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Physical Vapor Deposition Systems

Physical vapor deposition (PVD) systems deposit thin films and coatings by a process in which a target material is vaporized, transported, and condensed on to a substrate. PVD processes include Sputtering, Electron beam, and Thermal Evaporation.

PRO Line PVD Series – Versatile Sputtering, Electron Beam, Thermal, & Organic Evaporation Deposition Platform

The PRO Line PVD Series utilizes a modular design configurable for a variety of thin film deposition applications.

  • Available in three increasing chamber sizes: PVD75, PVD200, and PVD500
  • Available with TORUS® Mag Keeper™ UHV Compatible Circular Magnetron Sputtering Sources in 2", 3", 4" diameters
  • Available with TORUS® Linear Magnetrons
  • Available with Multi-pocket electron beam evaporation sources
  • Available with multiple thermal evaporation source configurations
  • Up to two organic evaporation sources available
  • Multi-technique options available. Examples: Electron beam + Sputtering, Electron beam + evaporation
  • Wet or dry rough pumping, turbo pump, or cryogenic pump high vacuum pumping options available
  • Standard configurations compatible with up to 11" to 20" OD substrates (pending chamber size); up to 850°C heating, cooling, and biasing options available
  • Single and multi-wafer load lock options available for substrates up to 6"
  • PRO Line series of PVD tools include KJLC's innovative eKLipse™ advanced control package

To learn more about our PRO Line PVD Series Systems please choose a platform below:

PRO Line PVD 75

PRO Line PVD 200

Please contact us for more info:
1.800.245.1656 | salesus@lesker.com
PVD Systems Questionnaire

PRO Line PVD 500

Please contact us for more info:
1.800.245.1656 | salesus@lesker.com
PVD Systems Questionnaire



SPECTROS™ Series – Organic Thin Film Deposition & Metallization Platform

How KJLC Is Pushing
Perovskite Research
How we've enabled world class vapour deposited Perovskite solar cell research utilizing our line of Organic Material Deposition Systems.
Learn More ▶
  • Available in three increasing chamber sizes: Mini SPECTROS, SPECTROS 150, and Super SPECTROS 200
  • Incorporates a sliding front door with glove box interface flange and hinged rear door for unobstructed chamber access.
  • Available with multiple 1cc, 10cc, or 35cc plug-in low-temperature organic sources and thermal evaporation sources. The Mini can accommodate up to two TORUS® Mag Keeper™ Circular Magnetron Sputtering Sources. The SPECTROS can accommodate a multi-pocket electron-beam evaporation source. Multi-technique options available.
  • Scroll type rough pumping; turbo and cryogenic high vacuum pumping options.
  • Standard configurations compatible with 4" x 4" (100mm x 100mm) up to 8" x 8" (200mm x 200mm) square substrates (pending chamber size), up to 350°C heating, glove box, up to 5 mask storage shelves with motorized transfer, and wedge tool options.
  • Single and multi-wafer load lock options available for substrates up to 8" x 8" (200mm x 200mm).
  • Recipe driven computer system include KJLC's innovative eKLipse™ advanced control package.

To learn more about our SPECTROS Series Systems please choose a platform below:

Mini SPECTROS SPECTROS 150 Super SPECTROS 200



NANO 36™ – Affordable Glovebox Compatible, Sputtering or Thermal Evaporation Thin Film Deposition System

How KJLC Is Pushing
Perovskite Research
How we've enabled world class vapour deposited Perovskite solar cell research utilizing our line of Organic Material Deposition Systems.
Learn More ▶
  • KJLC's most affordable deposition system platform, designed specifically for seamless glovebox integration.
  • Typically used in the university and government lab R&D environment.
  • Magnetron Sputtering or thermal evaporation deposition techniques available. For thermal evaporation, this includes the option to select our Low Temperature Evaporator (LTE) sources that are terrific for depositing volatile organic materials.
  • Up to 3 TORUS® Mag Keeper™ Magnetron sputtering sources or up to 4 thermal evaporation sources available.
  • Wet or dry rough pumping options available.
  • Standard configurations compatible with up to 8" substrates, with substrate heating and cooling options available.
  • This system comes standard with our full suite of KJLC® eKLipse™ Control Software.
More Info

Would You Like More Information?

Do you have any questions? Click below to get in contact with one of our many experienced team members.

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