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KJLC DC Series - DC Sputtering & DC Bias

These proven DC power supplies are ideally suited for coating processes where reliability & performance are critical.

The KJLC DC Series power supplies range in power levels from 1kW to 120kW. They are intended primarily for DC magnetron sputtering and as DC bias sources. They are compact and over 90% efficient. As a safety feature, they have extremely low stored energy at the outlet. Special integrated circuitry enables arc suppression for arc-sensitive applications and arc control for sustained arcing applications. Front panel controls switch regulation between constant power, current, or voltage while permitting the power to be ramped to the set point.

PD500X Series

The KJLC PD500X Series offers low power option that can be configured for 500W, 1000W, or 1500W outputs. Its 1 U rack height is ideal for space constraints.

Features

  • Superior Arc Detection & Suppression - < 100 nsecs (.1 μ secs)
  • 500 watt, 1000 watt and 1500 watt Output Power Versions
  • Adjustable Arc Detection Delay & Off Time Before Restarting
  • Voltage, Current and Power Regulation Modes
  • Adjustable Power Ramping
  • Adjustable Run Timer
  • Stored Target Parameters for Up to 7 Separate Targets
  • kWh Counting & Time Limit
  • RS-232 & Analog Communication Capability
  • Wide 0-(-)1000 Volt Range - Full Rated
  • Power can be Applied Under Nearly all Conditions
  • Stable Operation Down to 20 watts for Non-Reactive Processes
  • Suitable for Use as a Substrate Bias Power Supply
  • No Transformer Tap Changes Are Necessary to Operate Across Entire Range

Benefits

  • Adaptable to many processes and applications
  • Deposit ultra-thin, homogeneous films
  • Optimize process parameters for high productivity and high yields
  • Compact design - 1 U rack height

Specifications Table

Control/FeedbackLCD Front Panel
RS-232
RS-485
25-Pin Analog
Output ControlP - Power Control
U - Voltage Control*
I- Current Control
*When parallel operation mode is enabled, voltage regulator is not active
Load Impedance5.3 Ohm - 21.2 Ohm (1:4) full power
Operational Duty Cycle100%
Arc Detection Time<100ns

Dimensional Drawings

KJLC® Research
Advantage Packages
The KJLC RAP program offers the ability to build a magnetron and power supply package ideal for your application. Click here to build your package and save up to 30%.
Product Downloads
For a download of the Product Manual, click here.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.

Ordering Table

Model Input Voltage Max Input Current Output Recommended
Sputter Source
Part No Price In Stock Add
Item
Model Input Voltage Max Input Current Output Recommended
Sputter Source
Part No Price In Stock Add
Item
500 Watt DC Power Supply
100-250V Input
0-2A
0 to 500V @ 0 to 2A
TORUS 1, TORUS 2
PD500X1
P.O.R.
Call for Availability
1000 Watt DC Power Supply
100-250V Input
0-3A
0 to 1000V @ 0 to 3A
TORUS 2, TORUS 3
PD500X2
P.O.R.
Call for Availability
1500 Watt DC Power Supply
100-250V Input
0-4A
0 to 1000V @ 0 to 4A
TORUS 2, TORUS 3, TORUS 4
PD500X3
P.O.R.
In Stock

Click here to contact us for more information, including pricing and options, and to discuss your specific process application requirements.

Accessories Table

Type Description Part Number Price In Stock Add
Item
Type Description Part Number Price In Stock Add
Item
Interconnect Cable
Type HN Plug To Type N Plug, RG213, 3ft LG
EJCBL3HN
P.O.R.
Call for Availability
Interconnect Cable
Type N Plug To Type N Plug, RG213, 3ft LG
EJCBL3NN
P.O.R.
In Stock
Interconnect Cable
Type N Plug To Pigtail (1/4"Ring Lug Center Connector And Flying Ground Wire), RG213, 3ft LG
EJCBL3NP
P.O.R.
In Stock
Interconnect Cable
Type N Plug To UHF Plug, RG213, 3ft LG
EJCBL3NU
P.O.R.
Call for Availability
Interconnect Cable
Type HN plug to Type N Plug, RG213, 6ft LG
EJCBL6HN
P.O.R.
In Stock
Interconnect Cable
Type N plug to Type N Plug, 6ft LG
EJCBL6NN
P.O.R.
In Stock
Interconnect Cable
Type N Plug to Pigtail (1/4" Ring Lug Center Connector And Flying Ground Wire), RG213, 6ft LG
EJCBL6NP
P.O.R.
Call for Availability
Interconnect Cable
Type N Plug to UHF Plug, RG213, 6ft LG
EJCBL6NU
P.O.R.
Call for Availability

NOTE: If you require a configuration not shown in this table, please contact us by clicking here or call +1 412 387 9200.

Contact Us - KJLC DC Series - DC Sputtering & DC Bias