MKS® Granville-Phillips® 925 MicroPirani™ Vacuum Transducer
1.0x10-5 Torr to Atm pressure/vacuum gauges with MEMS-based MicroPirani vacuum sensors
The 925 MicroPirani vacuum transducer is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. The 925 MicroPirani offers analog voltage output, digital interface and set point relays for process controlling.
Features
- Increased measurement range from 10-5 Torr to Atmosphere, two decades beyond a standard Pirani
- Analog output and digital communication
- Mountable in any orientation
- Three optional set point relays for process control
- Optional local display
Applications
The 925 MicroPirani vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze drying:
- General vacuum pressure measurement
- Foreline and roughing pressure measurement
- Gas backfilling measurement and control
- Mass spectrometer control
- Activation of UHV gauges
- System process control (interlocks, valves, pumps)
- Control system pressure
The 925 MicroPirani vacuum gauge can be configured with other flanges and vacuum terminations, electrical connectors (Hirschmann, RJ45/FCC68), a UHV enclosure seal, and custom analog output voltages to emulate voltage outputs from a variety of other transducers for "plug and play" replacement of other vendors' gauges in OEM applications without changing system software.
Dimensional Drawings
Specifications Table
| Model | 925 Micro Pirani |
| Measurement Method | MicroPirani (MEMS Thermal Conductivity) |
| Measurement Range | 1.0 x 10-5 Torr to Atmosphere |
| Power Requirements | 9 to 30 VDC, < 1.5 watts max |
| Temperature (operating) | 0° to 40°C (32° to 104°F) |
| Temperature (bakeout) | 85°C (185°F), non-operating |
| Materials Exposed to Vacuum | 304 stainless steel Silicon SiO2 Si3N4 Gold Viton® Low out gassing epoxy resin |
| Accuracy (typical) | 5 x 10-4 to 10-3 Torr ±10% of reading 10-3 to 100 Torr ±5% of reading 100 Torr to atm ±25% of reading |
| Repeatability (Typical) | 10-3 to 100 Torr ± 2% of reading |
| Set-Point Relays | 925 - 3 relays SPDT(Optional) 1 A @ 30VAC/DC, resistive Range: 5.0 x 10-4 Torr to 500 Torr Relay Response: <100 msec maximum |
| Mounting/Installation Orientation | Any |
| Analog Outputs | 1 to 9 VDC, 100Ω maximum output impedance, 1 volt/decade |
| Internal Volume | (KF16) 2.80 cm3 |
| Compliance & Standards | EMC Directive 2004/108/EEC |
| Weight | (KF 16) 170 g |
Configuration Options
This chart is to help you review all the available options for the MKS Granville-Phillips 925 MicroPirani Vacuum Transducer. Please see below for an interactive product builder to assemble the options into a part number ready for order.
Ordering Code Example:925-12034
| Series Options | Code | Configuration |
| MicroPirani | 925 | 925 |
| Flange Options | Code | Configuration |
| KF16 | 1 | 1 |
| KF25 | 2 | |
| 1/8" NPT-M | 3 | |
| VCR4 | 4 | |
| VCR8 | 5 | |
| CF 1.33" | 6 | |
| KF16 Extended | 8 | |
| Interface Options | Code | Configuration |
| RS232 / Analog | 1 | 2 |
| RS485 / Analog | 2 | |
| EtherCAT / Analog | 7 | |
| Analog Out Options | Code | Configuration |
| Standard MKS | 0 | 0 |
| MKS Moducell (limited measuring range) | 8 | |
| Connector / Relays Options | Code | Configuration |
| SUBD 9 Pin male / 1 relay set point (925C compatible) | 1 | 3 |
| SUBD 15 Pin male / no relay | 2 | |
| SUBD 15 Pin male / 3 relays | 3 | |
| SUBD 15 Pin male / 3 relays / Dual Analog Output | 5 | |
| Enclosure Sealing Options | Code | Configuration |
| Standard / Viton sealing | 1 | 4 |
| Standard / Viton sealing / display | 4 |
925 Micro Pirani Vacuum Transducer Pin-outs
9 Pin
| Pin | Description |
| 1 | Relay, Normally Open |
| 2 | Relay, Normally Closed |
| 3 | Power + (9-30VDC) |
| 4 | Power Return - |
| 5 | Analog Output + |
| 6 | Relay, Common |
| 7 | RS485- / RS232 Transmit |
| 8 | Analog Output - |
| 9 | RS485+ / RS232 Receive |
15 Pin
| Pin | Description |
| 1 | RS485- / RS232 Transmit |
| 2 | RS485+ / RS232 Receive |
| 3 | Power + (9-30VDC) |
| 4 | Power return - |
| 5 | Analog Output + |
| 6 | Analog Output - |
| 7 | Relay 1, Normally Open |
| 8 | Relay 1, Common |
| 9 | Relay 1, Normally Closed |
| 10 | Relay 2, Normally Closed |
| 11 | Relay 2, Common |
| 12 | Relay 2, Normally Open |
| 13 | Relay 3, Normally Closed or Analog Out 2 (Hardware option) |
| 14 | Relay 3, Common |
| 15 | Relay 3, Normally Open |
NOTE: Power supply and cable are not included. Pin-out diagrams are shown above for cable configuration.
Start Your Configuration
Ordering Table
Please reference the ordering table below for units that we generally have in stock in one of our global warehouses.
| Interface | Connector Relays | Display | Setpoints | Fittings |
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Part Number | Price | In Stock | Add Item |
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| Interface | Connector Relays | Display | Setpoints | Fittings |
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Part Number | Price | In Stock | Add Item |
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| RS232 / Analog | 15 Pin Sub D Male | Yes | 0 | KF16 |
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Accessories Table
| Accessory Type | Description | Part Number | Price | In Stock | Add Item |
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| Accessory Type | Description | Part Number | Price | In Stock | Add Item |
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NOTE: Only a wall transformer is needed if the 925 has an integrated display and 15 pin Sub-D connector.