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Inficon Easy Rate Dual Sensor

Overview

Easy Rate Dual Sensors offer a simple and inexpensive solution for QCM applications where one crystal may not be enough. A shutter covers a second crystal until it is needed to finish the process. The Easy Rate Dual Sensors uses two in-vacuum cables for easy field replacement.

The compact design of the Easy Rate Dual Sensor requires only 32.5 mm (1.3 in.) of clearance, allowing the sensor and shutter assembly to pass through a standard CF40 nipple.

Easy Rate Dual Sensors are available in standard and right angle orientations, and they can be configured to include a feedthrough with or without bored-through tube fittings.

Note: Easy Rate Dual sensors use 4.8 mm (3/16 in.) outer diameter (OD) water cooling tubes. They are not compatible with Ultra-Torr equipped Front Load Sensor feedthroughs and require a tubing adapter in order to be welded to a standard feedthrough with 4.8 mm (3/16 in.) OD water cooling tubes.

Features & Benefits

Dual crystals
Low in price, high in quality
Front load crystal holder
Includes crystal shutter
Easy installation
Available in standard and right angle configurations
Sensor / Feedthrough combinations available with or without bored-through tube fittings

Specifications

	Easy Rate Dual Sensor
Maximum bakeout temp with no water	130°C
Maximum operating isothermal environment temperature with minimum water flow	400°C
BD-A _ E 1 _ _ Size (maximum envelope without shutter)	3.25 x 9.00 x 3.15 cm (1.28 x 3.55 x 1.24 in.)
BD-B _ E 1 _ _ Size (maximum envelope without shutter)	3.25 x 9.65 x 3.15 cm (1.28 x 3.80 x 1.24 in.)
Water Tubes	4.76 mm (0.188 in) OD seamless stainless steel
Crystal exchange	Front loading; shutter moves to the side for easy access to the holders
Mounting	Two #4-40 tapped holes on the back of the sensor body
	Installation Requirements
Feedthrough	2 pass water and 1 pass air 4.76 mm (0.188 in) OD with 2 microdot coaxial connections
Other	XIU or Oscillator to match specific controller, solenoid valve assembly 750-420-G1 for shuttered sensors
Water flow rate	Minimum water flow 150-200 cc/min, 30°C max
Water quality	Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity
Air	Air 70-80 psi (gauge) {85-95 psi (absolute)} (5.8-6.5 bar (absolute)) [584-653 kPa (absolute)] Do not exceed 100 psi (gauge) {115 psi (absolute)} (7.9 bar (absolute)) [791 kPa (absolute)]
	Materials
Body and holder	304 type stainless steel
Springs, electrical contacts	Au plated Be-Cu
Water Tubes	S-304, 4.76 mm (0.188 in) OD x 0.51 mm (0.020 in.) wall thickness seamless stainless steel tubing
Connector (Microdot)	Stainless steel, Teflon^® and glass insulated
Insulators	>99% Al₂O₃
Wire	Tin plated copper
Crystal	0.550 in. (13.97 mm) Diameter
	Feedthrough Specifications - 1 in. Bolt
Materials	304 stainless steel, Teflon^®, ceramic, beryllium nickel, VITON^®
Temperature	Operational environment to 300°C with water cooling or 165°C without
Mounting	1.015 in. Â±0.010 in. diameter aperture
	Feedthrough Specifications - CF40 (2-3/4 in. ConFlat)
Materials	304 stainless steel, Teflon, ceramic, beryllium nickel
Temperature	Operational environment to 450°C with water cooling or 165°C without
Mounting	Mates with 2 3/4 in. ConFlat type flanges with 1.375 in. I.D. min.

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Configuration Options

Ordering Code Example: ERD-A0E130

Type of Sensor	Code	Configuration
Standard sensor (water tubes parallel)	A	A
Right angle sensor (water tubes perpendicular)	B	A
In-vacuum cable	Code	Configuration
None	0	0
25.4 cm (10 in.) in-vacuum cable	1
76.2 cm (30 in.) in-vacuum cable	2
Length of sensor (See note 1)	Code	Configuration
Standard: 806 mm (31.72 in.) Right angle: 776 mm (30.55 in.)	E1	E1
Feedthrough	Code	Configuration
None	0	3
1 in. bolt	3
CF40	4
Feedthrough connection	Code	Configuration
Sensor not connected to feedthrough	0	0
Bored-through union fittings (Allow the sensor water tubes to slide into the feedthrough.)	9	0

NOTES

Sensor length is measured from center of crystal to the end of the water tubes.
Crystals sold separately.

A Complete Package Consists of

Note: Below you will find common methods to either monitor or control the deposition rate of your process. Please note that not all controllers are listed. If you do not see the equipment that you need, please contact your local KJLC Sales Representative.

