MKS® GM100A Digital Mass Flow Controller
Multi-gas, multi-range, metal sealed, digital mass flow controller for rates up to 100 slm
The GM100A digitally-controlled mass flow controller is available with either analog (0 to 5 VDC or 4 to 20 mA) or RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas.
A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GM100A mass flow controller has an electropolished surface finish.
Features & Benefits
- Patented thermal sensor design for exceptional zero stability
- Percent of setpoint accuracy enables precise process control
- Embedded user interface - easily change device range & user gas, monitor & measure performance
GM100A is a general purpose MFC designed for a wide variety of applications requiring flow control capability from 50 slm to 100 slm Full Scale, N2 equivalent, and is also suitable for high purity processes.
|Input Power||+15 to +24 VDC @ (<4 watts)|
|Full Scale Flow Ranges||50,000 - 100,000 sccm N2 equivalent|
|Maximum Inlet Pressure||150 psig (can not exceed pressure differential requirement across MFC)|
|50,000 - 100,000 sccm; 40 to 80 psid|
(N2 Full Scale with atmospheric pressure at the MFC outlet)
|Proof Pressure||1000 psig|
|Burst Pressure||1500 psig|
|Control Range||2% to 100% of Full Scale (range on mech.)|
|Typical Accuracy||± 1% of set point for 20 to 100% Full Scale|
± 0.2% of Full Scale for 2 to 20% Full Scale
(with N2 calibration gas)
|Repeatability||± 0.3% of Reading|
|Resolution||0.1% of Full Scale|
|Typical Controller Settling Time||<750 msec., typical above 10% Full Scale|
(per SEMI Guideline E-17-0600)
|Warm-up Time||<30 min (to within 0.2% of Full Scale of steady state performance)|
|Operating Temperature Range||10°C to 50°C (Ambient)|
|Storage Humidity||0 to 95% Relative Humidity, non-condensing|
|Storage Temperature||-20° to 80°C (-4° to 149° F)|
|Leak Integrity - External||<1 x 10-10 (scc/sec He)|
|Leak Integrity - Through Closed Valve||<1.0% of Full Scale at 40 psig inlet to atmosphere|
(to assure no flow-through, a separate positive shut-off valve is required)
|Flow Input/Output Signal - Voltage||15 pin Type "D" male, 9 pin Type "D" male|
|Flow Input/Output Signal - Current||15 pin Type "D" male (4 to 20 mA)|
Ordering Code Example: GM100A013105T6MB020
|Type MFC Mass Flow Controller GM100A||GM100A||GM100A|
|Gas (Per Semi Standard E52-0703)||Code||Configuration|
|013 = Nitrogen = N2||013||013|
|Flow Range Full Scale*||Code||Configuration|
|50000 sccm (50 slm)||504||105|
|75000 sccm (75 slm)||754|
|100000 sccm (100 slm)||105|
|Fittings (compatible with)||Code||Configuration|
|Swagelok® 4 VCR male (high flow)||R|
|Swagelok® 8 VCR male||T|
|Swagelok® 8 VCO male (Consult Factory)||D|
|KF-16 (Consult Factory)||U|
|RS485 (uses 9 pin connector)||5|
|Profibus® (1179B Compatible)||3|
|Analog 0 to 5 VDC (9 pin D connector)||A|
|Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds||L|
|Analog 0 to 5 VDC (15 pin D connector)||B|
|Analog 0 to 5 VDC (15 pin D connector), Tied Grounds||M|
|Analog 0 to 5 VDC (15 pin D connector), 1179B 24 VDC Pinout (Consult Factory)||K|
|Analog 0 to 5 VDC (15 pin D Connector), Brooks Instrument Compatible||E|
|Analog 0 to 5 VDC (15 pin D Connector), Celerity Compatible||U|
|Analog 4 to 20 mA (15 pin D connector)||H|
|Mass Flow Meter||3|
|Buna Valve Plug||B||B|
|Neoprene Valve Plug||N|
|Viton Valve Plug||V|
|EPDM Valve Plug||E|
|No Valve (MFM Option)||0|
|Reserved for MKS Future Use||Code||Configuration|
|Unless otherwise specified, MKS will ship firmware revision current to date||20||20|
* The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten.
** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas.
Free, downloadable software that allows for simple monitoring and configurations of the MKS MFC.
Features and Benefits
- Easy to use interface
- Ability to switch between a library of over 150 different gases
- Can plot and record the flow data
- Downloadable calibration report for the MFC unit
For further details, please reference the Software User Manual.
To record data using the plotting tool, please contact email@example.com for the Java Policy update.
246 Power supply and Readout
247 Power supply and Readout
The MKS Instruments 246 single channel/readout is designed to control and display most MKS flow transducers. If multiple channels are required, the MKS Instruments 247 controller provides a four channel, sequentially selectable readout. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The unit supplies ±15 VDC power.
Features and Benefits:
- Power and control between 1 - 4 MFC units.
- Compatible with most MKS MFC units.
- Standalone controllers
946 Vacuum System Controller
Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.
Features and Benefits:
- Simultaneous control and readout for up to six MFC's and/or vacuum gauges
- Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
- Pressure readings from 1,000 Torr down to 10-11 Torr, eliminating the need for individual electronics for each sensor
- 12 set point relays included in the base unit for system control flexibility
- Standalone controller
|Power Supply and Readouts||MFC Software||246 Power Supply and Display||247 Power Supply and Display||946 Vacuum System Controller||PAC 100 Automation System|
|Display Type||PC (not included)||3 1/2 digit 0.56" red LED, continuous display||3 1/2 digit 0.56" red LED, display is 1 of 4 sequentially selectable||320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position.||PC (not included)|
|Channels||1 MFC||1 MFC||4 MFC's||6 of any combination below.
MKS MFC's*MKS Baratrons*, MKS Piranis*, MKS Convectron/Convection Series*, MKS Hot and Cold Cathode Sensors*, MKS Pressure Control Valves*
|4 of any combination below.
MKS MFC's*, MKS Baratrons*
**Other modules available
|Power Input||N/A||117/234 VAC ±15%, 50-60 Hz||117/234 VAC ±15%, 50-60 Hz||150 watts maximum 100 - 240 VAC 50/60 Hz||19VDC - 32VDC, Max - 5A (each for DC I/O and DC CORE)|
|Approximate List Price||Free (included with MFC purchase)||$1225 (interface cable not included)||$1850 (interface cable not included)||$1814 to $5877 (region specific power cable included) (interface cables not included)||$1740 (interface cables not included)|
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MKS GM100A Digital Mass Flow Controller