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Inficon XTC/3M Multi-Layer Deposition Controller

Overview
A Complete Package Consists of

Advanced quartz crystal deposition controller for multiple sequential depositions.

The XTC/3M quartz crystal deposition controller is a multiple layer closed-loop controller for sequentially depositing layers from multiple materials, sources, and crucibles. This controller is intended for those applications where the entire process recipe resides in the thin film controller.

Features

TFT color LCD with graphics
Membrane keypad
32 programmable films
99 processes
999 layers per process
2 sensor measurement channels
2 source control channels
8/12 event selectable I/O circuitry
RS-232 computer communications
Interface connectors
Operations manual on CD-ROM
Patented Modelock Measurement System

Options

Ethernet computer communications
Handheld power controller for manual operation
Rack mount kit for 1 or 2 units

A complete deposition control system requires five components:

For more detail information, please contact +1 800 245 1656 or to speak to someone directly click here .

A Complete Package Consists of

Note: Below you will find common components needed to build a complete package. If you do not see an item that you need, please contact your local KJLC Sales Representative.

Components Needed	Description
QCM Sensor	The type of necessary sensor is based on the application. For common applications, a Front Load Sensor or Cool Drawer Sensor with either single or dual crystals may be appropriate. For a production application, a CrystalTwelve may be used for automatic crystal switching.
In-Vacuum Cable	The In-vacuum cable is generally supplied with the QCM sensor. If a replacement is required, please view the Accessories table below.
Feedthrough	Most QCM sensors are available with or without a feedthrough, where coming with a feedthrough is the most common. These feedthroughs come standard with either a 1" bolt or DN40CF flange.
Crystals	Crystals, whether Gold, Silver, or Alloy, are all dependent on the process. Please view the QCM Crystal page for further details.
Short 6" BNC Cable	The short BNC cable connects the atmospheric side of the flange to the oscillator. This is usually included in the oscillator kit. If a replacement is required, please view the Accessories table below.
Oscillator	The ModeLock oscillator is a unique oscillator that ensures stable and high resolution measurements. This is usually included in the oscillator package. If a replacement is required, please view the Accessories table below.
Sensor Input BNC Cable	The sensor input BNC cable connects the other end of the oscillator to the FTM-2400 monitor. This is usually included in the oscillator package. If a replacement Is required, please view the Accessories table below.

