MKS® 628F Baratron® Temperature Regulated Capacitance Manometer
(0.05 - 1000 Torr) Temperature Controlled to 100 Degrees C
The 628F Baratron manometer is the RoHS-compliant version of the industry standard for stability and accuracy. It is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today's lower process pressures.
Based on established Baratron capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier Types 128 and 628 Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.
- Excellent long-term stability
- Percent of Reading accuracy for more precise output signal in lower pressure ranges
- Full Scale ranges low as 50 mTorr (0.07 mbar) for precise measurement of low pressure processes
- Corrosion Resistant
- Temperature Compensated
- Clean room compliant
|Full Scale Ranges||0.05, 0.1, 0.25, 1, 2, 10, 20, 100, 1000 Torr|
|Overpressure Limit||45 psia (310 kPa) or 120% Full Scale, whichever is greater|
|Materials Exposed to Vacuum||Inconel®|
|Accuracy (typical)||0.25% of reading (including non-linearity, hysteresis, and non-repeatability) for 1 - 1000 Torr; 0.50% of reading for 0.25, 0.1, and 0.05 Torr|
|Input Power||±15 VDC ±5% @ 0.6 Amps (maximum)|
|Resolution||0.001% of Full Scale (0.002% of Full Scale for 0.05 Torr)|
|Cold Start to Ready Time||2 hours for 1 - 1000 Torr ranges|
4 hours for ranges <1 Torr
|Ambient Temperature||15°C to 50°C|
|Compliance & Standards||Electromagnetic Compatibility CE compliant to EMC Directive 2004/108/EC|
Restriction of Hazardous Substances Fully compliant to RoHS Directive 2002-95-EC
|Optional Features||Temperature status: one semiconductor switch will turn "ON" and corresponding green LED will be "ON" when the instrument is at temperature. |
Heater status: second semiconductor switch will turn "OFF" when heater failure occurs and corresponding bi-color LED will be blinking red, otherwise light will remain green.
946 Vacuum System Controller
Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.
Features and Benefits:
- Simultaneous control and readout for up to six MFC's and/or vacuum gauges
- Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
- Pressure readings from 1,000 Torr down to 10-11 Torr, eliminating the need for individual electronics for each sensor
- 12 set point relays included in the base unit for system control flexibility
- Standalone controller
|Power Supply and Readouts||946 Vacuum System Controller||PAC 100 Automation System|
|Display Type||320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position.||PC (not included)|
|Channels||6 of any combination below.
MKS MFC's*MKS Baratrons*, MKS Piranis*, MKS Convectron/Convection Series*, MKS Hot and Cold Cathode Sensors*, MKS Pressure Control Valves*
|4 of any combination below.
MKS MFC's*, MKS Baratrons*
**Other modules available
|Power Input||150 watts maximum 100 - 240 VAC 50/60 Hz||19VDC - 32VDC, Max - 5A (each for DC I/O and DC CORE)|
|Approximate List Price||$1814 to $5877 (region specific power cable included) (interface cables not included)||$1740 (interface cables not included)|
626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs
15-pin Type "D"
This chart is to help you review all the available options for the MKS® 628F Baratron® Temperature Regulated Capacitance Manometer. Please see below for an interactive product builder to assemble the options into a part number ready for order.
Ordering Code Example: 628F01TBE1B
|Pressure Range Full Scale||Code||Configuration|
|1/2" (12.7 mm) OD tube||A||B|
|8 VCR female||B|
|1.33" OD CF||C|
|NW16 KF (range < 5000 Torr)||D|
|8 VCO female||E|
|2.75" OD CF||L|
|NW25 KF (range < 5000 Torr)||Q|
|0.25% of Reading (ranges ≥ 1 Torr)||E||E|
|0.5% of Reading (ranges < 1 Torr)||F|
|Vertical calibration, no heater status indication||1||1|
|Vertical calibration, heater status indication||2|
|Horizontal calibration, no heater status indication (< 1 Torr only)||5|
|Horizontal calibration, heater status indication (< 1 Torr only)||6|
|15 pin Type D with Thread Lock||B||B|
|15 pin Type D with Slide Lock||P|
Please select the model, range, fittings, accuracy, options, and connector to configure your part number.