Inficon IC6 Thin Film Deposition Controller

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Inficon IC6 Thin Film Deposition Controller

Overview

The Inficon IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.

Features & Benefits

INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
Codeposition of up to six sources simultaneously
Color TFT LCD display makes it easy to see what's going on with your process
+/-0.0035 Hz over 100ms sample
USB data storage for screen shots, recipe storage and data logging
Powerful I/O with flexibility to integrate into simple or complex systems (using expandable Inputs (28) and Outputs (24 Relays, 14 TTL outputs), and use of logic functions (100 logic statements)
6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring

Can accommodate up to 50 processes of 200 layers each and processes can be linked together for a maximum of 10,000 layers
Multiple sensor averaging for up to 8 sensors
4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
Optional Ethernet communications
Optional IC6 Configuration Editor Software (part number 781-620-G1) - LabVIEW^® based Windows^® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format
RoHS compliant

Specifications

	Inficon IC6 Thin Film Deposition Controller
	Measurement Performance
Frequency resolution	Â±0.0035 Hz @ 6 MHz
Thickness and rate resolution/measurement (1)	Â±0.00433 Å
Measurement frequency range	6.0 to 4.5 MHz (fixed)
Thickness accuracy (2)	0.50%
Measurement interval	0.10 s
Multiple measurement averaging	0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 sec. averaging allowed
	Design Features
Auto Z	Yes
Autotone	Yes
Co-deposition	Yes (Up to 6 sources)
	Process Recipe & Data Management
Material programs	32
Process layers (per process)	200
Processes	50 (processes can be linked together)
USB memory	Yes
Data logging	Yes
	Hardware Features
Single	8
Dual / CrystalTwo^®	4 / 8 (with CrystalTwo^® Switch)
CrystalSix^®	8
Crystal 12^®	8
Generic	8
Number of sources (4)	Up to 6
Source control voltages	0 to +/-10 V, adjustable
Output resolution	15 bits over full range (0 to 10V)
Crucible positions	64
Inputs	14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground
Outputs	8 standard, up to 24 optional programmable SPST relays rated at 30 V(dc) or 30 V(ac) RMS or 42 V peak @ 2.5 amps; 14 optional TTL outputs
Recorder output (4)	0 to +10 V, adjustable
Logic statements	100 fully programmable; up to 5 actions, 5 events per statement
Standard	RS232
Optional	Ethernet
	Display
Thickness resolution	1 Å for 0 to 9.999 kÅ
	10 Å for 10.00 to 99.99 kÅ
	100 Å for 100.0 to 999.9 kÅ
	1 kÅ for 1000 to 9999 kÅ
Rate resolution	0.001 for 0 to 9.999 Å/s if rate filter time setting is 10 seconds or greater
	0.01 for 0 to 99.99 Å/s
	0.1 for 100 to 999.9 Å/s
	Operation
Power requirements	100 - 230 V (ac) +/- 15%
Power requirements	50 / 60 Hz +/- 3 Hz
Operating temperature	0 to 50°C (32 to 122°F)
Dimensions, excluding mounts (h x w x d)	5.25" x 19" x 13" (133mm x 483mm x 330 mm)
Weight	23 lbs (10.5 kg)

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NOTES

Tooling/density = 100/1, fundamental frequency = 6 MHz
Varies according to process; figures reflect typical accuracy.
Maximum configuration of each type.
The IC6 has 6 DAC outputs standard, 6 more can be added as an option. Any of the 12 can be configured as source control voltages or recorder outputs however the number of sources that can be controlled simultaneously is 6.

Configuration Options

Ordering Code Example: IC6-110100

Basic Configuration	Code	Configuration
115V 50/60 Hz	1	1
230V 50/60 Hz	2	1
Sensor Measurement Module (Each has two sensor inputs)	Code	Configuration
Standard module	1	1
Two standard modules	2
Three standard modules	3
Four standard modules	4
Additional Computer Communications Module (RS232 standard)	Code	Configuration
None	0	0
Ethernet	1	0
Additional I/O Relay Module (Base unit includes eight Relay outputs / 14 TTL Inputs)	Code	Configuration
None	1	1
Eight relay outputs / 14 TTL inputs	2	1
Optional TTL Relay Module	Code	Configuration
None	0	0
Eight relay outputs / 14 TTL outputs	1	0
Optional DAC Module (Base unit includes six DAC outputs)	Code	Configuration
None	0	0
Additional six DAC outputs	1	0

A Complete Package Consists of

Note: Below you will find common components needed to build a complete package. If you do not see an item that you need, please contact your local KJLC Sales Representative.