Start Your Configuration

1. Base Unit:
2. Additional Computer Communications Module:
3. Remote Hand-held Power Controller:
4. Rack Mount Kits:

Accessories Table

X CLOSE

Description	Reference	Type	Part Number	Price	In Stock	Add Item
Description	Reference	Type	Part Number	Price	In Stock	Add Item
RACK EXTENDER, 3.5" FULL, 19” RACKMOUNT HARDWARE, FOR 1 XTC/3 OR XTM/2	A rack mount kit provides all required materials to mount the control unit into a standard rack. The control units are 1/2 rack	1 unit rack mount kit	780-702-G1	P.O.R.
TWO UNIT RACK MOUNT KIT	In width, thus 2 units can be mounted side by side in one standard rack width	2 unit rack mount kit	780-702-G2	P.O.R.
Ethernet Computer Communications Module	A plug-in Ethernet module providing industry standard signaling protocols and connectors for accepting operational commands from remote sources	Ethernet Computer Communications Module	780-700-G1	P.O.R.
CONTROLLER, HAND HELD, FOR XTC/2 XTC/C	A Hand-held unit that allows remote control of deposition power levels while the controller is in manual mode. The hand-held power controller plugs into the control unit front panel	Hand-held Power Controller	755-262-G1	P.O.R.
100 ft. (30.5m) cable XTC/3, controller to XIU	100 ft. (30.5m) cable XTC/3 controller to XIU	XTC/3 XIU Interconnect Cables	600-1261-P100	P.O.R.
INTERCONNECT CABLE, 15 FEET, CYGNUS 2, IC6, OR XCT/3CONTROLLER TO XIU	15 ft. (4.6m) cable XTC/3 controller to XIU	XTC/3 XIU Interconnect Cables	600-1261-P15	P.O.R.
30 ft. (9.1m) cable, controller to XIU	30 ft. (9.1m) cable XTC/3 controller to XIU	XTC/3 XIU Interconnect Cables	600-1261-P30	P.O.R.
50 ft. (15.3m) cable, controller to XIU	50 ft. (15.3m) cable XTC/3 controller to XIU	XTC/3 XIU Interconnect Cables	600-1261-P50	P.O.R.
CABLE,6"OSCILLATOR TO F/T,FOR XTC/2 AND IC/5 UNITS.	6 in. (5.2 cm) cable XIU to vacuum feedthrough	XTC/3 XIU Interconnect Cables	755-257-G6	P.O.R.
IC6, XTC/3 XIU PKG WITH 100 ft. (30.5m) CABLE	with 100 ft. (30.5m) XTC/3 to XIU cbl. 4m Sense Head in-vac. cbl. 6 inch BNC (XIU to Feedthrough) cbl.	XTC/3 XIU PKG (Oscillator)	781-611-G100	P.O.R.
IC6, XTC/3 XIU PKG WITH 15 ft. (4.6m) CABLE	with 15 ft. (4.6m) cable	XTC/3 XIU PKG (Oscillator)	781-611-G15	P.O.R.
IC6, XTC/3 XIU PKG WITH 50 ft. (15.3m) CABLE	with 50 ft. (15.3m) cable	XTC/3 XIU PKG (Oscillator)	781-611-G50	P.O.R.
IC6, XTC/3 XIU PKG w/ 100 ft. (30.5m) IC6, XTC/3 to XIU cbl, 3.5m Sens Head in-vac. cbl. & 20 inch BNC (XIU to Feedthrough) cbl.	with 100 ft. (30.5m) XTC/3 to XIU cbl. 3.5m Sense Head in-vac. cbl. 20 inch BNC (XIU to Feedthrough) cbl.	XTC/3 XIU PKG (Oscillator)	781-613-G100	P.O.R.
IC6, XTC/3 XIU PKG w/ 15 ft. (4.6m) IC6, XTC/3 to XIU cbl, 3.5m Sens Head in-vac. cbl. & 20 inch BNC (XIU to Feedthrough) cbl.	with 15 ft. (4.6m) XTC/3 to XIU cbl. 3.5m Sense Head in-vac. cbl. 20 inch BNC (XIU to Feedthrough) cbl.	XTC/3 XIU PKG (Oscillator)	781-613-G15	P.O.R.
IC6, XTC/3 XIU PKG w/ 30 ft. (9.1m) IC6, XTC/3 to XIU cbl, 3.5m Sens Head in-vac. cbl. & 20 inch BNC (XIU to Feedthrough) cbl.	with 30 ft. (9.1m) XTC/3 to XIU cbl. 3.5m Sense Head in-vac. cbl. 20 inch BNC (XIU to Feedthrough) cbl.	XTC/3 XIU PKG (Oscillator)	781-613-G30	P.O.R.
IC6, XTC/3 XIU PKG w/ 50 ft. (15.3m) IC6, XTC/3 to XIU cbl, 3.5m Sens Head in-vac. cbl. & 20 inch BNC (XIU to Feedthrough) cbl.	with 50 ft. (15.3m) XTC/3 to XIU cbl. 3.5m Sense Head in-vac. cbl. 20 inch BNC (XIU to Feedthrough) cbl.	XTC/3 XIU PKG (Oscillator)	781-613-G50	P.O.R.
XTC/3M OR XTC/3S COMMUNICATIONS LIBRARY (DLL) ON CD	Contains functions that allow the creation of a program for a remote PC to control either an XTC/3M or XTC/3S via an RS232 or TCP/IP connection	XTC/3M or XTC/3S Communications Library (DLL)	780-038-G1	P.O.R.
EDITOR/MONITOR SOFTWARE CD FOR XTC/3M & XTC/3S, WINDOWS BASED, ALLOWS COMPLETE PROGRAMMING, MONITORING, AND DATALOGGING	Windows based applications software that allows complete programming, monitoring, and data logging of an XTC/3M or XTC/3S	XTC/3M or XTC/3S Editor / Monitor Software	780-032-G1	P.O.R.