Classic Deposition Systems
Platforms that are specially engineered to meet a customer's requirements.
CMS (Combinatorial Materials Science) Series – Advanced Research System utilizing Sputtering or Electron Beam Techniques
- The CMS platform is a versatile thin film deposition system for advanced materials research and development.
- Configurable with six or more magnetron sputtering sources.
- Available Linear multi-pocket UHV electron beam evaporation source (multi-technique options available).
- Oil Sealed or dry rough pumping, cryogenic or magnetically-levitated turbo high vacuum pumping options available.
- Compatible with up to 8" OD substrates, custom configurations available.
- Substrate Heating to 1100°C, cooling, and biasing options also available.
- Single or multi-wafer load lock option available.
- Computer system control with recipe and data logging options available.
AXXIS – Co-Sputtering, Thermal Evaporation, & Electron Beam Techniques
- The AXXIS platform incorporates radial deposition ports and a right-angled tilting substrate stage to efficiently facilitate multiple deposition techniques.
- Substrate stage allows precise angled resolution for applications, such as Glancing Angle Deposition.
- Up to 6 HV magnetron sputtering sources, multi-pocket electron beam evaporation source, up to 3 thermal evaporation sources (multi-technique options available).
- Wet or dry rough pumping, turbo, magnetically-levitated turbo or cryogenic pump high vacuum pumping options available.
- Standard configurations compatible with up to 8" OD substrates; custom configurations available, up to 550°C heating, cooling, and glow discharge options available.
- Single or multi-wafer load lock option available.
- Basic computer system control with recipe and data logging options available.
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