Components Needed	Description
QCM Sensor	The type of necessary sensor is based on the application. For common applications, a Front Load Sensor or Cool Drawer Sensor with either single or dual crystals may be appropriate. For a production application, a CrystalTwelve may be used for automatic crystal switching.
In-Vacuum Cable	The In-vacuum cable is generally supplied with the sensor. If a replacement is required, please view the Accessories table below.
Feedthrough	Most sensors are available with or without a feedthrough, where coming with a feedthrough is the most common. These feedthroughs come standard with either a 1" bolt or DN40CF flange.
Crystals	Crystals, whether Gold, Silver, or Alloy, are all dependent on the process. Please view the QCM Crystal page for further details.
Short 6" BNC Cable	The short BNC cable connects the atmospheric side of the flange to the oscillator. This is usually included in the oscillator kit. If a replacement is required, please view the Accessories table below.
Oscillator	The ModeLock oscillator is a unique oscillator that ensures stable and high resolution measurements. This is usually included in the oscillator package. If a replacement is required, please view the Accessories table below.
Sensor Input BNC Cable	The sensor input BNC cable connects the other end of the oscillator to the IC6 controller. This is usually included in the oscillator package. If a replacement Is required, please view the Accessories table below.

Start Your Configuration

1. Unit:	Inficon IC6 Thin Film Deposition Controller [IC6-]
2. Basic Configuration:
3. Sensor Measurement Module:
4. Additional Computer Communications Module:
5. Additional I/O Relay Module:
6. Optional TTL Relay Module:
7. Optional DAC Module:

