MKS® 627F Baratron® Temperature Regulated Capacitance Manometer
(0.02 - 1000 Torr) Temperature Controlled to 45 Degrees C
The 627F Baratron manometer is the RoHS-compliant version of the industry standard for stability and accuracy. It is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 45°C) is in control.
Based on established Baratron capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is inter-changeable with earlier Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.
- Excellent long-term stability
- Percent of Reading accuracy for more precise output signal in lower pressure ranges
- Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes
- Corrosion Resistant
- Temperature Compensated
- Clean room compliant
≤ 50.0 ºC
≤ 122 ºF
|Materials Exposed to Vacuum||
Incoloy® Nickel Alloys
Inconel® Nickel Alloys
15 Pin Sub D Male
0.25% of reading
0.15% of reading
0.12% of reading
0.05 to 1%
0 to 10 VDC
Any except for upside down
±15 VDC ±5% @ 0.25 Amps (maximum
946 Vacuum System Controller
Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.
Features and Benefits:
- Simultaneous control and readout for up to six MFC's and/or vacuum gauges
- Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
- Pressure readings from 1,000 Torr down to 10-11 Torr, eliminating the need for individual electronics for each sensor
- 12 set point relays included in the base unit for system control flexibility
- Standalone controller
Configurable and expandable module that can allow for full system control.
Features and Benefits:
- Allows for continual module expansion for increased workload
- Access to Control Workbench software to monitor, record, and control all connected devices
- Compatible with MKS MFC's, direct and indirect gauging, valves, etc.
- Controlled through a PLC
- Low cost of ownership
|Power Supply and Readouts||946 Vacuum System Controller||PAC 100 Automation System|
|Display Type||320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position.||PC (not included)|
|Channels||6 of any combination below.
MKS MFC's*MKS Baratrons*, MKS Piranis*, MKS Convectron/Convection Series*, MKS Hot and Cold Cathode Sensors*, MKS Pressure Control Valves*
|4 of any combination below.
MKS MFC's*, MKS Baratrons*
**Other modules available
|Power Input||150 watts maximum 100 - 240 VAC 50/60 Hz||19VDC - 32VDC, Max - 5A (each for DC I/O and DC CORE)|
|Approximate List Price||$1814 to $5877 (region specific power cable included) (interface cables not included)||$1740 (interface cables not included)|
626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs
15-pin Type "D"
This chart is to help you review all the available options for the MKS® 627F Baratron® Temperature Regulated Capacitance Manometer. Please see below for an interactive product builder to assemble the options into a part number ready for order.
Ordering Code Example: 627F01TBC1B
|Pressure Range Full Scale - Torr||Code||Configuration|
|1/2" (12.7 mm) OD tube||A||B|
|8 VCR female||B|
|1.33" OD CF||C|
|NW16 KF (range < 5000 Torr)||D|
|8 VCO female||E|
|2.75" OD CF||L|
|NW25 KF (range < 5000 Torr)||Q|
|0.12% of Reading (Ranges ≥ 1 Torr)||C||C|
|0.15% of Reading (0.25, 0.1, and 0.05 Torr units only)||D|
|0.25% of Reading (0.02 Torr units only)||E|
|Vertical calibration, no heater status indication||1||1|
|Vertical calibration, heater status indication||2|
|Horizontal calibration, no heater status indication (< 1 Torr only)||5|
|Horizontal calibration, heater status indication (< 1 Torr only)||6|
|15 pin Type D with Thread Lock||B||B|
|15 pin Type D with Slide Lock||P|
Please select the model, range, fittings, accuracy, options, and connector to configure your part number.