MKS® Granville-Phillips® 925 MicroPirani™ Vacuum Transducer

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MKS^® Granville-Phillips^® 925 MicroPirani™ Vacuum Transducer

1.0x10^-5 Torr to Atm pressure/vacuum gauges with MEMS-based MicroPirani vacuum sensors

The 925 MicroPirani vacuum transducer is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. The 925 MicroPirani offers analog voltage output, digital interface and set point relays for process controlling.

Features

Increased measurement range from 10^-5 Torr to Atmosphere, two decades beyond a standard Pirani
Analog output and digital communication
Mountable in any orientation
Three optional set point relays for process control
Optional local display

Applications

The 925 MicroPirani vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze drying:

General vacuum pressure measurement
Foreline and roughing pressure measurement
Gas backfilling measurement and control
Mass spectrometer control
Activation of UHV gauges
System process control (interlocks, valves, pumps)
Control system pressure

The 925 MicroPirani vacuum gauge can be configured with other flanges and vacuum terminations, electrical connectors (Hirschmann, RJ45/FCC68), a UHV enclosure seal, and custom analog output voltages to emulate voltage outputs from a variety of other transducers for "plug and play" replacement of other vendors' gauges in OEM applications without changing system software.

Dimensional Drawings

Specifications Table

Model	925 MicroPirani
Technology	MEMS Pirani
Measurements	Torr Min: 1.000 x 10^-5 Max: 1.330 x 10³ mbar Min: 1.300 x 10^-5 Max: 1.330 x 10³
Temperature	Operating 40.0 ºC 104 ºF Storage 40.0 ºC 104 ºF Bakeout 85.0 ºC 185 ºF
Materials Exposed to Vacuum	304 stainless steel Gold Low out gassing epoxy resin Silicon Silicon Dioxide Silicon Nitride Viton®
Connectors	15 Pin Sub D Male 9 pin Sub D Male
Accuracy Range	1 to 10%
Display Type	None Digital
Set-Point Relays	0 - 3
Relay Response	1 A @ 30VAC/DC resistive N/A
Analog Output	1 to 9 VDC
Recommended Mounting Orientation	Any
Input Power	9 to 30 VDC < 1.5 watts max
Communications (Standard)	Analog RS232 RS485
Compliance and Standards	EMC Directive 2004/108/EEC
Integrated Electronics	Yes

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Configuration Options

This chart is to help you review all the available options for the MKS Granville-Phillips 925 MicroPirani Vacuum Transducer. Please see below for an interactive product builder to assemble the options into a part number ready for order.

Ordering Code Example:925-12034

Series Options	Code	Configuration
MicroPirani	925	925
Flange Options	Code	Configuration
KF16	1	1
KF25	2
1/8" NPT-M	3
VCR4	4
VCR8	5
KF16 Extended	8
Interface Options	Code	Configuration
RS232 / Analog	1	2
RS485 / Analog	2
EtherCAT / Analog	7
Analog Out Options	Code	Configuration
Standard MKS	0	0
MKS Moducell (limited measuring range)	8	0
Connector / Relays Options	Code	Configuration
SUBD 9 Pin male / 1 relay set point (925C compatible)	1	3
SUBD 15 Pin male / no relay	2
SUBD 15 Pin male / 3 relays	3
SUBD 15 Pin male / 3 relays / Dual Analog Output	5
Enclosure Sealing Options	Code	Configuration
Standard / Viton sealing	0	4
Standard / Viton sealing / display	4	4

925 Micro Pirani Vacuum Transducer Pin-outs

9 Pin

15 Pin

EtherCAT IN

EtherCAT OUT

Pin	Description
1	RS485- / RS232 Transmit
2	RS485+ / RS232 Receive
3	Power + (9-30VDC)
4	Power return -
5	Analog Output +
6	Analog Output -
7	Relay 1, Normally Open
8	Relay 1, Common
9	Relay 1, Normally Closed
10	Relay 2, Normally Closed
11	Relay 2, Common
12	Relay 2, Normally Open
13	Relay 3, Normally Closed or Analog Out 2 (Hardware option)
14	Relay 3, Common
15	Relay 3, Normally Open

A Complete Package Consists of

Note: Below you will find common methods to control your gauge / transducer. Please note that not all controllers are listed for every gauge / transducer. If you do not see the controller that you need, please contact your local KJLC Sales Representative.

If the unit as an integrated display, it can be:
- Powered via a wall transformer / power supply (US). This item can be found in the accessories. If outside of the US, the power supply will need to be fabricated by the end user.
- Connected directly to a PLC (data acquisition system) or computer. The interconnector cable will need to be supplied by the end user. The pinouts for this unit can be found in the manual.
If the unit does not have an integrated display, it can be:
- Powered via a controller. Suggested Controller:
  - MKS PDR 900
- Connected directly to a PLC (data acquisition system) or computer. The interconnector cable will need to be supplied by the end user. The pinouts for this unit can be found in the manual.

