accessories Table

Accessory
Type
Description Part Number Price In Stock Add
Item
Accessory
Type
Description Part Number Price In Stock Add
Item
Pressure Measurement Display
Digital Display, 15 Pin Female to 15 Pin Male, +24VDC, External Power Supply Required
399-653
P.O.R.
In Stock
Wall Transformer
Wall Transformer, Universal
KJLPS601UNI
P.O.R.
Call for Availability