MKS® Granville-Phillips® 925 MicroPirani™ Vacuum Transducer
1.0x10-5 Torr to Atm pressure/vacuum gauges with MEMS-based MicroPirani vacuum sensors
The 925 MicroPirani vacuum transducer is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. The 925 MicroPirani offers analog voltage output, digital interface and set point relays for process controlling.
Features
- Increased measurement range from 10-5 Torr to Atmosphere, two decades beyond a standard Pirani
- Analog output and digital communication
- Mountable in any orientation
- Three optional set point relays for process control
- Optional local display
Applications
The 925 MicroPirani vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze drying:
- General vacuum pressure measurement
- Foreline and roughing pressure measurement
- Gas backfilling measurement and control
- Mass spectrometer control
- Activation of UHV gauges
- System process control (interlocks, valves, pumps)
- Control system pressure
The 925 MicroPirani vacuum gauge can be configured with other flanges and vacuum terminations, electrical connectors (Hirschmann, RJ45/FCC68), a UHV enclosure seal, and custom analog output voltages to emulate voltage outputs from a variety of other transducers for "plug and play" replacement of other vendors' gauges in OEM applications without changing system software.
Dimensional Drawings
Specifications Table
| Model | 925 MicroPirani |
|---|---|
| Technology |
MEMS Pirani
|
| Measurements |
Torr Min: 1.000 x 10-5 Max: 1.000 x 103 mbar Min: 1.330 x 10-5 Max: 1.000 x 10-5 |
| Temperature |
Operating 40.0 ºC 104 ºF Storage 40.0 ºC 104 ºF Bakeout 85.0 ºC 185 ºF |
|
Typical Accuracy |
±10% of reading (5.00 x 10-4 to 1.00 x 10-3 Torr) ±5% of reading (1.00 x 10-3 to 100 Torr) ±25% of reading (100 Torr to atm) |
|
Display Type |
Digital
|
|
Set-Point Relays |
3, Optional |
|
Relay Response |
1 A @ 30VAC/DC
resistive |
|
Analog Output |
1 to 9 VDC
100Ω maximum output impedance 1 volt/decade |
|
Recommended Mounting Orientation |
Any
|
|
Input Power |
9 to 30 VDC
< 1.5 watts max |
|
Communications (standard) |
Analog
RS232 |
|
Communications (Digital) |
RS232 or RS485
|
|
Compliance and Standards |
EMC Directive 2004/108/EEC
|
Configuration Options
This chart is to help you review all the available options for the MKS Granville-Phillips 925 MicroPirani Vacuum Transducer. Please see below for an interactive product builder to assemble the options into a part number ready for order.
Ordering Code Example:925-12034
| Series Options | Code | Configuration |
| MicroPirani | 925 | 925 |
| Flange Options | Code | Configuration |
| KF16 | 1 | 1 |
| KF25 | 2 | |
| 1/8" NPT-M | 3 | |
| VCR4 | 4 | |
| VCR8 | 5 | |
| KF16 Extended | 8 | |
| Interface Options | Code | Configuration |
| RS232 / Analog | 1 | 2 |
| RS485 / Analog | 2 | |
| EtherCAT / Analog | 7 | |
| Analog Out Options | Code | Configuration |
| Standard MKS | 0 | 0 |
| MKS Moducell (limited measuring range) | 8 | |
| Connector / Relays Options | Code | Configuration |
| SUBD 9 Pin male / 1 relay set point (925C compatible) | 1 | 3 |
| SUBD 15 Pin male / no relay | 2 | |
| SUBD 15 Pin male / 3 relays | 3 | |
| SUBD 15 Pin male / 3 relays / Dual Analog Output | 5 | |
| Enclosure Sealing Options | Code | Configuration |
| Standard / Viton sealing | 0 | 4 |
| Standard / Viton sealing / display | 4 |
925 Micro Pirani Vacuum Transducer Pin-outs
15 Pin
EtherCAT IN
EtherCAT OUT
| Pin | Description |
| 1 | RS485- / RS232 Transmit |
| 2 | RS485+ / RS232 Receive |
| 3 | Power + (9-30VDC) |
| 4 | Power return - |
| 5 | Analog Output + |
| 6 | Analog Output - |
| 7 | Relay 1, Normally Open |
| 8 | Relay 1, Common |
| 9 | Relay 1, Normally Closed |
| 10 | Relay 2, Normally Closed |
| 11 | Relay 2, Common |
| 12 | Relay 2, Normally Open |
| 13 | Relay 3, Normally Closed or Analog Out 2 (Hardware option) |
| 14 | Relay 3, Common |
| 15 | Relay 3, Normally Open |
Ordering Table
| Description | Technology | Display Type | Set-Point Relays | Connector Type | Flange | Communications (standard) |
|
Part Number | Price | In Stock | Add To Cart | ||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Description | Technology | Display Type | Set-Point Relays | Connector Type | Flange | Communications (standard) |
|
Part Number | Price | In Stock | Add To Cart | ||||
|
TRANSDUCER, |
MEMS Pirani | Digital | 3, Optional | 15 Pin Sub D Male | DN 16 ISO-KF | Analog,RS232 |
|
|
P.O.R. |
|
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