If you would like to monitor the deposition rate:

STM-2
FTM-2400

If you would like to control the deposition rate:

FTC-2800
XTC/3S
XTC/3M
IC6

Compatible Part	Description	Components Needed
Inficon STM-2 USB Thin Film Thickness/Rate Deposition Monitor	The STM-2 is a USB powered thin film monitor that allows for deposition monitoring via a laptop of 1 QCM. Up to 8 STM-2’s can be connected to a laptop at once.	Inficon Easy Rate Dual Sensor, STM-2, Crystals; oscillator, 6-inch BNC cable (oscillator to feedthrough), and 16 ft. USB cable (oscillator to computer) included.
KJLC FTM-2400 Multi-Channel Quartz Crystal Monitor	The KJLC FTM-2400 is a user-friendly deposition monitor with digital input, relay outputs, and the capability to connect up to 6 single QCMs or 1 dual QCM for sequential display.	Inficon Easy Rate Dual Sensor with feedthrough, KJLC FTM-2400, oscillator kit, and crystals.
KJLC FTC-2800 Multi-Channel Quartz Crystal Controller	The KJLC FTC-2800 is an economical, user-friendly deposition controller, able to control your deposition rate and connect up to 4 single QCMs or 2 dual QCMs. The KJLC FTC-2800C also allows for codeposition.	Inficon Easy Rate Dual Sensor with feedthrough, KJLC FTC-2800, oscillator kit, and crystals.
Inficon XTC/3S Deposition Controller	The Inficon XTC/3S is a deposition controller that includes the patented ModeLock frequency measurement to provide highly accurate control of a single layer process. The XTC/3S allows the control of up to 2 sources, 2 single QCMs, or 2 dual QCMs.	Inficon Easy Rate Dual Sensor with feedthrough, Inficon XTC/3S, ModeLock oscillator kit, and crystals.
Inficon XTC/3M Multi-Layer Deposition Controller	The Inficon XTC/3M is a deposition controller that includes the patented ModeLock frequency measurement to provide highly accurate control of a multi-layer process. The XTC/3M allows the control of up to 2 sources, 2 single QCMs, or 2 dual QCMs.	Inficon Easy Rate Dual Sensor with feedthrough, Inficon XTC/3S, ModeLock oscillator kit, and crystals.
Inficon IC6 Thin Film Deposition Controller	The Inficon IC6 is the industry standard for deposition and includes the patented ModeLock frequency measurement for high-resolution rates and thicknesses. The IC6 has the capability to control up to 6 sources, 8 single QCMs or 4 dual QCMs.	Inficon Easy Rate Dual Sensor with feedthrough, Inficon IC6, ModeLock oscillator kit, and crystals.

Start Your Configuration

1. Base Unit:	Easy Rate Dual Sensor [ERD-]
2. Type of Sensor:
3. In-Vacuum Cable:
4. Length of Sensor:	Standard: 806 mm (31.72 in.) / Right angle: 776 mm (30.55 in.) [E1]
5. Feedthrough:
6. Feedthrough Connection:

NOTES

Sensor length is measured from center of crystal to the end of the water tubes.
Crystals sold separately.

Accessories Table

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Description	Reference	Part Number	Price	In Stock	Add Item
Description	Reference	Part Number	Price	In Stock	Add Item
—	SCREW 0-80 x .125 LG SLOT PAN HD SS GP	080-011-P3	P.O.R.
—	#0-80 Split washer	080-013	P.O.R.
—	Socket Screw	084-027	P.O.R.
—	#4 Split lock washer	084-054	P.O.R.
CONNECTOR. FEMALE COAX, FOR 750-619-G1 SPUTTERING HEAD BODY	Female coax	750-174-P2	P.O.R.
CRYSTAL SENSOR, IN-VACUUM CABLE, 10 INCHES	In-vacuum cable, 25.4 cm (10 in.)	783-500-023	P.O.R.
IN-VACUUM CABLE, 76.2 CM (30 INCH)	In-vacuum cable, 76.2 cm (30 in.)	783-500-024	P.O.R.
—	Crystal Holder Assembly	784-204-G1	P.O.R.
—	Crystal Retainer Assembly	784-205-G1	P.O.R.
—	Easy Rate Sensor Actuator Assembly	784-206-G1	P.O.R.
—	Shutter Kit, Single (Unassembled Parts)	784-209-G1	P.O.R.
—	Crystal Holder	784-300-P1	P.O.R.
—	Easy Rate Single Sensor Shutter	784-305-P1	P.O.R.
—	Easy Rate Sensor Actuator Clamp	784-306-P1	P.O.R.
—	Crystal Finger Spring	784-403-P1	P.O.R.
—	Retaining Ring	784-404-P1	P.O.R.
—	Holder Finger Spring	784-405-P1	P.O.R.

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Part Number:
Price as Configured:	$

Inficon Easy Rate Dual Sensor

Overview

Features & Benefits

Specifications

Configuration Options

Start Your Configuration

Accessories Table

Related Products