MKS® Granville-Phillips® 390 Micro-Ion® ATM Vacuum Gauge Module
1x10-9 Torr to Atmosphere Modular Vacuum Gauge
The MKS, Granville-Phillips 390 Micro-Ion ATM Vacuum Gauge Module combines proven Micro-Ion ionization vacuum gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion ATM Micro-Ion/Conductron/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion ATM Micro-Ion/Conductron/Piezo Vacuum Gauge Module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.
The 390 Micro-Ion ATM Vacuum Gauge Module's full range pressure measurement is output as a single analog signal or available through optional serial RS-485 or DeviceNet™ digital interfaces. RS-485 and DeviceNet versions have up to three optional setpoint relays that can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.
Features
- Continuous pressure measurement from high vacuum to atmosphere
- Dual ionization gauge filaments increase equipment uptime
- Optional setpoint relays for process control
- Analog, RS-485, or DeviceNet output available
- Optional graphics LCD display
Dimensional Drawings
Specifications Table
| Model | 390 Micro-Ion ATM |
| Volume | 10.8 cm3 (0.65 inch3) |
| Measurement Range | 1 x 10-9 Torr to atmosphere 1.33 x 10-9 mbar to atmosphere 1.33 x 10-7 Pascal to atmosphere |
| Power Requirements | RS-485/Analog: 24 VDC +10% to -15%, 1 Amp, 22W nominal; DeviceNet: 24 VDC (11 to 26.4 VDC) at 0.2A nominal |
| Temperature (operating) | 10° to 40°C (50° to 104°F), non-condensing |
| Temperature (storage) | -40° to +70°C (-40° to +158°F) |
| Temperature (bakeout) | 105°C (221°F) maximum, with electronics removed |
| Display | Optional - Graphics LCD Optional |
| Materials Exposed to Vacuum | 304 Stainless Steel Tantalum Tungsten or Yttria-Coated Iridium Alumina CuAg Eutectic Kovar Gold or Nickel Plated Kovar Borosilicate Glass |
| Accuracy (typical) | 1x10-8 to 100 mTorr: ±15% of reading 100 mTorr to 150 Torr: ± 10% of reading 150 to 1000 Torr: ± 2.5% of reading |
| Repeatability (Typical) | 1x10-8 to 100 mTorr: ±5% of reading 100 mTorr to 150 Torr: ±2.5% of reading 150 to 1000 Torr: ±1.0% of reading |
| Set-Point Relays | RS-485 or DeviceNet only: 2 SPDT(NO/NC) or 3 SPST(NO), each can be independently assigned to absolute or differential pressure |
| Analog Outputs | Absolute Pressure: Logarithmic, 0.5 to 7.0 VDC, 0.5 V/decade Differential Pressure: Linear 1-5 VDC, -750 to +250 Torr (-1000 to +333mbar; -100 to +33 kPa) |
| Internal Volume | 10.8 cm3 |
| Connections | RS-485/Analog: 15-pin subminiature-D male; DeviceNet: 5-pin micro connector |
| Emission Current | Autoranging |
| Degas | Electron bombardment; 3 Watts for 1 minute/filament |
| Filament | Tungsten or yttria-coated iridium Alternating (yttria default), automatic, manual (tungsten default) |
| Compliance & Standards | RoHS Compliant CE Compliance EMC Directive: 2004/108/EC; EN61326-1 Low Voltage Directive: 2006/95/EC; EN61010-1 |
| Weight | 728.5 gm (25.7 oz) (2.75 ConFlat fitting) |
1. Wiring terminals for Micro-Ion ATM module with two analog outputs, and no trip-point relays
3. Wiring terminals for Micro-Ion ATM module with RS-485 interface, one analog output, and two trip-point relays
2. Wiring terminals for Micro-Ion ATM module with RS-485 interface, two analog outputs, and no trip-point relays
4. Wiring terminals for Micro-Ion ATM module with RS-485 interface, one analog output, and three trip-point relays