Compatible Controller	Description	Components Needed
MKS PDR900 Vacuum Gauge Controller	Single unit power supply and display with analog output and up to 3 setpoint relays (transducer dependent)	MKS PDR900, MKS 925, and interconnect cable. Power cable included.

Start Your Configuration

1. Series:	MicroPirani [925-]
2. Flange:
3. Interface:
4. Analog Out:
5. Connector / Relays:
6. Enclosure Sealing:

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Ordering Table

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Description

Technology

Display Type

Set-Point Relays

Connector Type

Flange

Communications (Standard)

Set-Point Relays

VacuCAD^SM

Part Number

Price

In Stock

Add To Cart

Accessories

Description

Technology

Display Type

Set-Point Relays

Connector Type

Flange

Communications (Standard)

Set-Point Relays

VacuCAD^SM

Part Number

Price

In Stock

Add To Cart

Accessories

GAUGE, 925 MICROPRIANI, KF16, RS232 / ANALOG, 9 PIN SUB D MALE / 1 SETPOINT, NO DISPLAY

MEMS Pirani

None

9 pin Sub D Male

KF16

Analog,RS232

Yes

N/A

925-11010

P.O.R.

—

GAUGE, 925 MICROPRIANI, KF16, RS485 / ANALOG, 15 PIN SUB HD MALE / 0 SETPOINTS, DISPLAY

MEMS Pirani

Digital

15 Pin Sub D Male

KF16

Analog,RS485

N/A

925-12024

P.O.R.

GAUGE, 925 MICROPRIANI, KF25, RS232 / ANALOG, 15 PIN SUB HD MALE / 0 SETPOINTS, NO DISPLAY

MEMS Pirani

None

15 Pin Sub D Male

KF25

Analog,RS232

N/A

925-21020

P.O.R.

—

GAUGE, 925 MICROPRIANI, KF25, RS232 / ANALOG, 15 PIN SUB HD MALE / 0 SETPOINTS, DISPLAY

MEMS Pirani

Digital

15 Pin Sub D Male

KF25

Analog,RS232

N/A

925-21024

P.O.R.

—

GAUGE, 925 MICROPRIANI, KF25, RS232 / ANALOG, 15 PIN SUB HD MALE / 3 SETPOINTS, NO DISPLAY

MEMS Pirani

None

15 Pin Sub D Male

KF25

Analog,RS232

Yes

N/A

925-21030

P.O.R.

—

GAUGE, 925 MICROPRIANI, 1/8" NPT, RS232 / ANALOG, 15 PIN SUB HD MALE / 0 SETPOINTS, NO DISPLAY

MEMS Pirani

None

9 pin Sub D Male

1/8" NPT

Analog,RS232

Yes

N/A

925-31010

P.O.R.

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Accessories Table

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Description	Accessory Type	Part Number	Price	In Stock	Add Item
Description	Accessory Type	Part Number	Price	In Stock	Add Item
PDR900 to 9 Pin RS232, 10ft (3m)	Interconnect Cable	100013613	P.O.R.
PDR900 to 15 Pin RS232, 10ft (3m)	Interconnect Cable	100013620	P.O.R.
PDR900 to 9 Pin RS485, 10ft (3m)	Interconnect Cable	100013664	P.O.R.
PDR900 to 15 Pin RS485, 10ft (3m)	Interconnect Cable	100013671	P.O.R.
Power Supply, Convert 120 Vac to 12 Vdc, 15 pin, 6 ft (1.8 m)	Wall Transformer	275933	P.O.R.
Serial Communication Adaptor, 15 Pin to USB, RS232 or RS485 Communications for 900 Series MKS Transducers	Serial Communication Adaptor	900USB-1	P.O.R.
MKS 925, KF16	Repair Kit	925-1REP	P.O.R.
MKS 925, KF25	Repair Kit	925-2REP	P.O.R.
MKS 925, 1/8" NPT-M, 1/2" Tube	Repair Kit	925-3REP	P.O.R.
MKS 925, VCR4	Repair Kit	925-4REP	P.O.R.
MKS 925, VCR8	Repair Kit	925-5REP	P.O.R.
MKS 925, CF 1.33	Repair Kit	925-6REP	P.O.R.
MKS 925, KF16 Extended	Repair Kit	925-8REP	P.O.R.
PDR900 Single Channel Controller, RS232/RS485, EU power Supply	Controller	PDR900-12-EU	P.O.R.
PDR900 Single Channel Controller, RS232/RS485, UK power Supply	Controller	PDR900-12-UK	P.O.R.
PDR900 Single Channel Controller, RS232/RS485, US power Supply	Controller	PDR900-12-US	P.O.R.
Aluminum Clamp, DN16 ISO-KF Flange	Clamp	QF16-075-C	P.O.R.
Viton^® Centering Ring for DN16 ISO-KF Flange	Viton O-ring	QF16-075-SRV	$7.00