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Vacuum Gauge & Controller Selection Guide




10 -12 10 -11 10 -10 10 -9 10 -8 10 -7 10 -6 10 -5 10 -4 10 -3 10 -2 10 -1 1 10 1 10 2 10 3 10 -12 10 -11 10 -10 10 -9 10 -8 10 -7 10 -6 10 -5 10 -4 10 -3 10 -2 10 -1 1 10 1 10 2 10 3 ATMOSPHERE GAS INDEPENDENT** GAS DEPENDENT* ULTRA-HIGH HIGH ROUGH VACUUM LEVEL 15-30% 5-15% 1-5% <1% ACCURACY RANGES * Affected by gas composition other than N2 or Air** Not affected by gas composition*** Capacitance Manometers only read in a 4 decade range Transition Zone: Not meant for accurate measurement BOURDON (DIAL) 0.1 to 760 Torr 0.133 to 1000 mBar KJLC BDG Gauge THERMOCOUPLE 1e -3  to 1 Torr 1.33e -3  to 1.33 mBar KJLC 205A Thermocouple Gauge 1e -3  to 1 Torr 1.33e -3  to 1.33 mBar KJLC510TC-K or H Thermocouple Gauge 1e -3  to 1 Torr 1.33e -3  to 1.33 mBar KJL615-K or H Thermocouple Gauge 1e -3  to 760 Torr 1.33e -3  to 1000 mBar KJL615TC Thermocouple Gauge 1e -4  to 1000 Torr 1.33e -4  to 1000 mBar KJLC Field Analysis Vacuum Meter PIRANI & CONVECTION 3.75e -4  to 760 Torr 5e -4  to 1000 mBar KJLC Pirani Gauge 1e -5  to 760 Torr 1.33e -5  to 1000 mBar MKS 925 MicroPirani™ Gauge 1e -4  to 1000 Torr 1.33e -4  to 1000 mBar KJLC 275 Convection Enhanced Pirani 1e -4  to 1000 Torr 1.33e -4  to 1000 mBar KJLC 275i Convection Enhanced Pirani 1e -4  to 1000 Torr 1.33e -4  to 1000 mBar KJLC 300 Convection Enhanced Pirani IONIZATION 1e -9  to 5e -2  Torr 1.33e -9  to 6.66e -2  mBar KJLC 351 Hot Filament Ion Gauge 1e -9  to 5e -2  Torr 1.33e -9  to 6.66e -2  mBar KJLC 354 Hot Filament Ion Gauge 7.6e -10  to 7.6e -3  Torr 1e -9  to 1e -2  mBar KJLC Cold Cathode Gauge COMBINATION 1e -7  to 760 Torr Cold Cathode 1.33e -7  to 1000 mBar Cold Cathode MKS 523 Cold Cathode Combination Gauge 1e -9  to 760 Torr Hot Filament Convection Piezo 1.33e -9  to 1000 mBar Hot Filament Convection Piezo MKS 390 Micro-Ion® Full Range Gauge 1e -9  to 1000 Torr Hot Filament Convection 1.33e -9  to 1000 mBar Hot Filament Convection KJLC 392 with KJLC Convection Gauge 7.6e -10  to 760 Torr Cold Cathode Pirani 1e -9  to 1000 mBar Cold Cathode Pirani KJLC Cold Cathode/Pirani Gauge PIEZO 0.1 to 1000 Torr 0.133 to 1000 mBar MKS 902B Piezo Gage CAPACITANCE MANOMETERS 1e -5  to 1000 Torr 1.33e -5  to 1000 mBar KJLC ACG 1e -5  to 1000 Torr 1.33e -5  to 1000 mBar KJLC HCG 1e -5  to 1000 Torr 1.33e -5  to 1000 mBar MKS AA01A 1e -5  to 1000 Torr 1.33e -5  to 1000 mBar MKS 626C 1e -4  to 1000 Torr 1.33e -4  to 1000 mBar MKS 722B 2e -6  to 1000 Torr 2.66e -6  to 1000 mBar MKS AA02A 1e -5  to 1000 Torr 1.33e -5  to 1000 mBar MKS 627F 5e -6  to 1000 Torr 6.66e -6  to 1000 mBar MKS 628F