Accessories Table

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Description	Reference	Part Number	Price	In Stock	Add Item
Description	Reference	Part Number	Price	In Stock	Add Item
100 ft. (30.5m) cable XTC/3, controller to XIU	Interconnect Cable, 100ft., Cygnus 2, IC6, or XCT/3Controller to XIU	600-1261-P100	P.O.R.
INTERCONNECT CABLE, 15 FEET, CYGNUS 2, IC6, OR XCT/3CONTROLLER TO XIU	Interconnect Cable, 15ft., Cygnus 2, IC6, or XCT/3Controller to XIU	600-1261-P15	P.O.R.
30 ft. (9.1m) cable, controller to XIU	Interconnect Cable, 30ft., Cygnus 2, IC6, or XCT/3Controller to XIU	600-1261-P30	P.O.R.
50 ft. (15.3m) cable, controller to XIU	Interconnect Cable, 50ft., Cygnus 2, IC6, or XCT/3Controller to XIU	600-1261-P50	P.O.R.
CABLE,6"OSCILLATOR TO F/T,FOR XTC/2 AND IC/5 UNITS.	15.2 cm (6") BNC Cable, XIU to Vacuum Feedthrough	755-257-G6	P.O.R.
CRYSTALTWO SWITCH, INFICON, TWO 6” BNC CABLES.	CrystalTwo Switch, Inficon, Two 6" BNC Cables	779-220-G1	P.O.R.
CRYSTALTWO SWITCH, INFICON, TWO 20” BNC CABLES.	CrystalTwo Switch, Inficon, Two 20" BNC Cables	779-220-G2	P.O.R.
OSCILLATOR, IC6, XTC/3 XIU, FOR XIU TO SENSOR HEAD CABLE LENGTHS OF 6 TO 72 INCHES (15CM TO 183CM)	Oscillator, IC6, XTC/3 XIU, For XIU to Sensor Head Cable Lengths of 6" to 72" (15cm to 183cm)	781-600-G1	P.O.R.
OSCILLATOR, IC6, CYGNUS 2 XTC/3 XIU, FOR XIU TO SENSOR HEAD CABLE LENGTHS OF 3 TO 4M (118 TO 157")	Oscillator, IC6, Cygnus 2 XTC/3 XIU, For XIU to Sensor Head Cable Lengths of 3m to 4m (118" to 157")	781-600-G2	P.O.R.
IC6, XTC/3 XIU PKG WITH 100 ft. (30.5m) CABLE	Cable, IC6, XTC/3 XIU Pkg with 100ft. (30.5m)	781-611-G100	P.O.R.
IC6, XTC/3 XIU PKG WITH 15 ft. (4.6m) CABLE	Cable, IC6, XTC/3 XIU Pkg with 15ft. (4.6m)	781-611-G15	P.O.R.
IC6, XTC/3 XIU PKG WITH 30 ft. (9.1m) CABLE	Cable, IC6, XTC/3 XIU Pkg with 30ft. (9.1m)	781-611-G30	P.O.R.
IC6, XTC/3 XIU PKG WITH 50 ft. (15.3m) CABLE	Cable, IC6, XTC/3 XIU Pkg with 50ft. (15.3m)	781-611-G50	P.O.R.
—	Cable, 4m XIU Pkg with 30.5m (100ft.) XIU Cable - Includes 3.5m In-vacuum Cable And 20" BNC (XIU to Feedthrough) Cable - For Use with Cygnus 2, IC6, or XTC/3	781-612-G100	P.O.R.
OSCILLATOR PKG: IC6, XTC/3 XIU PKG w/ 15 ft. (30.5m) IC6, XTC/3 to XIU cbl, 4m Sens Head in-vac. cbl. & 6 inch BNC (XIU to Feedthrough) cbl.	Cable, 4m XIU Pkg with 4.6m (15ft.) XIU Cable - Includes 3.5m In-vacuum Cable And 20" BNC (XIU to Feedthrough) Cable - For Use with Cygnus 2, IC6, or XTC/3	781-612-G15	P.O.R.
IC6, XTC/3 XIU PKG w/ 30 ft. (30.5m) IC6, XTC/3 to XIU cbl, 4m Sens Head in-vac. cbl. & 6 inch BNC (XIU to Feedthrough) cbl.	Cable, 4m XIU Pkg with 9.1m (30ft.) XIU Cable - Includes 3.5m In-vacuum Cable And 20" BNC (XIU to Feedthough) Cable - For Use with Cygnus 2, IC6, or XTC/3	781-612-G30	P.O.R.
—	Cable, 4m XIU Pkg with 15.2m (50ft.) XIU Cable - Includes 3.5m In-vacuum Cable And 20" BNC (XIU to Feedthrough) Cable - For Use with Cygnus 2, IC6, or XTC/3	781-612-G50	P.O.R.
IC6, XTC/3 XIU PKG w/ 100 ft. (30.5m) IC6, XTC/3 to XIU cbl, 3.5m Sens Head in-vac. cbl. & 20 inch BNC (XIU to Feedthrough) cbl.	Cable, IC6, XTC/3 XIU Pkg w/ 100ft. (30.5m) IC6, XTC/3 to XIU Cbl, 3.5m Sens Head In-vac. Cbl. & 20" BNC (XIU to Feedthrough)	781-613-G100	P.O.R.
IC6, XTC/3 XIU PKG w/ 15 ft. (4.6m) IC6, XTC/3 to XIU cbl, 3.5m Sens Head in-vac. cbl. & 20 inch BNC (XIU to Feedthrough) cbl.	Cable, IC6, XTC/3 XIU Pkg w/ 15ft. (4.6m) IC6, XTC/3 to XIU Cbl, 3.5m Sens Head In-vac. Cbl. & 20" BNC (XIU to Feedthrough)	781-613-G15	P.O.R.
IC6, XTC/3 XIU PKG w/ 30 ft. (9.1m) IC6, XTC/3 to XIU cbl, 3.5m Sens Head in-vac. cbl. & 20 inch BNC (XIU to Feedthrough) cbl.	Cable, IC6, XTC/3 XIU Pkg w/ 30ft. (9.1m) IC6, XTC/3 to XIU Cbl, 3.5m Sens Head In-vac. Cbl. & 20" BNC (XIU to Feedthrough)	781-613-G30	P.O.R.
IC6, XTC/3 XIU PKG w/ 50 ft. (15.3m) IC6, XTC/3 to XIU cbl, 3.5m Sens Head in-vac. cbl. & 20 inch BNC (XIU to Feedthrough) cbl.	Cable, IC6, XTC/3 XIU Pkg w/ 50ft. (15.3m) IC6, XTC/3 to XIU Cbl, 3.5m Sens Head In-vac. Cbl. & 20" BNC (XIU to Feedthrough)	781-613-G50	P.O.R.
—	IC6 Configuration Editor Software - LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format	781-620-G1	P.O.R.