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MKS® GE50A Digital Mass Flow Controller

General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates up to 50 slm

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For a download of the product datasheet, click here.

For a download of the product manual, click here.
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To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Warning Notes: If gases other than the calibrated gas are used, the user is responsible for ensuring seal material compatibility.

Start Your Configuration

1. Series: MFC Mass Flow Controller GE50A [GE50A]
2. Gas:
3. Flow Range Full Scale:
4. Fittings:
5. Connector:
6. Seal Materials:
7. Valve Type:
8. Firmware: MKS will ship current firmware. If something else is needed, please contact KJLC. [20]
 

Ordering Table

Please reference the ordering table below for MFC's that we generally have in stock in one of our global warehouses.

Type Description Seal Flow
Range
Connections Fittings Part Number Price In Stock Add Item
Type Description Seal Flow
Range
Connections Fittings Part Number Price In Stock Add Item
Ar MASS FLOW CONTROLLER, GE50A, Ar, 1000 SCCM, 1/4'' SWAGELOK,0-5 VDC / 15 PIN SUB D TIED GROUNDS, VITON, N.C. Elastomer (Viton) 20 to 1000 sccm Analog 0-5 VDC, 15 Pin Sub D, Tied Grounds 1/4" Swagelok
GE50A004103SMV020
P.O.R.
In Stock
N2 MASS FLOW CONTROLLER, GE50A, N2, 10 SCCM, SWAGELOK 4 VCR MALE, 0-5 VDC / 15 PIN SUB D TIED GROUNDS, VITON Elastomer (Viton) 0.2 to 10 sccm Analog 0-5 VDC, 15 Pin Sub D, Tied Grounds Swagelok 4 VCR Male
GE50A013101RMV020
P.O.R.
In Stock
N2 MASS FLOW CONTROLLER, GE50A, N2, 100 SCCM, 6MM SWAGELOK,0-5 VDC / 15 PIN SUB D TIED GROUNDS, VITON, N.C. Elastomer (Viton) 0.2 to 10 sccm Analog 0-5 VDC, 15 Pin Sub D 6 mm Swagelok
GE50A013102MBV020
P.O.R.
Contact KJLC for Availability
N2 MASS FLOW CONTROLLER, GE50A, N2, 100 SCCM, SWAGELOK 4 VCR MALE, 0-5 VDC / 15 PIN SUB D, VITON, N.C. Elastomer (Viton) 2 to 100 sccm Analog 0-5 VDC, 15 Pin Sub D Swagelok® 4 VCR male
GE50A013102RBV020
P.O.R.
In Stock
N2 MASS FLOW CONTROLLER, GE50A, N2, 1000 SCCM, 6 MM SWAGELOK,RS485, VITON, N.C. Elastomer (Viton) 20 to 1000 sccm RS-485, 9 Pin Sub D 6 mm Swagelok
GE50A013103M5V020
P.O.R.
Contact KJLC for Availability
N2 MASS FLOW CONTROLLER, GE50A, N2, 1000 SCCM, 6MM SWAGELOK, 0-5 VDC / 15 PIN SUB D, VITON, N.C. Elastomer 20 to 1000 sccm Analog, 15 Pin Sub D 6 MM Swagelok
GE50A013103MBV020
P.O.R.
Contact KJLC for Availability
N2 MASS FLOW CONTROLLER, GE50A, N2, 1000 SCCM, SWAGELOK 4 VCR MALE, 0-5 VDC / 15 PIN SUB D, VITON, N.C. Elastomer (Viton) 20 to 1000 sccm Analog 0-5 VDC, 15 Pin Sub D Swagelok® 4 VCR male
GE50A013103RBV020
P.O.R.
Contact KJLC for Availability
N2 MASS FLOW CONTROLLER, GE50A, N2, 1000 SCCM, ¼” SWAGELOK, 0-5 VDC / 15 PIN SUB D, VITON, N.C. Elastomer 20 to 1000 sccm Analog, 15 Pin Sub D 1/4" Swagelok
GE50A013103SBV020
P.O.R.
Contact KJLC for Availability
N2 MASS FLOW CONTROLLER, GE50A, N2, 1000 SCCM, KF16, 0-5 VDC / 15 PIN SUB D, VITON, N.C. Elastomer 20 to 1000 sccm Analog, 15 Pin Sub D KF16
GE50A013103UBV020
P.O.R.
Contact KJLC for Availability
N2 MASS FLOW CONTROLLER, GE50A, N2, 2000 SCCM, SWAGELOK 4 VCR MALE, 0-5 VDC / 15 PIN SUB D, VITON, N.C. Elastomer (Viton) 40 to 2000 sccm Analog 0-5 VDC, 15 Pin Sub D Swagelok® 4 VCR male
GE50A013203RBV020
P.O.R.
In Stock
N2 MASS FLOW CONTROLLER, GE50A, N2, 50 SCCM, ¼” SWAGELOK, 0-5 VDC / 15 PIN SUB D, VITON, N.C. Elastomer 1 to 50 sccm Analog, 15 Pin Sub D 1/4" Swagelok
GE50A013501SBV020
P.O.R.
Contact KJLC for Availability
N2 MASS FLOW CONTROLLER, GE50A, N2, 500 SCCM, SWAGELOK 4 VCR MALE, 0-5 VDC / 15 PIN SUB D, VITON, N.C. Elastomer (Viton) 10 to 500 sccm Analog 0-5 VDC, 15 Pin Sub D Swagelok® 4 VCR male
GE50A013502RBV020
P.O.R.
In Stock
N2 MASS FLOW CONTROLLER, GE50A, N2, 500 SCCM, ¼” SWAGELOK, 0-5 VDC / 15 PIN SUB D, NEOPRENE, N.C. Elastomer 10 to 500 sccm Analog, 15 Pin Sub D 1/4" Swagelok
GE50A013502SBN020
P.O.R.
Contact KJLC for Availability
O2 MASS FLOW CONTROLLER, GE50A, O2, 5 SCCM, SWAGELOK 4 VCR MALE, 0-5 VDC / 15 PIN SUB D, VITON, N.C. Elastomer (Viton) 0.1 to 5 sccm Analog 0-5 VDC, 15 Pin Sub D Swagelok® 4 VCR male
GE50A015500RBV020
P.O.R.
Contact KJLC for Availability
N2 MASS FLOW CONTROLLER, GE50A, N2, 100 SCCM, ¼” SWAGELOK, RS485, VITON, N.C. Elastomer (Viton) 2 to 100 sccm RS-485, 9 Pin Sub D 1/4" Swagelok
GE50A013102S5V020
P.O.R.
In Stock
N2 MASS FLOW CONTROLLER, GE50A, N2, 1000 SCCM, ¼” SWAGELOK, RS485, VITON, N.C. Elastomer (Viton) 20 to 1000 sccm RS-485, Pin Sub D 1/4" Swagelok
GE50A013103S5V020
P.O.R.
In Stock


Accessories Table

Description Reference Part Number Price In Stock Add Item
Description Reference Part Number Price In Stock Add Item
NON RoHS/ CE, MASS FLOW CONTROLER POWER SUPPLY READOUT, SIN 246C Single Channel Display, Power Supply / Readout
246C
P.O.R.
Contact KJLC for Availability
NON RoHS/ CE, MASS FLOW CONTROLER POWER SUPPLY READOUT, FOU 247D 4 Channel Sequential Display, Power Supply / Readout
247D
P.O.R.
Contact KJLC for Availability
CABLE, 4.5 FEET, POWER SUPPLY, AC/DC WALL MOUNT ADAPTOR, 24V, 20W, 15 PIN FEMALE CONNECTOR, SWAPPABLE CLIP KIT FOR GLOBAL USAGE INCLUDED Wall Transformer, 15 pin, 4.5 ft., Universal Plug Ends
KJLPS601UNI
P.O.R.
Contact KJLC for Availability
CABLE, MFC TO 246/247, 15 PIN, 10 FT. 15 Pin Sub-D 3-meter cable
RCBDMFC-1-10
P.O.R.
Contact KJLC for Availability
CABLE, MFC TO 246/247, 9 PIN, 10 FT. 9 Pin Sub-D 3-meter cable
RCBDMFC-3-10
P.O.R.
Contact KJLC for Availability

Interested in a MKS GE50A Digital Mass Flow Controller?

Please click the button below to provide information on the model GE50A Digital MFC that is required. The request will be forwarded to a KJLC Technical Specialist.

Contact Us - MKS® GE50A Digital Mass Flow Controller